NISHII; Yasufumi

Patent Applications and Registrations

Patent applications and USPTO patent grants for NISHII; Yasufumi.The latest application filed is for "stage apparatus, exposure apparatus, and exposure method".

Company Profile

0.28.42

NISHII; Yasufumi - Kumagaya-shi JP
Nishii; Yasufumi - Kumagaya JP
Nishii; Yasufumi - Kumayaga-shi JP
Nishii; Yasufumi - Saitama-ken JP
Nishii; Yasufumi - Kumaga-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Stage Apparatus, Exposure Apparatus, And Exposure Method App 20180004096 - NISHII; Yasufumi ; et al.	2018-01-04
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,846,371 - Owa , et al. December 19, 2	2017-12-19
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20170329234 - OWA; Soichi ; et al.	2017-11-16
Exposure apparatus, and exposure method, with recovery device to recover liquid leaked from between substrate and member Grant 9,798,245 - Nishii , et al. October 24, 2	2017-10-24
Exposure apparatus, exposure method, and method for producing device Grant 9,766,555 - Nagasaka , et al. September 19, 2	2017-09-19
Exposure apparatus and device manufacturing method Grant 9,599,907 - Nagasaka , et al. March 21, 2	2017-03-21
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20160246188 - NAGASAKA; Hiroyuki ; et al.	2016-08-25
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,268,237 - Owa , et al. February 23, 2	2016-02-23
Exposure apparatus, exposure method, and method for producing device Grant 9,182,684 - Nagasaka , et al. November 10, 2	2015-11-10
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20150301457 - OWA; Soichi ; et al.	2015-10-22
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,019,467 - Owa , et al. April 28, 2	2015-04-28
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method Grant 9,013,675 - Nishii , et al. April 21, 2	2015-04-21
Maintenance method, maintenance device, exposure apparatus, and device manufacturing method Grant 8,891,055 - Fujiwara , et al. November 18, 2	2014-11-18
Exposure Apparatus, Exposure Method, And Method For Producing Device App 20140240684 - NAGASAKA; Hiroyuki ; et al.	2014-08-28
Exposure apparatus, exposure method, and method for producing device Grant 8,736,809 - Nagasaka , et al. May 27, 2	2014-05-27
Exposure Apparatus And Device Manufacturing Method App 20130271739 - NAGASAKA; Hiroyuki ; et al.	2013-10-17
Maintenance Method, Maintenance Device, Exposure Apparatus, And Device Manufacturing Method App 20130235359 - FUJIWARA; Tomoharu ; et al.	2013-09-12
Exposure apparatus and device manufacturing method Grant 8,488,099 - Nagasaka , et al. July 16, 2	2013-07-16
Exposure Apparatus, Exposure Method, Device Manufacturing Method, Program, And Recording Medium App 20130169944 - NISHII; Yasufumi ; et al.	2013-07-04
Exposure apparatus and device manufacturing method Grant 8,477,283 - Nishii July 2, 2	2013-07-02
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141701 - OWA; Soichi ; et al.	2013-06-06
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141703 - OWA; Soichi ; et al.	2013-06-06
Maintenance method, maintenance device, exposure apparatus, and device manufacturing method Grant 8,456,608 - Fujiwara , et al. June 4, 2	2013-06-04
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,384,880 - Owa , et al. February 26, 2	2013-02-26
Immersion System, Exposure Apparatus, Exposing Method, And Device Fabricating Method App 20120300181 - NISHII; Yasufumi	2012-11-29
Exposure apparatus, immersion system, exposing method, and device fabricating method Grant 8,300,207 - Nishii October 30, 2	2012-10-30
Immersion system, exposure apparatus, exposing method, and device fabricating method Grant 8,233,139 - Nishii July 31, 2	2012-07-31
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,208,117 - Owa , et al. June 26, 2	2012-06-26
Liquid Recovery System, Immersion Exposure Apparatus, Immersion Exposing Method, And Device Fabricating Method App 20120133912 - NISHII; Yasufumi ; et al.	2012-05-31
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method Grant 8,134,685 - Nishii , et al. March 13, 2	2012-03-13
