Niino; Reiji
Patent Applications and Registrations
Patent applications and USPTO patent grants for Niino; Reiji.The latest application filed is for "method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus".
- Niino; Reiji - Nirasaki JP
- Niino; Reiji - Yamanashi JP
- NIINO; Reiji - Nirasaki City JP
- Niino; Reiji - Wappingers Falls NY
- Niino; Reiji - Kofu JP
| Patent | Date |
|---|---|
| Film-forming apparatus and film-forming method Grant 11,136,668 - Yamaguchi , et al. October 5, 2 | 2021-10-05 |
| Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus Grant 11,056,349 - Yatsuda , et al. July 6, 2 | 2021-07-06 |
| Film forming apparatus, film forming method, and storage medium Grant 10,960,435 - Fujikawa , et al. March 30, 2 | 2021-03-30 |
| Method of manufacturing semiconductor device Grant 10,790,135 - Yamaguchi , et al. September 29, 2 | 2020-09-29 |
| Method of manufacturing semiconductor device Grant 10,755,971 - Yamaguchi , et al. A | 2020-08-25 |
| Method of manufacturing semiconductor device Grant 10,748,782 - Yamaguchi , et al. A | 2020-08-18 |
| Method of Fabricating Semiconductor Device, Vacuum Processing Apparatus and Substrate Processing Apparatus App 20200152475 - YATSUDA; Koichi ; et al. | 2020-05-14 |
| Method of manufacturing semiconductor device and vacuum processing apparatus Grant 10,629,448 - Yamaguchi , et al. | 2020-04-21 |
| Method of fabricating semiconductor device, vacuum processing apparatus and substrate processing apparatus Grant 10,593,556 - Yatsuda , et al. | 2020-03-17 |
| Method of Manufacturing Semiconductor Device App 20190393083 - YAMAGUCHI; Tatsuya ; et al. | 2019-12-26 |
| Semiconductor device manufacturing method, substrate processing apparatus and vacuum processing apparatus Grant 10,490,405 - Yamaguchi , et al. Nov | 2019-11-26 |
| Film-forming Apparatus And Film-forming Method App 20190323124 - YAMAGUCHI; Tatsuya ; et al. | 2019-10-24 |
| Method of manufacturing semiconductor device Grant 10,446,438 - Yamaguchi , et al. Oc | 2019-10-15 |
| Method of Manufacturing Semiconductor Device App 20190122894 - YAMAGUCHI; Tatsuya ; et al. | 2019-04-25 |
| Method Of Manufacturing Semiconductor Device App 20190122883 - YAMAGUCHI; Tatsuya ; et al. | 2019-04-25 |
| Method of Manufacturing Semiconductor Device App 20180286744 - YAMAGUCHI; Tatsuya ; et al. | 2018-10-04 |
| Method of Manufacturing Semiconductor Device and Vacuum Processing Apparatus App 20180269069 - YAMAGUCHI; Tatsuya ; et al. | 2018-09-20 |
| Film Forming Apparatus, Film Forming Method, And Storage Medium App 20180264516 - FUJIKAWA; Makoto ; et al. | 2018-09-20 |
| Semiconductor Device Manufacturing Method, Substrate Processing Apparatus And Vacuum Processing Apparatus App 20180261458 - YAMAGUCHI; Tatsuya ; et al. | 2018-09-13 |
| Method Of Fabricating Semiconductor Device, Vacuum Processing Apparatus And Substrate Processing Apparatus App 20180025917 - YATSUDA; Koichi ; et al. | 2018-01-25 |
| Film forming method Grant 9,162,252 - Yamaguchi , et al. October 20, 2 | 2015-10-20 |
| Film forming method Grant 8,778,815 - Yamaguchi , et al. July 15, 2 | 2014-07-15 |
| Film Forming Method App 20130316080 - YAMAGUCHI; Tatsuya ; et al. | 2013-11-28 |
| Film Forming Method App 20130316545 - YAMAGUCHI; Tatsuya ; et al. | 2013-11-28 |
| Micro pattern forming method Grant 8,383,522 - Nakajima , et al. February 26, 2 | 2013-02-26 |
| Patterning method Grant 8,168,375 - Nakajima , et al. May 1, 2 | 2012-05-01 |
| Micro Pattern Forming Method App 20110237082 - Nakajima; Shigeru ; et al. | 2011-09-29 |
| Patterning method Grant 7,989,354 - Nakajima , et al. August 2, 2 | 2011-08-02 |
| Patterning method utilizing SiBN and photolithography Grant 7,754,622 - Chou , et al. July 13, 2 | 2010-07-13 |
| Patterning Method App 20100130015 - Nakajima; Shigeru ; et al. | 2010-05-27 |
| Patterning Method App 20100112796 - Chou; Pao-Hwa ; et al. | 2010-05-06 |
| Patterning Method App 20100112496 - Nakajima; Shigeru ; et al. | 2010-05-06 |
| Method Of Double Patterning Using Sacrificial Structure App 20090311634 - Yue; Hongyu ; et al. | 2009-12-17 |
| Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus Grant 5,637,153 - Niino , et al. June 10, 1 | 1997-06-10 |
| Method of cleaning reaction tube Grant 5,380,370 - Niino , et al. * January 10, 1 | 1995-01-10 |
| Vertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatus Grant 5,316,472 - Niino , et al. May 31, 1 | 1994-05-31 |
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