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Motor with force constant modeling and identification for flexible mode control Grant 11,223,303 - Yang , et al. January 11, 2 | 2022-01-11 |
Power minimizing controller for a stage assembly Grant 11,075,573 - Hemati , et al. July 27, 2 | 2021-07-27 |
Lithographic thermal distortion compensation with the use of machine learning Grant 10,990,024 - Bow , et al. April 27, 2 | 2021-04-27 |
Three axis linear actuator Grant 10,608,519 - Hemati | 2020-03-31 |
Lithographic Thermal Distortion Compensation With The Use Of Machine Learning App 20200096872 - Bow; Travis ;   et al. | 2020-03-26 |
Mirror Assembly With Heat Transfer Mechanism App 20190339479 - Margeson; Christopher ;   et al. | 2019-11-07 |
Actuator assembly including magnetic sensor system for vibrationless position feedback Grant 10,451,982 - Chang , et al. Oc | 2019-10-22 |
Lithographic thermal distortion compensation with the use of machine learning Grant 10,444,643 - Bow , et al. Oc | 2019-10-15 |
Increasing and controlling sensitivity of non-linear metallic thin-film resists Grant 10,416,562 - Palmer Sept | 2019-09-17 |
Mirror assembly with heat transfer mechanism Grant 10,371,920 - Margeson , et al. | 2019-08-06 |
Power Minimizing Controller For A Stage Assembly App 20190020257 - Hemati; Neyram ;   et al. | 2019-01-17 |
Optical system with a frustrated isotropic block Grant 10,162,087 - Goodwin , et al. Dec | 2018-12-25 |
Motor With Force Constant Modeling And Identification For Flexible Mode Control App 20180367067 - Yang; Pai-Hsueh ;   et al. | 2018-12-20 |
Lithographic Thermal Distortion Compensation With The Use Of Machine Learning App 20180275525 - Bow; Travis ;   et al. | 2018-09-27 |
Power minimizing controller for a stage assembly Grant 10,084,364 - Hemati , et al. September 25, 2 | 2018-09-25 |
Optical System With A Frustrated Isotropic Block App 20170292860 - Goodwin; Eric Peter ;   et al. | 2017-10-12 |
Multispectral Eyewear Device App 20170289465 - Slonaker; Steven Douglas | 2017-10-05 |
Three Axis Linear Actuator App 20170207691 - HEMATI; Neyram | 2017-07-20 |
Vacuum chamber assembly for supporting a workpiece Grant 9,341,942 - Hashemi , et al. May 17, 2 | 2016-05-17 |
Methods and devices for hybridization and binding assays using thermophoresis Grant 8,852,858 - Sogard October 7, 2 | 2014-10-07 |
Methods and devices for hybridization and binding assays using thermophoresis App 20080009071 - Sogard; Michael | 2008-01-10 |
Methods and devices for hybridization and binding assays using thermophoresis Grant 7,244,611 - Sogard July 17, 2 | 2007-07-17 |
Offset gap control for electromagnetic devices App 20050162802 - Kho, Leonard Wai Fung ;   et al. | 2005-07-28 |
In-situ pad conditioning apparatus for CMP polisher Grant 6,733,370 - Aiyer May 11, 2 | 2004-05-11 |
Methods and devices for hybridization and binding assays using thermophoresis App 20030077599 - Sogard, Michael | 2003-04-24 |
Polishing pad thinning to optically access a semiconductor wafer surface Grant 6,248,000 - Aiyer June 19, 2 | 2001-06-19 |
H-bridge power amplifier for a motor Grant 6,204,729 - Takita March 20, 2 | 2001-03-20 |