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Actinic ray-sensitive or radiation-sensitive composition, method for purifying actinic ray-sensitive or radiation-sensitive composition, pattern forming method, and method for manufacturing electronic device
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Pattern Forming Method And Resist Laminate For Organic Solvent Development
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Treatment Liquid And Pattern Forming Method
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Treatment liquid and pattern forming method
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Treatment liquid and pattern forming method
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Negative Tone Photosensitive Composition For Euv Light, Pattern Forming Method, And Method For Manufacturing Electronic Device
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Pattern forming method, resist pattern, method for manufacturing electronic device, and electronic device
Grant 10,890,847 - Tsuchihashi , et al. January 12, 2 | 2021-01-12 |
Pattern forming method and electronic device manufacturing method
Grant 10,788,754 - Nihashi , et al. September 29, 2 | 2020-09-29 |
Pattern forming method, method for manufacturing electronic device, and laminate
Grant 10,761,426 - Tsubaki , et al. Sep | 2020-09-01 |
Pattern forming method, method for manufacturing electronic device, and laminate
Grant 10,663,864 - Nihashi , et al. | 2020-05-26 |
Rinsing liquid, pattern forming method, and electronic device manufacturing method
Grant 10,599,038 - Tsubaki , et al. | 2020-03-24 |
Developer, pattern forming method, and electronic device manufacturing method
Grant 10,562,991 - Tsubaki , et al. Feb | 2020-02-18 |
Pattern formation method, active light-sensitive or radiation-sensitive resin composition, resist film, production method for electronic device using same, and electronic device
Grant 10,444,627 - Takizawa , et al. Oc | 2019-10-15 |
Method For Producing Resin And Method For Producing Actinic Ray-sensitive Or Radiation-sensitive Composition
App 20190276575 - KANEKO; Akihiro ; et al. | 2019-09-12 |
Pattern forming method and method for manufacturing electronic device
Grant 10,394,127 - Nihashi , et al. A | 2019-08-27 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method Of Manufacturing Electronic D
App 20190219921 - TSUBAKI; Hideaki ; et al. | 2019-07-18 |
Resist Composition, Pattern Forming Method, And Method Of Manufacturing Electronic Device
App 20190219922 - KANEKO; Akihiro ; et al. | 2019-07-18 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method Of Manufacturing Electronic D
App 20190187558 - NIHASHI; Wataru ; et al. | 2019-06-20 |
Actinic Ray-sensitive Or Radiation-sensitive Composition, Method For Purifying Actinic Ray-sensitive Or Radiation-sensitive Composition, Method For Producing Actinic Ray-sensitive Or Radiation-sensitive Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20190018317 - TSUBAKI; Hideaki ; et al. | 2019-01-17 |
Actinic Ray-sensitive Or Radiation-sensitive Composition, Method For Producing Actinic Ray-sensitive Or Radiation-sensitive Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20180364569 - NIHASHI; Wataru ; et al. | 2018-12-20 |
Actinic Ray-sensitive Or Radiation-sensitive Composition, Method For Purifying Actinic Ray-sensitive Or Radiation-sensitive Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20180364568 - TSUBAKI; Hideaki ; et al. | 2018-12-20 |
Pattern Forming Method And Method For Manufacturing Electronic Device
App 20180321589 - TSUCHIMURA; Tomotaka ; et al. | 2018-11-08 |
Pattern forming method, method for manufacturing electronic device, and electronic device
Grant 10,095,111 - Nihashi October 9, 2 | 2018-10-09 |
Pattern Forming Method And Method For Manufacturing Electronic Device
App 20180267404 - KANEKO; Akihiro ; et al. | 2018-09-20 |
Treatment Liquid And Pattern Forming Method
App 20180217503 - TSUBAKI; Hideaki ; et al. | 2018-08-02 |
Treatment Liquid And Pattern Forming Method
App 20180217499 - HIRANO; Shuji ; et al. | 2018-08-02 |
Developer, Pattern Forming Method, And Electronic Device Manufacturing Method
App 20180186907 - TSUBAKI; Hideaki ; et al. | 2018-07-05 |
Pattern Forming Method, Method For Manufacturing Electronic Device, And Laminate
App 20180181003 - NIHASHI; Wataru ; et al. | 2018-06-28 |
