Patent | Date |
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Method of determination of resolution of scanning electron microscope App 20090121131 - Nikitin; Arkady | 2009-05-14 |
Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope Grant 7,427,756 - Nikitin September 23, 2 | 2008-09-23 |
Method of determining micro- and nano- sizes in scanning electron microscope App 20080114561 - Yeremin; Dmitriy ;   et al. | 2008-05-15 |
Method of precision calibration of a microscope and the like Grant 7,209,596 - Nikitin April 24, 2 | 2007-04-24 |
Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope App 20070081727 - Nikitin; Arkady | 2007-04-12 |
Method of measuring an area of micro-objects of arbitrary shape in scanning electron microscope App 20070081742 - Yeremin; Dmitriy ;   et al. | 2007-04-12 |
Device for and a method measuring sizes on photomasks App 20060139456 - Nikitin; Arkady | 2006-06-29 |
Method of calibration of magnification of microscopes having different operational principles for bringing them into a single, absolute scale Grant 7,054,000 - Nikitin , et al. May 30, 2 | 2006-05-30 |
Method of controlling removal of photoresist in openings of a photoresist mask Grant 6,982,138 - Nikitin , et al. January 3, 2 | 2006-01-03 |
Method of determining of true nonlinearity of scan along a selected direction X or Y in scan microscope Grant 6,978,215 - Nikitin December 20, 2 | 2005-12-20 |
Method of evaluating of a scanning electron microscope for precise measurements Grant 6,969,852 - Yeremin , et al. November 29, 2 | 2005-11-29 |
Method of precision calibration of a microscope and the like App 20050220362 - Nikitin, Arkady | 2005-10-06 |
Method Of Evaluating Of A Scanning Electron Microscope For Precise Measurements App 20050205777 - Yeremin, Dmitriy ;   et al. | 2005-09-22 |
Method of measuring a line edge roughness of micro objects in scanning microscopes Grant 6,909,791 - Nikitin , et al. June 21, 2 | 2005-06-21 |
Method of measuring sizes in scan microscopes Grant 6,878,935 - Nikitin April 12, 2 | 2005-04-12 |
Method of controlling removal of photoresist in openings of a photoresist mask App 20050032004 - Nikitin, Arkady ;   et al. | 2005-02-10 |
Method of calibration of magnification of microscopes having different operational principles for bringing them to a single, absolute scale App 20050030530 - Nikitin, Arkady ;   et al. | 2005-02-10 |
Method of measuring sizes in scan microscopes App 20040021075 - Nikitin, Arkady | 2004-02-05 |
Method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating Grant 6,686,587 - Nikitin , et al. February 3, 2 | 2004-02-03 |
Method of measuring an angle of inclination of trapezoidal micro object side faces Grant 6,668,099 - Nikitin December 23, 2 | 2003-12-23 |
Method of precision calibration of magnification of scanning microscopes with the use of test diffraction grating Grant 6,664,532 - Yeremin , et al. December 16, 2 | 2003-12-16 |
Method of measuring a line edge roughness of micro objects in scanning microscopes App 20030190069 - Nikitin, Arkady ;   et al. | 2003-10-09 |
Simple method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating Grant 6,608,294 - Nikitin , et al. August 19, 2 | 2003-08-19 |
Method of precision calibration of magnification of a scanning microscope with the use of test diffraction grating Grant 6,573,500 - Yeremin , et al. June 3, 2 | 2003-06-03 |
Simple method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating App 20030071191 - Nikitin, Arkady ;   et al. | 2003-04-17 |
Method of determination of true nonlinearity of scan along a selected direction X or Y in scan microscope App 20030055588 - Nikitin, Arkady | 2003-03-20 |
Method of precision calibration of magnification of scanning microscopes with the use of test diffraction gratiing App 20030034437 - Yeremin, Dmitriy ;   et al. | 2003-02-20 |
Method of precision calibration of magnification of a scanning microscope with the use of test diffraction grating App 20030029997 - Yeremin, Dmitriy ;   et al. | 2003-02-13 |
Method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating App 20020179829 - Nikitin, Arkady ;   et al. | 2002-12-05 |