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Patent applications and USPTO patent grants for Neumann; Martin John.The latest application filed is for "lithium sputter targets".
Patent | Date |
---|---|
Sustained self-sputtering of lithium for lithium physical vapor deposition Grant 10,443,121 - Neumann Oc | 2019-10-15 |
Lithium Sputter Targets App 20190032195 - Mehtani; Disha ;   et al. | 2019-01-31 |
Lithium sputter targets Grant 10,125,419 - Neumann , et al. November 13, 2 | 2018-11-13 |
Lithium Sputter Targets App 20170327940 - Neumann; Martin John ;   et al. | 2017-11-16 |
Lithium sputter targets Grant 9,771,646 - Neumann , et al. September 26, 2 | 2017-09-26 |
Sustained Self-sputtering Of Lithium For Lithium Physical Vapor Deposition App 20160076139 - Neumann; Martin John | 2016-03-17 |
Lithium Sputter Targets App 20140138242 - Neumann; Martin John ;   et al. | 2014-05-22 |
System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing Method App 20100151394 - Scaccabarozzi; Luigi ;   et al. | 2010-06-17 |
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