Patent | Date |
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Plasma processing apparatus Grant 11,427,909 - Nishimoto August 30, 2 | 2022-08-30 |
Plasma Processing Apparatus App 20180251895 - NISHIMOTO; Shinya | 2018-09-06 |
Plasma treatment device and optical monitor device Grant 8,974,628 - Nozawa , et al. March 10, 2 | 2015-03-10 |
Temperature adjusting mechanism and semiconductor manufacturing apparatus using temperature adjusting mechanism Grant 8,968,512 - Nishimoto March 3, 2 | 2015-03-03 |
Plasma Treatment Device And Optical Monitor Device App 20130180660 - Nozawa; Toshihisa ;   et al. | 2013-07-18 |
Processing apparatus Grant 8,485,127 - Nishimoto , et al. July 16, 2 | 2013-07-16 |
Microwave plasma processing apparatus and method of supplying microwaves using the apparatus Grant 8,327,795 - Nishimoto December 11, 2 | 2012-12-11 |
Plasma processing apparatus and plasma processing method Grant 8,267,040 - Ishibashi , et al. September 18, 2 | 2012-09-18 |
Microwave plasma processing apparatus and method for producing cooling jacket Grant 8,242,405 - Nishimoto August 14, 2 | 2012-08-14 |
Microwave plasma processing apparatus and method of supplying microwaves using the apparatus Grant 8,171,880 - Nishimoto May 8, 2 | 2012-05-08 |
Method and apparatus for an improved baffle plate in a plasma processing system Grant 8,057,600 - Nishimoto , et al. November 15, 2 | 2011-11-15 |
Plasma Processing Apparatus, Plasma Processing Method, And Mechanism For Regulating Temperature Of Dielectric Window App 20110168673 - Nishimoto; Shinya | 2011-07-14 |
Microwave Plasma Processing Apparatus And Method For Producing Cooling Jacket App 20110121058 - Nishimoto; Shinya | 2011-05-26 |
Temperature adjusting mechanism and semiconductor manufacturing Appratus using temperature adjusting mechanism App 20110108195 - Nishimoto; Shinya | 2011-05-12 |
Shower Plate And Plasma Processing Device Using The Same App 20110011341 - Nishimoto; Shinya | 2011-01-20 |
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 7,811,428 - Nishimoto , et al. October 12, 2 | 2010-10-12 |
Electrostatic chuck Grant 7,663,860 - Nishimoto , et al. February 16, 2 | 2010-02-16 |
Microwave Plasma Processing Apparatus And Method Of Supplying Microwaves Using The Apparatus App 20090317566 - NISHIMOTO; Shinya | 2009-12-24 |
Microwave Plasma Processing Apparatus And Method Of Supplying Microwaves Using The Apparatus App 20090314629 - NISHIMOTO; Shinya | 2009-12-24 |
Microwave Plasma Processing Apparatus App 20090301656 - NISHIMOTO; Shinya ;   et al. | 2009-12-10 |
Plasma Processing Apparatus App 20090194238 - Ishibashi; Kiyotaka ;   et al. | 2009-08-06 |
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system Grant 7,566,379 - Nishimoto , et al. July 28, 2 | 2009-07-28 |
Processing Apparatus App 20090133835 - Nishimoto; Shinya ;   et al. | 2009-05-28 |
Plasma Processing Apparatus and Plasma Processing Method App 20070264441 - Ishibashi; Kiyotaka ;   et al. | 2007-11-15 |
Method and apparatus for an improved baffle plate in a plasma processing system Grant 7,282,112 - Nishimoto , et al. October 16, 2 | 2007-10-16 |
Method And Apparatus For An Improved Baffle Plate In A Plasma Processing System App 20070204794 - Nishimoto; Shinya ;   et al. | 2007-09-06 |
Method And Apparatus For An Improved Optical Window Deposition Shield In A Plasma Processing System App 20070102287 - Nishimoto; Shinya ;   et al. | 2007-05-10 |
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system App 20070034337 - Nishimoto; Shinya ;   et al. | 2007-02-15 |
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 7,163,585 - Nishimoto , et al. January 16, 2 | 2007-01-16 |
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system Grant 7,147,749 - Nishimoto , et al. December 12, 2 | 2006-12-12 |
Electrostatic chuck App 20050207088 - Nishimoto, Shinya ;   et al. | 2005-09-22 |
Method and apparatus for an improved baffle plate in a plasma processing system App 20050103268 - Nishimoto, Shinya ;   et al. | 2005-05-19 |
Processing apparatus App 20050042881 - Nishimoto, Shinya ;   et al. | 2005-02-24 |
Method and apparatus for an improved baffle plate in a plasma processing system Grant 6,837,966 - Nishimoto , et al. January 4, 2 | 2005-01-04 |
Method and apparatus for an improved optical window deposition shield in a plasma processing system Grant 6,798,519 - Nishimoto , et al. September 28, 2 | 2004-09-28 |
Method and apparatus for an improved optical window deposition shield in a plasma processing system App 20040173155 - Nishimoto, Shinya ;   et al. | 2004-09-09 |
Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system App 20040060661 - Nishimoto, Shinya ;   et al. | 2004-04-01 |
Method And Apparatus For An Improved Optical Window Deposition Shield In A Plasma Processing System App 20040060516 - Nishimoto, Shinya ;   et al. | 2004-04-01 |
Method and apparatus for an improved baffle plate in a plasma processing system App 20040060658 - Nishimoto, Shinya ;   et al. | 2004-04-01 |