Nishikawa; Jin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nishikawa; Jin.The latest application filed is for "exposure apparatus, manufacturing method and supporting method thereof".

Company Profile

0.6.12

Nishikawa; Jin - Tokyo JP
Nishikawa; Jin - Kumagaya JP
Nishikawa; Jin - Arakawa-ku JP
Nishikawa, Jin - Kumagaya-Shi JP
Nishikawa; Jin - Chiyoda-ku JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus Grant 8,576,375 - Nishikawa November 5, 2	2013-11-05
Illumination optical apparatus, exposure apparatus, and method for producing device Grant 7,719,661 - Nishikawa May 18, 2	2010-05-18
System for controlling a dual mover assembly for an exposure apparatus Grant 7,583,361 - Hsin , et al. September 1, 2	2009-09-01
Exposure apparatus, manufacturing method and supporting method thereof App 20090190117 - Ono; Kazuya ; et al.	2009-07-30
Illumination optical apparatus, exposure apparatus, and method for producing device App 20090141257 - Nishikawa; Jin	2009-06-04
Illumination optical apparatus, exposure apparatus, and method for producing device App 20090135386 - Nishikawa; Jin	2009-05-28
Cooling Apparatus For Optical Member, Barrel, Exposure Apparatus, And Device Manufacturing Method App 20090103063 - Nishikawa; Jin	2009-04-23
Optical Member-holding Apparatus, Method For Adjusting Position Of Optical Member, And Exposure Apparatus App 20080291416 - Nishikawa; Jin	2008-11-27
Hexapod kinematic mountings for optical elements, and optical systems comprising same App 20070284502 - Hsin; Yi-Ping ; et al.	2007-12-13
System for controlling a dual mover assembly for an exposure apparatus App 20070211237 - Hsin; Yi-Ping ; et al.	2007-09-13
Optical system, exposure apparatus having the optical system and device producing method App 20040240079 - Nishikawa, Jin	2004-12-02
Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing method Grant 6,791,766 - Nishikawa September 14, 2	2004-09-14
Projection optical system, manufacturing method thereof, and projection exposure apparatus Grant 6,757,051 - Takahashi , et al. June 29, 2	2004-06-29
Optical element holding device App 20030147155 - Nishikawa, Jin	2003-08-07
Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing method App 20030076602 - Nishikawa, Jin	2003-04-24
Exposure Apparatus, Apparatus For Manufacturing Devices, And Method Of Manufacturing Exposure Apparatuses App 20020145711 - MAGOME, NOBUTAKA ; et al.	2002-10-10
Projection optical system, manufacturing method thereof, and projection exposure apparatus App 20020044260 - Takahashi, Tetsuo ; et al.	2002-04-18

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