| Patent | Date |
|---|
Process for producing polycrystalline silicon mass
Grant 11,440,804 - Netsu , et al. September 13, 2 | 2022-09-13 |
Polycrystalline silicon rod and method for producing polycrystalline silicon rod
Grant 11,242,620 - Miyao , et al. February 8, 2 | 2022-02-08 |
Polycrystalline Silicon Rod
App 20220033267 - Hoshino; Naruhiro ; et al. | 2022-02-03 |
Resin material, vinyl bag, polycrystalline silicon rod, polycrystalline silicon mass
Grant 11,230,796 - Miyao , et al. January 25, 2 | 2022-01-25 |
Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal silicon
Grant 11,167,994 - Miyao , et al. November 9, 2 | 2021-11-09 |
Polycrystalline silicon rod and method for producing single crystal silicon
Grant 10,914,021 - Miyao , et al. February 9, 2 | 2021-02-09 |
Polycrystalline Silicon Rod, Processing Method For Polycrystalline Silicon Rod, Method For Evaluating Polycrystalline Silicon Rod, And Method For Producing Fz Single Crystal Silicon
App 20200399132 - Miyao; Shuichi ; et al. | 2020-12-24 |
Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingot
Grant 10,870,581 - Netsu , et al. December 22, 2 | 2020-12-22 |
Polycrystalline silicon rod, method for producing polycrystalline silicon rod, and single-crystalline silicon
Grant 10,865,498 - Miyao , et al. December 15, 2 | 2020-12-15 |
Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingot
Grant 10,858,258 - Netsu , et al. December 8, 2 | 2020-12-08 |
Reactor for polycrystalline silicon production and method for producing polycrystalline silicon
Grant 10,858,259 - Kurosawa , et al. December 8, 2 | 2020-12-08 |
Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal silicon
Grant 10,800,659 - Miyao , et al. October 13, 2 | 2020-10-13 |
Polycrystalline silicon ingot, polycrystalline silicon bar, and method for producing single crystal silicon
Grant 10,760,180 - Miyao , et al. Sep | 2020-09-01 |
Reaction Furnace For Producing Polycrystalline Silicon, Apparatus For Producing Polycrystalline Silicon, Method For Producing Po
App 20200239320 - NETSU; Shigeyoshi ; et al. | 2020-07-30 |
Method For Producing Polycrystalline Silicon
App 20200239321 - Kurosawa; Yasushi ; et al. | 2020-07-30 |
Hydrogen gas recovery system and hydrogen gas separation and recovery method
Grant 10,611,635 - Ishida , et al. | 2020-04-07 |
Purification system of trichlorosilane and silicon crystal
Grant 10,584,035 - Kishi , et al. | 2020-03-10 |
Polycrystalline Silicon Rod
App 20190367374 - Hoshino; Naruhiro ; et al. | 2019-12-05 |
Method for producing polycrystalline silicon rod, polycrystalline silicon rod, and polycrystalline silicon mass
Grant 10,377,636 - Miyao , et al. A | 2019-08-13 |
System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon
Grant 10,366,882 - Netsu , et al. July 30, 2 | 2019-07-30 |
Polycrystalline silicon rod, production method therefor, and FZ silicon single crystal
Grant 10,343,922 - Miyao , et al. July 9, 2 | 2019-07-09 |
Polycrystalline Silicon Rod And Method For Producing Single Crystal Silicon
App 20190119829 - Miyao; Shuichi ; et al. | 2019-04-25 |
Polycrystalline silicon rod, method for producing polycrystalline silicon rod, and single-crystalline silicon
App 20190078230 - MIYAO; Shuichi ; et al. | 2019-03-14 |
Trichlorosilane purification system and method for producing polycrystalline silicon
Grant 10,207,932 - Kishi , et al. Feb | 2019-02-19 |
Polycrystalline Silicon Rod And Method For Producing Polycrystalline Silicon Rod
App 20190017193 - Miyao; Shuichi ; et al. | 2019-01-17 |
Reactor For Polycrystalline Silicon Production And Method For Producing Polycrystalline Silicon
App 20190002295 - Kurosawa; Yasushi ; et al. | 2019-01-03 |
