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Patent applications and USPTO patent grants for Ng; Joel.The latest application filed is for "advanced optical sensor and method for plasma chamber".
Patent | Date |
---|---|
Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamber Grant 10,692,705 - Mihaylov , et al. | 2020-06-23 |
Advanced Optical Sensor And Method For Plasma Chamber App 20170140905 - Mihaylov; Mihail ;   et al. | 2017-05-18 |
Beam splitter/combiner for optical metrology tool Grant 7,251,036 - Hendrix , et al. July 31, 2 | 2007-07-31 |
Flat spectrum illumination source for optical metrology Grant 7,154,607 - Hendrix , et al. December 26, 2 | 2006-12-26 |
Beam splitter/combiner for optical metrology tool App 20060126071 - Hendrix; James ;   et al. | 2006-06-15 |
Beam splitter/combiner for optical meterology tool Grant 7,027,158 - Hendrix , et al. April 11, 2 | 2006-04-11 |
Flat spectrum illumination source for optical metrology App 20040150828 - Hendrix, James Lee ;   et al. | 2004-08-05 |
Beam splitter/combiner for optical meterology tool App 20030169425 - Hendrix, James ;   et al. | 2003-09-11 |
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