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Patent applications and USPTO patent grants for Ni; Tom.The latest application filed is for "plasma confinement apparatus, and method for confining a plasma".
Patent | Date |
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Plasma Confinement Apparatus, And Method For Confining A Plasma App 20140103805 - Ni; Tom ;   et al. | 2014-04-17 |
Plasma confinement apparatus, and method for confining a plasma Grant 8,608,851 - Ni , et al. December 17, 2 | 2013-12-17 |
Method and apparatus for detecting planarization of metal films prior to clearing Grant 7,690,966 - Gopalan , et al. April 6, 2 | 2010-04-06 |
Method and apparatus for detecting planarization of metal films prior to clearing Grant 7,413,988 - Gopalan , et al. August 19, 2 | 2008-08-19 |
Plasma confinement apparatus, and method for confining a plasma App 20070085483 - Ni; Tom ;   et al. | 2007-04-19 |
Method and apparatus for improving etch and deposition uniformity in plasma semiconductor processing Grant 6,042,687 - Singh , et al. March 28, 2 | 2000-03-28 |
Gas injection system for plasma processing Grant 6,013,155 - McMillin , et al. January 11, 2 | 2000-01-11 |
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