Exposure apparatus, maintenance method, exposure method, and method for producing device Grant 8,035,800 - Nishii October 11, 2	2011-10-11
Stage apparatus, exposure apparatus, and exposure method with recovery device having lyophilic portion Grant 7,982,857 - Nishii , et al. July 19, 2	2011-07-19
Stage apparatus, exposure apparatus, and exposure method App 20110080574 - Nishii; Yasufumi ; et al.	2011-04-07
Exposure apparatus, exposure method, and method for producing device App 20110032498 - Nagasaka; Hiroyuki ; et al.	2011-02-10
Exposure apparatus, exposing method and device fabricating method App 20100328637 - Nishii; Yasufumi	2010-12-30
Maintenance method, maintenance device, exposure apparatus, and device manufacturing method App 20100315609 - Fujiwara; Tomoharu ; et al.	2010-12-16
Maintenance method, maintenance device, exposure apparatus, and device manufacturing method Grant 7,804,576 - Fujiwara , et al. September 28, 2	2010-09-28
Immersion system, exposure apparatus, exposing method, and device fabricating method App 20090280436 - Nishii; Yasufumi	2009-11-12
Exposure apparatus, liquid immersion system, exposing method, and device fabricating method App 20090122282 - Nishii; Yasufumi	2009-05-14
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20090015816 - Owa; Soichi ; et al.	2009-01-15
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20090015808 - Owa; Soichi ; et al.	2009-01-15
Exposure apparatus, immersion system, exposing method, and device fabricating method App 20080284991 - Nishii; Yasufumi	2008-11-20
Apparatus and methods for reducing the escape of immersion liquid from immersion lithography apparatus App 20080231823 - Poon; Alex Ka Tim ; et al.	2008-09-25
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method App 20080233512 - Nishii; Yasufumi ; et al.	2008-09-25
Maintenance Method, Maintenance Device, Exposure Apparatus, and Device Manufacturing Method App 20080018867 - Fujiwara; Tomoharu ; et al.	2008-01-24
Exposure Apparatus and Device Producing Method App 20080018866 - Nagasaka; Hiroyuki ; et al.	2008-01-24
Exposure apparatus, maintenance method, exposure method, and method for producing device App 20080013064 - Nishii; Yasufumi	2008-01-17
Exposure apparatus and device manufacturing method App 20070296939 - Nishii; Yasufumi	2007-12-27
Exposure apparatus, exposure method, and method for producing device App 20070263185 - Nagasaka; Hiroyuki ; et al.	2007-11-15
Exposure apparatus, exposure method, and method for producing device App 20070263183 - Nagasaka; Hiroyuki ; et al.	2007-11-15
Exposure apparatus, exposure method, and method for producing device App 20070263186 - Nagasaka; Hiroyuki ; et al.	2007-11-15
Exposure apparatus, exposure method, and method for producing device App 20070258066 - Nagasaka; Hiroyuki ; et al.	2007-11-08
Exposure apparatus, exposure method, and method for producing device App 20070258065 - Nagasaka; Hiroyuki ; et al.	2007-11-08
Exposure apparatus, exposure method, and method for producing device App 20070222958 - Nishii; Yasufumi	2007-09-27
Exposure Apparatus, Exposure Method, and Method for Producing Device App 20070216889 - Nishii; Yasufumi	2007-09-20
Stage apparatus, exposure apparatus, and exposure method App 20070109521 - Nishii; Yasufumi ; et al.	2007-05-17
Exposure apparatus, exposure method, and method for producing device App 20070103661 - Nishii; Yasufumi	2007-05-10
Exposure apparatus, exposure method, and method for producing device App 20060274293 - Nagasaka; Hiroyuki ; et al.	2006-12-07
Exposure apparatus and device fabricating method App 20060250593 - Nishii; Yasufumi	2006-11-09
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20060227312 - Owa; Soichi ; et al.	2006-10-12
Exposure apparatus, exposure method, and method for producing device App 20060146306 - Nagasaka; Hiroyuki ; et al.	2006-07-06
Exposure method, substrate stage, exposure apparatus, and device manufacturing method App 20060139614 - Owa; Soichi ; et al.	2006-06-29
Exposure apparatus, exposure method, and method for producing device App 20050280791 - Nagasaka, Hiroyuki ; et al.	2005-12-22

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