loadpatents
Patent applications and USPTO patent grants for Nimmakayala; Pawan Kumar.The latest application filed is for "strain and kinetics control during separation phase of imprint process".
Patent | Date |
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Strain and kinetics control during separation phase of imprint process Grant 11,161,280 - Khusnatdinov , et al. November 2, 2 | 2021-11-02 |
Strain and Kinetics Control During Separation Phase of Imprint Process App 20190232533 - Khusnatdinov; Niyaz ;   et al. | 2019-08-01 |
Strain and Kinetics Control During Separation Phase of Imprint Process App 20140117574 - Khusnatdinov; Niyaz ;   et al. | 2014-05-01 |
Strain and kinetics control during separation phase of imprint process Grant 8,652,393 - Khusnatdinov , et al. February 18, 2 | 2014-02-18 |
Alignment for edge field nano-imprinting Grant 8,432,548 - Choi , et al. April 30, 2 | 2013-04-30 |
Substrate support system having a plurality of contact lands Grant 8,334,967 - Nimmakayala , et al. December 18, 2 | 2012-12-18 |
Substrate alignment Grant 8,231,821 - Choi , et al. July 31, 2 | 2012-07-31 |
Alignment system and method for a substrate in a nano-imprint process Grant 8,147,731 - Nimmakayala , et al. April 3, 2 | 2012-04-03 |
Alignment System and Method for a Substrate in a Nano-Imprint Process App 20110026039 - Nimmakayala; Pawan Kumar ;   et al. | 2011-02-03 |
Interferometric analysis method for the manufacture of nano-scale devices Grant 7,880,872 - Nimmakayala , et al. February 1, 2 | 2011-02-01 |
Alignment system and method for a substrate in a nano-imprint process Grant 7,837,907 - Nimmakayala , et al. November 23, 2 | 2010-11-23 |
Enhanced multi channel alignment Grant 7,785,096 - Nimmakayala , et al. August 31, 2 | 2010-08-31 |
Substrate Alignment App 20100109202 - Choi; Byung-Jin ;   et al. | 2010-05-06 |
Alignment for Edge Field Nano-Imprinting App 20100110434 - Choi; Byung-Jin ;   et al. | 2010-05-06 |
Strain and Kinetics Control During Separation Phase of Imprint Process App 20100102469 - Khusnatdinov; Niyaz ;   et al. | 2010-04-29 |
Interferometric Analysis Method for the Manufacture of Nano-Scale Devices App 20100038827 - Nimmakayala; Pawan Kumar ;   et al. | 2010-02-18 |
Substrate Support System Having a Plurality of Contact Lands App 20100007868 - Nimmakayala; Pawan Kumar ;   et al. | 2010-01-14 |
Interferometric analysis method for the manufacture of nano-scale devices Grant 7,630,067 - Nimmakayala , et al. December 8, 2 | 2009-12-08 |
Enhanced Multi Channel Alignment App 20090169662 - Nimmakayala; Pawan Kumar ;   et al. | 2009-07-02 |
Alignment System and Method for a Substrate in a Nano-Imprint Process App 20090026657 - Nimmakayala; Pawan Kumar ;   et al. | 2009-01-29 |
Substrate Support Method App 20080204693 - Nimmakayala; Pawan Kumar ;   et al. | 2008-08-28 |
Interferometric analysis for the manufacture of nano-scale devices Grant 7,292,326 - Nimmakayala , et al. November 6, 2 | 2007-11-06 |
Enhanced Multi Channel Alignment App 20070231421 - Nimmakayala; Pawan Kumar ;   et al. | 2007-10-04 |
Substrate support method Grant 7,259,833 - Nimmakayala , et al. August 21, 2 | 2007-08-21 |
Substrate support system Grant 7,245,358 - Nimmakayala , et al. July 17, 2 | 2007-07-17 |
Interferometric analysis for the manufacture of nano-scale devices App 20060126058 - Nimmakayala; Pawan Kumar ;   et al. | 2006-06-15 |
Interferometric analysis method for the manufacture of nano-scale devices App 20060114450 - Nimmakayala; Pawan Kumar ;   et al. | 2006-06-01 |
System for varying dimensions of a substrate during nanoscale manufacturing App 20060001194 - Cherala; Anshuman ;   et al. | 2006-01-05 |
Apparatus to vary dimensions of a substrate during nano-scale manufacturing App 20060001857 - Cherala; Anshuman ;   et al. | 2006-01-05 |
Method of varying dimensions of a substrate during nano-scale manufacturing App 20050269745 - Cherala, Anshuman ;   et al. | 2005-12-08 |
System for magnification and distortion correction during nano-scale manufacturing App 20050270516 - Cherala, Anshuman ;   et al. | 2005-12-08 |
Substrate support system App 20050263249 - Nimmakayala, Pawan Kumar ;   et al. | 2005-12-01 |
Substrate support method App 20050266587 - Nimmakayala, Pawan Kumar ;   et al. | 2005-12-01 |
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