Patent | Date |
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Polishing/cleaning method as well as method of making a wiring section using a polishing apparatus Grant 6,776,691 - Nishimura , et al. August 17, 2 | 2004-08-17 |
Precise polishing apparatus and method Grant 6,629,882 - Takahashi , et al. October 7, 2 | 2003-10-07 |
Polishing apparatus, cleaning apparatus to be used for such a polishing apparatus and polishing/cleaning method as well as method of making a wiring section App 20020052174 - Nishimura, Matsuomi ;   et al. | 2002-05-02 |
Polishing apparatus with slurry screening Grant 6,352,469 - Miyazaki , et al. March 5, 2 | 2002-03-05 |
Precise polishing apparatus and method App 20020019204 - Takahashi, Kazuo ;   et al. | 2002-02-14 |
Polishing apparatus including holder and polishing head with rotational axis of polishing head offset from rotational axis of holder and method of using Grant 6,299,506 - Nishimura , et al. October 9, 2 | 2001-10-09 |
Polishing Apparatus Including Holder And Polishing Head With Rotational Axis Of Polishing Head Offset From Rotational Axis Of Holder And Method Of Using App 20010019934 - NISHIMURA, MATSUOMI ;   et al. | 2001-09-06 |
Polishing apparatus and method Grant 6,183,345 - Kamono , et al. February 6, 2 | 2001-02-06 |
Chemical mechanical polishing apparatus and method Grant 6,179,695 - Takahashi , et al. January 30, 2 | 2001-01-30 |
Method of manufacturing semiconductor device using precision polishing apparatus with detecting means Grant 6,165,050 - Ban , et al. December 26, 2 | 2000-12-26 |
Chemical-mechanical polishing apparatus and method Grant 6,162,112 - Miyazaki , et al. December 19, 2 | 2000-12-19 |
Precision polishing apparatus with detecting means Grant 6,012,966 - Ban , et al. January 11, 2 | 2000-01-11 |
Precision polishing apparatus Grant 5,904,611 - Takahashi , et al. May 18, 1 | 1999-05-18 |
Method for driving liquid, and method and apparatus for mixing and agitation employing the method Grant 5,788,819 - Onishi , et al. August 4, 1 | 1998-08-04 |
Method for specimen measurement Grant 5,601,983 - Takayama , et al. February 11, 1 | 1997-02-11 |
Liquid moving apparatus and measuring apparatus utilizing the same Grant 5,599,502 - Miyazaki , et al. February 4, 1 | 1997-02-04 |
Method and apparatus for particle manipulation, and measuring apparatus utilizing the same Grant 5,495,105 - Nishimura , et al. February 27, 1 | 1996-02-27 |
Apparatus and method for measuring specimen Grant 5,427,959 - Nishimura , et al. June 27, 1 | 1995-06-27 |
Sample measuring device and sample measuring system Grant 5,370,842 - Miyazaki , et al. December 6, 1 | 1994-12-06 |
Movable film fixing device with heater control responsive to selected sheet size Grant 5,171,969 - Nishimura , et al. December 15, 1 | 1992-12-15 |
Electrophotographic copying apparatus utilizing liquid developer Grant 4,168,119 - Nishimura , et al. September 18, 1 | 1979-09-18 |