Pattern Forming Method, Method For Manufacturing Electronic Device, And Laminate
App 20180180996 - Tsubaki; Hideaki ; et al. | 2018-06-28 |
Rinsing Liquid, Pattern Forming Method, And Electronic Device Manufacturing Method
App 20180120708 - TSUBAKI; Hideaki ; et al. | 2018-05-03 |
Pattern Forming Method And Electronic Device Manufacturing Method
App 20180120705 - NIHASHI; Wataru ; et al. | 2018-05-03 |
Treatment Liquid And Pattern Forming Method
App 20180101100 - TSUBAKI; Hideaki ; et al. | 2018-04-12 |
Pattern Forming Method And Method For Manufacturing Electronic Device
App 20180017872 - NIHASHI; Wataru ; et al. | 2018-01-18 |
Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20170153545 - NIHASHI; Wataru | 2017-06-01 |
Pattern forming method, active light sensitive or radiation sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device
Grant 9,651,863 - Takizawa , et al. May 16, 2 | 2017-05-16 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Electronic Device
App 20170075222 - TSUCHIHASHI; Toru ; et al. | 2017-03-16 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, using the same, pattern forming method, manufacturing method of electronic device, and electronic device
Grant 9,551,933 - Takizawa , et al. January 24, 2 | 2017-01-24 |
Compound, actinic ray-sensitive or radiation-sensitive resin composition, resist film, and pattern formation method, and method for manufacturing electronic device using same, and electronic device
Grant 9,527,809 - Yokokawa , et al. December 27, 2 | 2016-12-27 |
Pattern forming method, electron beam-sensitive or extreme ultraviolet ray-sensitive resin composition, resist film, and method for manufacturing electronic device, and electronic device using the same
Grant 9,423,690 - Takizawa , et al. August 23, 2 | 2016-08-23 |
Pattern Formation Method, Active Light-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Production Method For Electronic Device Using Same, And Electronic Device
App 20160147154 - TAKIZAWA; Hiroo ; et al. | 2016-05-26 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, electronic device and resin
Grant 9,291,898 - Yokokawa , et al. March 22, 2 | 2016-03-22 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same, and electronic device
Grant 9,291,897 - Hirano , et al. March 22, 2 | 2016-03-22 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device, and electronic device
Grant 9,291,896 - Hirano , et al. March 22, 2 | 2016-03-22 |
Pattern Forming Method, Active Light Sensitive Or Radiation Sensitive Resin Composition, Resist Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20160041465 - TAKIZAWA; Hiroo ; et al. | 2016-02-11 |
Compound, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, And Pattern Formation Method, And Method For Manufacturing Electronic Device Using Same, And Electronic Device
App 20160024005 - YOKOKAWA; NATSUMI ; et al. | 2016-01-28 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Manufacturing Method Of Electronic Device Using The Same, And Electronic Device
App 20150185610 - HIRANO; Shuji ; et al. | 2015-07-02 |
Pattern Forming Method, Electron Beam-sensitive Or Extreme Ultraviolet Ray-sensitive Resin Composition, Resist Film, And Method For Manufacturing Electronic Device, And Electronic Device Using The Same
App 20150168834 - TAKIZAWA; Hiroo ; et al. | 2015-06-18 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Manufacturing Method Of Electronic Device Using The Same, And Electronic Device
App 20150147688 - YOKOKAWA; Natsumi ; et al. | 2015-05-28 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Using The Same, Pattern Forming Method, Manufacturing Method Of Electronic Device, And Electronic Device
App 20150140484 - TAKIZAWA; Hiroo ; et al. | 2015-05-21 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film Using The Same, Pattern Forming Method, Manufacturing Method Of Electronic Device, Electronic Device And Resin
App 20150132688 - YOKOKAWA; Natsumi ; et al. | 2015-05-14 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film Using The Same, Pattern Forming Method, Manufacturing Method Of Electronic Device, And Electronic Device
App 20150132687 - HIRANO; Shuji ; et al. | 2015-05-14 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Manufacturing Method Of Electronic Device Using The Same And Electronic Device
App 20140363758 - NIHASHI; Wataru ; et al. | 2014-12-11 |
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