Nevil; Shane C

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nevil; Shane C.The latest application filed is for "feedforward temperature control for plasma processing apparatus".

Company Profile

1.13.11

Nevil; Shane C - Livermore CA
Nevil; Shane C. - Livermore CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Feedforward temperature control for plasma processing apparatus Grant 10,854,425 - Mahadeswaraswamy , et al. December 1, 2	2020-12-01
Temperature management of aluminium nitride electrostatic chuck Grant 9,358,702 - Banda , et al. June 7, 2	2016-06-07
Feedforward Temperature Control For Plasma Processing Apparatus App 20160155612 - MAHADESWARASWAMY; Chetan ; et al.	2016-06-02
Feedforward temperature control for plasma processing apparatus Grant 9,338,871 - Mahadeswaraswamy , et al. May 10, 2	2016-05-10
Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity Grant 9,248,509 - Tavassoli , et al. February 2, 2	2016-02-02
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow Grant 9,214,315 - Silveira , et al. December 15, 2	2015-12-15
Temperature Control In Plasma Processing Apparatus Using Pulsed Heat Transfer Fluid Flow App 20150316941 - SILVEIRA; Fernando M. ; et al.	2015-11-05
Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow Grant 8,916,793 - Silveira , et al. December 23, 2	2014-12-23
Multi-zoned Plasma Processing Electrostatic Chuck With Improved Temperature Uniformity App 20140346743 - Tavassoli; Hamid ; et al.	2014-11-27
Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity Grant 8,822,876 - Tavassoli , et al. September 2, 2	2014-09-02
Temperature Management Of Aluminium Nitride Electrostatic Chuck App 20140203526 - Banda; Sumanth ; et al.	2014-07-24
Assembly for delivering RF power and DC voltage to a plasma processing chamber Grant 8,629,370 - Tavassoli , et al. January 14, 2	2014-01-14
Two-phase Operation Of Plasma Chamber By Phase Locked Loop App 20130284369 - Kobayashi; Satoru ; et al.	2013-10-31
Plasma Processing Using Rf Return Path Variable Impedance Controller With Two-dimensional Tuning Space App 20130277333 - Misra; Nipun ; et al.	2013-10-24
Temperature Control In Plasma Processing Apparatus Using Pulsed Heat Transfer Fluid Flow App 20120132397 - Silveira; Fernando M. ; et al.	2012-05-31
Multi-zoned Plasma Processing Electrostatic Chuck With Improved Temperature Uniformity App 20120091104 - Tavassoli; Hamid ; et al.	2012-04-19
Assembly For Delivering Rf Power And Dc Voltage To A Plasma Processing Chamber App 20110297650 - Tavassoli; Hamid ; et al.	2011-12-08
Feedforward Temperature Control For Plasma Processing Apparatus App 20110186545 - MAHADESWARASWAMY; Chetan ; et al.	2011-08-04

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