| Patent | Date |
|---|
Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor
Grant 11,421,991 - Lassl , et al. August 23, 2 | 2022-08-23 |
MEMS device including spurious mode suppression and corresponding operating method
Grant 11,365,969 - Lassl , et al. June 21, 2 | 2022-06-21 |
Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units
Grant 11,226,202 - Pruetz , et al. January 18, 2 | 2022-01-18 |
One-axis and two-axis rotation rate sensor
Grant 11,099,013 - Degenfeld-Schonburg , et al. August 24, 2 | 2021-08-24 |
Yaw-rate Sensor With A Substrate Having A Main Extension Plane, Method For Manufacturing A Yaw-rate Sensor
App 20210172737 - Lassl; Andreas ; et al. | 2021-06-10 |
Micromechanical rotational rate sensor system and corresponding production method
Grant 10,900,785 - Bode , et al. January 26, 2 | 2021-01-26 |
Rotation-rate Sensor, Method For Producing A Rotation-rate Sensor
App 20200378761 - Liewald; Jan-Timo ; et al. | 2020-12-03 |
One-axis And Two-axis Rotation Rate Sensor
App 20200370888 - Degenfeld-Schonburg; Peter ; et al. | 2020-11-26 |
Three-axis Micromechanical Rotation Rate Sensor System Including Linearly And Rotatorily Drivable Sensor Units
App 20200355500 - Pruetz; Odd-Axel ; et al. | 2020-11-12 |
Mems Device Including Spurious Mode Suppression And Corresponding Operating Method
App 20200284583 - Lassl; Andreas ; et al. | 2020-09-10 |
Micromechanical yaw rate sensor and method for the production thereof
Grant 10,753,743 - Neul , et al. A | 2020-08-25 |
Micromechanical yaw rate sensor and method for operating same
Grant 10,753,742 - Neul , et al. A | 2020-08-25 |
Micromechanical Rotational Rate Sensor System And Corresponding Production Method
App 20190078887 - Bode; Niels ; et al. | 2019-03-14 |
Micromechanical Yaw Rate Sensor and Method for Operating Same
App 20190056226 - Neul; Reinhard ; et al. | 2019-02-21 |
Micromechanical Yaw Rate Sensor and Method for the Production Thereof
App 20180321039 - Neul; Reinhard ; et al. | 2018-11-08 |
Vibration-resistant rotation rate sensor
Grant 9,863,770 - Neul January 9, 2 | 2018-01-09 |
Yaw-rate sensor
Grant 9,689,676 - Neul , et al. June 27, 2 | 2017-06-27 |
Interposer For Mounting A Vertically Integrated Hybrid Component On A Component Carrier
App 20170081177 - Neul; Reinhard ; et al. | 2017-03-23 |
Yaw-rate sensor
Grant 9,593,949 - Neul , et al. March 14, 2 | 2017-03-14 |
Yaw-rate sensor
Grant 9,593,948 - Neul , et al. March 14, 2 | 2017-03-14 |
Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component
Grant 9,428,378 - Heuck , et al. August 30, 2 | 2016-08-30 |
Micromechanical spring for an inertial sensor
App 20160138666 - HOEPPNER; Christian ; et al. | 2016-05-19 |
Yaw-rate Sensor
App 20160109236 - Neul; Reinhard ; et al. | 2016-04-21 |
Sensor Element and Method for Capturing a First and a Second Component of a Physical Variable
App 20160102980 - Neul; Reinhard | 2016-04-14 |
Yaw rate sensor
Grant 9,261,363 - Neul , et al. February 16, 2 | 2016-02-16 |
Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure
App 20150353345 - HEUCK; Friedjof ; et al. | 2015-12-10 |
Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component
App 20150353346 - HEUCK; Friedjof ; et al. | 2015-12-10 |
Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration
Grant 9,164,123 - Neul , et al. October 20, 2 | 2015-10-20 |
Yaw-rate Sensor
App 20150276408 - Neul; Reinhard ; et al. | 2015-10-01 |
Piezoresistive micromechanical sensor component and corresponding measuring method
Grant 9,110,090 - Neul , et al. August 18, 2 | 2015-08-18 |
Yaw-rate sensor
Grant 9,081,027 - Neul , et al. July 14, 2 | 2015-07-14 |
Vibration-resistant Rotation Rate Sensor
App 20150128700 - NEUL; Reinhard | 2015-05-14 |
Micromechanical system
Grant 9,003,881 - Neul , et al. April 14, 2 | 2015-04-14 |
