Patent | Date |
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Low density polishing pad Grant 10,946,495 - Huang , et al. March 16, 2 | 2021-03-16 |
Polishing pad having polishing surface with continuous protrusions Grant 10,293,459 - Lefevre , et al. | 2019-05-21 |
Customized polishing pads for CMP and methods of fabrication and use thereof Grant 10,220,487 - Roy , et al. | 2019-03-05 |
Polishing pad having polishing surface with continuous protrusions having tapered sidewalls Grant 10,160,092 - Lefevre , et al. Dec | 2018-12-25 |
Polishing pad with foundation layer and polishing surface layer Grant 9,931,728 - Allison , et al. April 3, 2 | 2018-04-03 |
Polishing pad with grooved foundation layer and polishing surface layer Grant 9,931,729 - Lefevre , et al. April 3, 2 | 2018-04-03 |
Polishing Pad Having Polishing Surface With Continuous Protrusions App 20170203409 - LEFEVRE; Paul Andre ;   et al. | 2017-07-20 |
Polishing pad having polishing surface with continuous protrusions Grant 9,649,742 - Lefevre , et al. May 16, 2 | 2017-05-16 |
Homogeneous polishing pad for eddy current end-point detection Grant 9,597,777 - Allison , et al. March 21, 2 | 2017-03-21 |
Method of fabricating a polishing Grant 9,597,770 - Allison , et al. March 21, 2 | 2017-03-21 |
Polishing pad with multi-modal distribution of pore diameters Grant 9,555,518 - Huang , et al. January 31, 2 | 2017-01-31 |
Customized Polishing Pads For Cmp And Methods Of Fabrication And Use Thereof App 20160229025 - ROY; Pradip K. ;   et al. | 2016-08-11 |
Grooved CMP pads Grant 9,375,823 - Kerprich , et al. June 28, 2 | 2016-06-28 |
Polishing pad with homogeneous body having discrete protrusions thereon Grant 9,296,085 - Bajaj , et al. March 29, 2 | 2016-03-29 |
Customized polishing pads for CMP and methods of fabrication and use thereof Grant 9,278,424 - Roy , et al. March 8, 2 | 2016-03-08 |
Polishing systems Grant 9,272,388 - Misra March 1, 2 | 2016-03-01 |
Polishing pad with alignment feature Grant 9,249,273 - Kerprich , et al. February 2, 2 | 2016-02-02 |
Polishing pad having porogens with liquid filler Grant 9,238,294 - Lefevre , et al. January 19, 2 | 2016-01-19 |
Polishing pad with concentric or approximately concentric polygon groove pattern Grant 9,211,628 - Allison , et al. December 15, 2 | 2015-12-15 |
Grooved CMP pad Grant 9,180,570 - Kerprich , et al. November 10, 2 | 2015-11-10 |
Soft polishing pad for polishing a semiconductor substrate Grant 9,156,124 - Allison , et al. October 13, 2 | 2015-10-13 |
Polishing pad with foundation layer and polishing surface layer Grant 9,067,297 - Allison , et al. June 30, 2 | 2015-06-30 |
Polishing pad with grooved foundation layer and polishing surface layer Grant 9,067,298 - Lefevre , et al. June 30, 2 | 2015-06-30 |
Polishing pad for eddy current end-point detection Grant 9,028,302 - Allison , et al. May 12, 2 | 2015-05-12 |
CMP pad with local area transparency Grant 9,017,140 - Allison , et al. April 28, 2 | 2015-04-28 |
Polishing pad with alignment feature Grant 8,968,058 - Kerprich , et al. March 3, 2 | 2015-03-03 |
Low Density Polishing Pad App 20150038066 - Huang; Ping ;   et al. | 2015-02-05 |
Methods for producing in-situ grooves in chemical mechanical planarization (CMP) pads, and novel CMP pad designs Grant 8,932,116 - Deopura , et al. January 13, 2 | 2015-01-13 |
Polishing pad with alignment aperture Grant 08920219 - | 2014-12-30 |
Polishing pad with alignment aperture Grant 8,920,219 - Allison , et al. December 30, 2 | 2014-12-30 |
Customized polishing pads for CMP and methods of fabrication and use thereof Grant 8,864,859 - Roy , et al. October 21, 2 | 2014-10-21 |
Polishing Pad Having Polishing Surface With Continuous Protrusions Having Tapered Sidewalls App 20140273777 - Lefevre; Paul Andre ;   et al. | 2014-09-18 |
Polishing Pad Having Polishing Surface With Continuous Protrusions App 20140206268 - Lefevre; Paul Andre ;   et al. | 2014-07-24 |
Homogeneous Polishing Pad For Eddy Current End-point Detection App 20140123563 - Allison; William C. ;   et al. | 2014-05-08 |
Customized polishing pads for CMP and methods of fabrication and use thereof Grant 8,715,035 - Roy , et al. May 6, 2 | 2014-05-06 |
Polishing pad with multi-modal distribution of pore diameters Grant 8,702,479 - Huang , et al. April 22, 2 | 2014-04-22 |
Homogeneous polishing pad for eddy current end-point detection Grant 8,657,653 - Allison , et al. February 25, 2 | 2014-02-25 |
Polishing pad for eddy current end-point detection Grant 8,628,384 - Allison , et al. January 14, 2 | 2014-01-14 |
Method of fabricating a polishing pad with an end-point detection region for eddy current end-point detection Grant 8,439,994 - Allison , et al. May 14, 2 | 2013-05-14 |
Polishing systems Grant 8,383,003 - Misra February 26, 2 | 2013-02-26 |
Customized polish pads for chemical mechanical planarization Grant 8,380,339 - Misra , et al. February 19, 2 | 2013-02-19 |
Methods for producing in-situ grooves in chemical mechanical planarization (CMP) pads, and novel CMP pad designs Grant 8,287,793 - Deopura , et al. October 16, 2 | 2012-10-16 |
CMP pad with local area transparency App 20110171883 - Allison; William ;   et al. | 2011-07-14 |
Customized polish pads for chemical mechanical planarization Grant 7,704,122 - Misra , et al. April 27, 2 | 2010-04-27 |
Customized polishing pads for CMP and methods of fabrication and use thereof Grant 7,704,125 - Roy , et al. April 27, 2 | 2010-04-27 |
Polishing systems App 20090318063 - Misra; Sudhanshu | 2009-12-24 |
Grooved CMP pad App 20090311955 - Kerprich; Robert ;   et al. | 2009-12-17 |
Customized polish pads for chemical mechanical planarization Grant 7,425,172 - Misra , et al. September 16, 2 | 2008-09-16 |