Polycrystalline Silicon Mass And Process For Producing Polycrystalline Silicon Mass
App 20180339908 - NETSU; Shigeyoshi ; et al. | 2018-11-29 |
Polycrystalline silicon, FZ single crystal silicon, and method for producing the same
Grant 10,066,320 - Miyao , et al. September 4, 2 | 2018-09-04 |
Polycrystalline Silicon Rod
App 20180244527 - Miyao; Shuichi ; et al. | 2018-08-30 |
Purification System Of Trichlorosilane And Silicon Crystal
App 20180244529 - Kishi; Ryota ; et al. | 2018-08-30 |
Hydrogen Gas Recovery System And Hydrogen Gas Separation And Recovery Method
App 20180237298 - Ishida; Masahiko ; et al. | 2018-08-23 |
Resin Material, Vinyl Bag, Polycrystalline Silicon Rod, Polycrystalline Silicon Mass
App 20180223450 - Miyao; Shuichi ; et al. | 2018-08-09 |
Polycrystalline Silicon Ingot, Polycrystalline Silicon Bar, And Method For Producing Single Crystal Silicon
App 20180105950 - Miyao; Shuichi ; et al. | 2018-04-19 |
Trichlorosilane Purification System And Method For Producing Polycrystalline Silicon
App 20180086645 - Kishi; Ryota ; et al. | 2018-03-29 |
Polycrystalline Silicon Rod, Production Method Therefor, And Fz Silicon Single Crystal
App 20180002180 - Miyao; Shuichi ; et al. | 2018-01-04 |
Polycrystalline Silicon Rod, Processing Method For Polycrystalline Silicon Rod, Method For Evaluating Polycrystalline Silicon Rod, And Method For Producing Fz Single Crystal Silicon
App 20170341943 - Miyao; Shuichi ; et al. | 2017-11-30 |
Polycrystalline Silicon, Fz Single Crystal Silicon, And Method For Producing The Same
App 20170283986 - MIYAO; Shuichi ; et al. | 2017-10-05 |
Polycrystalline Silicon And Method For Selecting Polycrystalline Silicon
App 20170234682 - MIYAO; Shuichi ; et al. | 2017-08-17 |
Reaction Furnace For Producing Polycrystalline Silicon, Apparatus For Producing Polycrystalline Silicon, Method For Producing Polycrystalline Silicon, And Polycrystalline Silicon Rod Or Polycrystalline Silicon Ingot
App 20170225957 - NETSU; Shigeyoshi ; et al. | 2017-08-10 |
Method For Manufacturing Polycrystalline Silicon Bar And Polycrystalline Silicon Bar
App 20170210630 - MIYAO; Shuichi ; et al. | 2017-07-27 |
Method For Purifying Chlorosilane
App 20170190585 - MIYAO; Shuichi ; et al. | 2017-07-06 |
Surface Temperature Calculation Method And Control Method For Polycrystalline Silicon Rod, Method For Production Of Polycrystalline Silicon Rod, Polycrystalline Silicon Rod, And Polycrystalline Silicon Ingot
App 20170113937 - MIYAO; Shuichi ; et al. | 2017-04-27 |
Method for selecting polycrystalline silicon rod, and method for producing single crystalline silicon
Grant 9,605,356 - Miyao , et al. March 28, 2 | 2017-03-28 |
Method For Producing Polycrystalline Silicon Rod, Polycrystalline Silicon Rod, And Polycrystalline Silicon Mass
App 20170073235 - MIYAO; Shuichi ; et al. | 2017-03-16 |
Polycrystalline Silicon Rod, Method For Producing Polycrystalline Silicon Rod, And Single-crystalline Silicon
App 20170058427 - MIYAO; Shuichi ; et al. | 2017-03-02 |
Carbon electrode with slidable contact surfaces and apparatus for manufacturing polycrystalline silicon rod
Grant 9,562,289 - Netsu , et al. February 7, 2 | 2017-02-07 |
Apparatus For Producing Polycrystalline Silicon And Method For Producing Polycrystalline Silicon
App 20160319430 - KUROSAWA; Yasushi ; et al. | 2016-11-03 |
Polycrystalline silicon manufacturing apparatus and polycrystalline silicon manufacturing method
Grant 9,437,429 - Kurosawa , et al. September 6, 2 | 2016-09-06 |
Apparatus for producing polycrystalline silicon and method for producing polycrystalline silicon
Grant 9,416,444 - Kurosawa , et al. August 16, 2 | 2016-08-16 |
