Ngan; Kenny K.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ngan; Kenny K..The latest application filed is for "method and apparatus for balancing an electrostatic force produced by an electrostatic chuck".

Company Profile

0.7.1

Ngan; Kenny K. - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck Grant 6,625,003 - Loo , et al. September 23, 2	2003-09-23
Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck App 20030053283 - Loo, David ; et al.	2003-03-20
Method of reducing generation of particulate matter in a sputtering chamber Grant 5,961,793 - Ngan October 5, 1	1999-10-05
Barrier layers and aluminum contacts Grant 5,504,043 - Ngan , et al. April 2, 1	1996-04-02
Method for the formation of tin barrier layer with preferential (111) crystallographic orientation Grant 5,434,044 - Nulman , et al. * July 18, 1	1995-07-18
Barrier layers and aluminum contacts Grant 5,378,660 - Ngan , et al. January 3, 1	1995-01-03
Titanium nitride/titanium silicide multiple layer barrier with preferential (111) crystallographic orientation on titanium nitride surface Grant 5,360,996 - Nulman , et al. November 1, 1	1994-11-01
Method for the formation of tin barrier layer with preferential (111) crystallographic orientation Grant 5,242,860 - Nulman , et al. September 7, 1	1993-09-07

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