loadpatents
Patent applications and USPTO patent grants for NISHIMURA; Joichi.The latest application filed is for "substrate processing device".
Patent | Date |
---|---|
Substrate Processing Device App 20220023923 - OKITA; Nobuaki ;   et al. | 2022-01-27 |
Substrate Processing Device App 20190201949 - OKITA; Nobuaki ;   et al. | 2019-07-04 |
Substrate treating system Grant 8,746,171 - Nishimura June 10, 2 | 2014-06-10 |
Substrate cleaning device and substrate processing apparatus including the same Grant 8,286,293 - Nishiyama , et al. October 16, 2 | 2012-10-16 |
Bevel inspection apparatus for substrate processing Grant 7,641,406 - Nishimura , et al. January 5, 2 | 2010-01-05 |
Substrate Treating System App 20090044747 - Nishimura; Joichi | 2009-02-19 |
Substrate Cleaning Device And Substrate Processing Apparatus Including The Same App 20090025155 - Nishiyama; Koji ;   et al. | 2009-01-29 |
Bevel Inspection Apparatus For Substrate Processing App 20090027634 - Nishimura; Joichi ;   et al. | 2009-01-29 |
Substrate processing apparatus and method including obstacle detection Grant 7,231,273 - Nishimura , et al. June 12, 2 | 2007-06-12 |
Substrate processing apparatus and substrate processing method App 20050204196 - Nishimura, Joichi ;   et al. | 2005-09-15 |
Substrate processing apparatus and substrate processing method App 20050123386 - Nishimura, Joichi ;   et al. | 2005-06-09 |
Substrate processing apparatus Grant 6,896,466 - Nishimura , et al. May 24, 2 | 2005-05-24 |
Substrate processing apparatus Grant 6,790,286 - Nishimura , et al. September 14, 2 | 2004-09-14 |
Substrate processing apparatus, substrate inspection method and substrate processing system Grant 6,790,287 - Shiga , et al. September 14, 2 | 2004-09-14 |
Robot Grant 6,688,189 - Hashimoto , et al. February 10, 2 | 2004-02-10 |
Substrate processing apparatus, substrate inspection method and substrate procesing system App 20020189758 - Shiga, Masayoshi ;   et al. | 2002-12-19 |
Substrate processing apparatus App 20020106269 - Nishimura, Joichi ;   et al. | 2002-08-08 |
Substrate processing apparatus App 20020092368 - Nishimura, Joichi ;   et al. | 2002-07-18 |
Substrate processing apparatus Grant 6,371,713 - Nishimura , et al. April 16, 2 | 2002-04-16 |
Robot App 20010035065 - Hashimoto, Yasuhiko ;   et al. | 2001-11-01 |
Substrate cleaning apparatus and method Grant 6,286,525 - Nishimura , et al. September 11, 2 | 2001-09-11 |
Substrate cleaning apparatus and method Grant 6,260,562 - Morinishi , et al. July 17, 2 | 2001-07-17 |
Method of and apparatus for cleaning substrate Grant 6,151,744 - Ohtani , et al. November 28, 2 | 2000-11-28 |
Substrate processing apparatus having regulated power consumption and method therefor Grant 6,060,697 - Morita , et al. May 9, 2 | 2000-05-09 |
Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus Grant 6,051,101 - Ohtani , et al. April 18, 2 | 2000-04-18 |
Substrate spin cleaning apparatus Grant 5,829,087 - Nishimura , et al. November 3, 1 | 1998-11-03 |
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