Production method for polycrystalline silicon, and reactor for polycrystalline silicon production
Grant 9,394,606 - Kurosawa , et al. July 19, 2 | 2016-07-19 |
Method For Evaluating Crystal Grain Size Distribution Of Polycrystalline Silicon
App 20160187268 - MIYAO; Shuichi ; et al. | 2016-06-30 |
Method for evaluating degree of crystal orientation in polycrystalline silicon, selection method for polycrystalline silicon rods, and production method for single crystal silicon
Grant 9,328,429 - Miyao , et al. May 3, 2 | 2016-05-03 |
Method For Evaluating Crystallinity Of Polycrystalline Silicon
App 20160116423 - MIYAO; Shuichi ; et al. | 2016-04-28 |
Method for evaluating degree of crystalline orientation of polycrystalline silicon, method for selecting polycrystalline silicon rod, polycrystalline silicon rod, polycrystalline silicon ingot, and method for manufacturing monocrystalline silicon
Grant 9,274,069 - Miyao , et al. March 1, 2 | 2016-03-01 |
Method for supplying source gas for producing polycrystalline silicon and polycrystalline silicon
Grant 9,263,261 - Kurosawa , et al. February 16, 2 | 2016-02-16 |
Method For Cleaning Bell Jar, Method For Producing Polycrystalline Silicon, And Apparatus For Drying Bell Jar
App 20150345862 - KUROSAWA; Yasushi ; et al. | 2015-12-03 |
Reactor for producing polycrystalline silicon, system for producing polycrystalline silicon, and process for producing polycrystalline silicon
Grant 9,193,596 - Netsu , et al. November 24, 2 | 2015-11-24 |
Method For Supplying Source Gas For Producing Polycrystalline Silicon And Polycrystalline Silicon
App 20150294864 - Kurosawa; Yasushi ; et al. | 2015-10-15 |
Method for cleaning bell jar, method for producing polycrystalline silicon, and apparatus for drying bell jar
Grant 9,126,242 - Kurosawa , et al. September 8, 2 | 2015-09-08 |
Carbon Electrode And Apparatus For Manufacturing Polycrystalline Silicon Rod
App 20150247239 - NETSU; Shigeyoshi ; et al. | 2015-09-03 |
System For Producing Polycrystalline Silicon, Apparatus For Producing Polycrystalline Silicon, And Process For Producing Polycrystalline Silicon
App 20150206745 - NETSU; Shigeyoshi ; et al. | 2015-07-23 |
Method For Evaluating Degree Of Crystalline Orientation Of Polycrystalline Silicon, Method For Selecting Polycrystalline Silicon Rod, Polycrystalline Silicon Rod, Polycrystalline Silicon Ingot, And Method For Manufacturing Monocrystalline Silicon
App 20150185167 - Miyao; Shuichi ; et al. | 2015-07-02 |
System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon
Grant 9,017,482 - Netsu , et al. April 28, 2 | 2015-04-28 |
Polycrystalline silicon rod and method for manufacturing polycrystalline silicon rod
Grant 9,006,002 - Netsu , et al. April 14, 2 | 2015-04-14 |
Method For Evaluating Degree Of Crystal Orientation In Polycrystalline Silicon, Selection Method For Polycrystalline Silicon Rods, And Production Method For Single-crystal Silicon
App 20150047554 - Miyao; Shuichi ; et al. | 2015-02-19 |
Polycrystalline Silicon Rod Manufacturing Method
App 20150037516 - Netsu; Shigeyoshi ; et al. | 2015-02-05 |
Polycrystalline Silicon Rod Manufacturing Method
App 20150017349 - Netsu; Shigeyoshi ; et al. | 2015-01-15 |
Polycrystalline Silicon Rod Carrying Tool, And Polycrystalline Silicon Rod Retrieval Method
App 20150003952 - Kurosawa; Yasushi ; et al. | 2015-01-01 |
Production Method For Polycrystalline Silicon, And Reactor For Polycrystalline Silicon Production
App 20140302239 - Kurosawa; Yasushi ; et al. | 2014-10-09 |
Core wire holder for producing polycrystalline silicon and method for producing polycrystalline silicon
