NIIMI; Gota

Patent Applications and Registrations

Patent applications and USPTO patent grants for NIIMI; Gota.The latest application filed is for "tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method".

Company Profile

1.8.10

NIIMI; Gota - Oyama-shi JP
Niimi; Gota - Oyama JP
Niimi; Gota - Tokyo JP
Niimi; Gota - Shizuoka JP
Niimi; Gota - Shizuoka-ken JP
Niimi; Gota - Aachen DE
Niimi; Gota - Shimizu JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Tin Trap Device, Extreme Ultraviolet Light Generation Apparatus, And Electronic Device Manufacturing Method App 20210364928 - NIIMI; Gota ; et al.	2021-11-25
Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device Grant 11,145,429 - Ueda , et al. October 12, 2	2021-10-12
Extreme Ultraviolet Chamber Apparatus, Extreme Ultraviolet Light Generation System, And Method For Manufacturing Electronic Device App 20200312479 - UEDA; Atsushi ; et al.	2020-10-01
Liquid level detection device, method of detecting liquid level, high temperature plasma raw material supply device and extreme ultra violet light source device Grant 10,591,342 - Nagano , et al.	2020-03-17
Liquid Level Detection Device, Method Of Detecting Liquid Level, High Temperature Plasma Raw Material Supply Device And Extreme Ultra Violet Light Source Device App 20170350745 - NAGANO; Akihisa ; et al.	2017-12-07
Extreme UV radiation light source device Grant 9,686,846 - Teramoto , et al. June 20, 2	2017-06-20
Arrangement for cooling a plasma-based radiation source with a metal cooling liquid and method for starting up a cooling arrangement of this type Grant 9,581,392 - Niimi , et al. February 28, 2	2017-02-28
Light source apparatus Grant 9,572,240 - Niimi , et al. February 14, 2	2017-02-14
Extreme Uv Radiation Light Source Device App 20160345419 - TERAMOTO; Yusuke ; et al.	2016-11-24
Light Source Apparatus App 20160330826 - NIIMI; Gota ; et al.	2016-11-10
Extreme UV radiation light source device Grant 9,480,136 - Teramoto , et al. October 25, 2	2016-10-25
Extreme Uv Radiation Light Source Device App 20160073486 - TERAMOTO; Yusuke ; et al.	2016-03-10
Arrangement and method for cooling a plasma-based radiation source Grant 9,202,659 - Niimi , et al. December 1, 2	2015-12-01
Arrangement for Cooling a Plasma-Based Radiation Source with a Metal Cooling Liquid and Method for Starting Up a Cooling Arrangement of This Type App 20150247679 - NIIMI; Gota ; et al.	2015-09-03
Arrangement And Method For Cooling A Plasma-based Radiation Source App 20150108365 - NIIMI; Gota ; et al.	2015-04-23
Arrangement for the Handling of a Liquid Metal for Cooling Revolving Components of a Radiation Source Based on a Radiation-Emitting Plasma App 20140307857 - Niimi; Gota ; et al.	2014-10-16
Electrode unit of extreme ultraviolet generator Grant 7,482,740 - Niimi January 27, 2	2009-01-27
Electrode unit of extreme ultraviolet generator App 20060261721 - Niimi; Gota	2006-11-23

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