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Patent applications and USPTO patent grants for Nishikawa; Katsuhito.The latest application filed is for "gas ring and method of processing substrates".
Patent | Date |
---|---|
Rapid thermal process reactor utilizing a low profile dome Grant 8,610,033 - Moore , et al. December 17, 2 | 2013-12-17 |
Gas ring and method of processing substrates Grant 7,794,667 - Nishikawa , et al. September 14, 2 | 2010-09-14 |
Gas ring and method of processing substrates App 20070087533 - Nishikawa; Katsuhito ;   et al. | 2007-04-19 |
Rotating susceptor and method of processing substrates App 20030029384 - Nishikawa, Katsuhito | 2003-02-13 |
Linear robot Grant 6,491,435 - Nishikawa , et al. December 10, 2 | 2002-12-10 |
Gas dispersion head Grant 6,475,284 - Moore , et al. November 5, 2 | 2002-11-05 |
Particulate free air bearing and seal Grant 6,443,618 - Nishikawa , et al. September 3, 2 | 2002-09-03 |
Rapid thermal processing apparatus for processing semiconductor wafers Grant 6,310,327 - Moore , et al. October 30, 2 | 2001-10-30 |
Substrate support element Grant 6,163,015 - Moore , et al. December 19, 2 | 2000-12-19 |
Rapid thermal processing apparatus for processing semiconductor wafers Grant 6,151,447 - Moore , et al. November 21, 2 | 2000-11-21 |
Rapid thermal processing apparatus for processing semiconductor wafers Grant 5,710,407 - Moore , et al. January 20, 1 | 1998-01-20 |
Rapid thermal processing apparatus for processing semiconductor wafers Grant 5,683,518 - Moore , et al. November 4, 1 | 1997-11-04 |
Rapid thermal processing apparatus for processing semiconductor wafers Grant 5,444,217 - Moore , et al. August 22, 1 | 1995-08-22 |
Method and apparatus for transferring wafers between cassettes and a boat Grant 4,770,590 - Hugues , et al. September 13, 1 | 1988-09-13 |
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