Grant 8,793,853 - Netsu , et al. August 5, 2 | 2014-08-05 |
Polycrystalline Silicon Manufacturing Apparatus And Polycrystalline Silicon Manufacturing Method
App 20140134832 - Kurosawa; Yasushi ; et al. | 2014-05-15 |
Method For Selecting Polycrystalline Silicon Rod, And Method For Producing Single-crystalline Silicon
App 20140033966 - Miyao; Shuichi ; et al. | 2014-02-06 |
Silicon Core Wire Holder And Polycrystalline Silicon Manufacturing Method
App 20140030440 - Netsu; Shigeyoshi ; et al. | 2014-01-30 |
Apparatus For Producing Polycrystalline Silicon And Method For Producing Polycrystalline Silicon
App 20130302528 - Kurosawa; Yasushi ; et al. | 2013-11-14 |
Polycrystalline Silicon Rod And Method For Manufacturing Polycrystalline Silicon Rod
App 20130102092 - Netsu; Shigeyoshi ; et al. | 2013-04-25 |
Method For Cleaning Bell Jar, Method For Producing Polycrystalline Silicon, And Apparatus For Drying Bell Jar
App 20130089489 - Kurosawa; Yasushi ; et al. | 2013-04-11 |
Method of manufacturing polycrystalline silicon rod
Grant 8,328,935 - Mizuno , et al. December 11, 2 | 2012-12-11 |
Reactor For Producing Polycrystalline Silicon, System For Producing Polycrystalline Silicon, And Process For Producing Polycrystalline Silicon
App 20120237429 - Netsu; Shigeyoshi ; et al. | 2012-09-20 |
Carbon Electrode And Apparatus For Manufacturing Polycrystalline Silicon Rod
App 20120222619 - Netsu; Shigeyoshi ; et al. | 2012-09-06 |
System For Producing Polycrystalline Silicon, Apparatus For Producing Polycrystalline Silicon, And Process For Producing Polycrystalline Silicon
App 20120207662 - Netsu; Shigeyoshi ; et al. | 2012-08-16 |
Core Wire Holder For Producing Polycrystalline Silicon And Method For Producing Polycrystalline Silicon
App 20120201976 - Netsu; Shigeyoshi ; et al. | 2012-08-09 |
Polycrystalline Silicon Mass And Process For Producing Polycrystalline Silicon Mass
App 20120175613 - Netsu; Shigeyoshi ; et al. | 2012-07-12 |
Method Of Manufacturing Polycrystalline Silicon Rod
App 20090269493 - Mizuno; Michihiro ; et al. | 2009-10-29 |
Wafer manufacturing method, polishing apparatus, and wafer
Grant 7,582,221 - Netsu , et al. September 1, 2 | 2009-09-01 |
Wafer Manufacturing Method, Polishing Apparatus, And Wafer
App 20090057840 - Netsu; Shigeyoshi ; et al. | 2009-03-05 |
Method for manufacturing semiconductor wafer, method for receiving order for manufacture of semiconductor wafer, and system for receiving order for manufacture of semiconductor wafer
Grant 7,203,559 - Ito , et al. April 10, 2 | 2007-04-10 |
Semiconductor wafer manufacturing method, semiconductor wafer mnaufacturing order acceptance method, and semiconductor wafer manufacturing order acceptance system
App 20050085017 - Ito, Tatsuo ; et al. | 2005-04-21 |
Semiconductor wafer and device for semiconductor device manufacturing process
Grant 6,787,797 - Demizu , et al. September 7, 2 | 2004-09-07 |
Wafer manufacturing method, polishing apparatus , and wafer
App 20030022495 - Netsu, Shigeyoshi ; et al. | 2003-01-30 |
Cleaning apparatus and a cleaning method
Grant 6,003,527 - Netsu , et al. December 21, 1 | 1999-12-21 |
Apparatus and method for cleaning semiconductor wafers
Grant 5,733,434 - Harada , et al. March 31, 1 | 1998-03-31 |
Apparatus and method for cleaning semiconductor wafers
Grant 5,725,753 - Harada , et al. March 10, 1 | 1998-03-10 |
Elastic foamed sheet and wafer-polishing jig using the sheet
Grant 5,538,465 - Netsu , et al. July 23, 1 | 1996-07-23 |
Elastic foamed sheet and wafer-polishing jig using the sheet
Grant 5,409,770 - Netsu , et al. April 25, 1 | 1995-04-25 |
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