Micromechanical angular acceleration sensor and method for measuring an angular acceleration
Grant 8,950,258 - Neul , et al. February 10, 2 | 2015-02-10 |
Yaw-rate Sensor
App 20140326070 - Neul; Reinhard ; et al. | 2014-11-06 |
Piezoresistive Micromechanical Sensor Component and Corresponding Measuring Method
App 20130098154 - Neul; Reinhard ; et al. | 2013-04-25 |
Rotation rate sensor having a quadrature compensation pattern
Grant 8,375,786 - Neul February 19, 2 | 2013-02-19 |
Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration
App 20120297878 - Neul; Reinhard ; et al. | 2012-11-29 |
Micromechanical Rotary Acceleration Sensor and Method for Detecting a Rotary Acceleration
App 20120272735 - Neul; Reinhard ; et al. | 2012-11-01 |
Yaw-rate Sensor
App 20120060604 - Neul; Reinhard ; et al. | 2012-03-15 |
Micromechanical System
App 20120031183 - NEUL; Reinhard ; et al. | 2012-02-09 |
Rotation-Rate Sensor Having A Quadrature Compensation Pattern
App 20110126621 - Neul; Reinhard | 2011-06-02 |
Rotation-rate Sensor Having Two Sensitive Axes
App 20110088469 - Neul; Reinhard ; et al. | 2011-04-21 |
Delta sigma modulator
Grant 7,825,840 - Willig , et al. November 2, 2 | 2010-11-02 |
Damping Device
App 20100251819 - NEUL; Reinhard | 2010-10-07 |
Evaluation Electronics System For A Rotation-rate Sensor
App 20100122577 - NEUL; Reinhard ; et al. | 2010-05-20 |
Method and device for connecting sensors or actuators to a bus system
Grant 7,721,030 - Fuehrer , et al. May 18, 2 | 2010-05-18 |
Yaw Rate Sensor
App 20100000321 - Neul; Reinhard ; et al. | 2010-01-07 |
Micromechanical motion sensor
Grant 7,591,179 - Krieg , et al. September 22, 2 | 2009-09-22 |
Delta Sigma Modulator
App 20080284628 - Willig; Rainer ; et al. | 2008-11-20 |
Rotation rate sensor
Grant 7,316,161 - Willig , et al. January 8, 2 | 2008-01-08 |
Rotational rate sensor
Grant 7,313,958 - Willig , et al. January 1, 2 | 2008-01-01 |
Yaw Rate Sensor
App 20070234803 - Gomez; Udo-Martin ; et al. | 2007-10-11 |
Micromechanical motion sensor
App 20070180907 - Krieg; Dietmar ; et al. | 2007-08-09 |
Micromechanical rotational rate sensor
Grant 7,134,337 - Willig , et al. November 14, 2 | 2006-11-14 |
Micromechanical rotational rate sensor
App 20060107738 - Willig; Rainer ; et al. | 2006-05-25 |
Method and system for detecting a spatial movement state of moving objects
Grant 6,925,413 - Krieg , et al. August 2, 2 | 2005-08-02 |
Method and device for connecting sensors or actuators to a bus system
App 20050066101 - Fuehrer, Thomas ; et al. | 2005-03-24 |
Rotation rate sensor
App 20040206176 - Willig, Rainer ; et al. | 2004-10-21 |
Micromechanical roatational rate sensor
App 20040154398 - Willig, Rainer ; et al. | 2004-08-12 |
Rotational rate sensor
App 20040123660 - Willig, Rainer ; et al. | 2004-07-01 |
Rotation speed sensor
Grant 6,752,017 - Willig , et al. June 22, 2 | 2004-06-22 |
Rotation rate sensor
Grant 6,705,164 - Willig , et al. March 16, 2 | 2004-03-16 |
Rotational speed sensor
Grant 6,691,571 - Willig , et al. February 17, 2 | 2004-02-17 |
Method and device for tuning a first oscillator with a second oscillator and rotation rate sensor
Grant 6,654,424 - Thomae , et al. November 25, 2 | 2003-11-25 |
Rotational speed sensor
App 20030183007 - Willig, Rainer ; et al. | 2003-10-02 |
Rotation speed sensor
App 20030164040 - Willig, Rainer ; et al. | 2003-09-04 |
Method and system for detecting a spatial movement state of moving objects
App 20030163282 - Krieg, Dietmar ; et al. | 2003-08-28 |
Rotation rate sensor
App 20030154788 - Willig, Rainer ; et al. | 2003-08-21 |
Device for bias potential generation for an oscillating rotation speed sensor
Grant 6,553,833 - Funk , et al. April 29, 2 | 2003-04-29 |
Device for determining the rotational speed
Grant 6,249,754 - Neul , et al. June 19, 2 | 2001-06-19 |
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