Patent | Date |
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Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement Grant 8,365,372 - Aigner , et al. February 5, 2 | 2013-02-05 |
Apparatus with acoustically coupled BAW resonators and a method for matching impedances Grant 7,786,826 - Thalhammer , et al. August 31, 2 | 2010-08-31 |
Method Of Fabricating An Electrode For A Bulk Acoustic Resonator App 20100107389 - Nessler; Winfried ;   et al. | 2010-05-06 |
Apparatus for housing a micromechanical structure Grant 7,692,317 - Franosch , et al. April 6, 2 | 2010-04-06 |
Method of producing a topology-optimized electrode for a resonator in thin-film technology Grant 7,657,983 - Aigner , et al. February 9, 2 | 2010-02-09 |
Piezoelectric resonator structure and method for manufacturing a coupled resonator device Grant 7,535,324 - Fattinger , et al. May 19, 2 | 2009-05-19 |
Apparatus with acoustically coupled BAW resonators and a method for matching impedances App 20090096549 - Thalhammer; Robert ;   et al. | 2009-04-16 |
Piezoelectric Oscillating Circuit, Method For Manufacturing The Same And Filter Arrangement App 20090064477 - Aigner; Robert ;   et al. | 2009-03-12 |
Piezoelectric component and method for producing it Grant 7,479,851 - Aigner , et al. January 20, 2 | 2009-01-20 |
Piezoelectric Resonator Structure and Method for Manufacturing a Coupled Resonator Device App 20080309432 - Fattinger; Gernot ;   et al. | 2008-12-18 |
Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement Grant 7,455,786 - Aigner , et al. November 25, 2 | 2008-11-25 |
Piezoelectric Component and Method for Producing It App 20080048802 - Aigner; Robert ;   et al. | 2008-02-28 |
Apparatus For Housing A Micromechanical Structure App 20080017974 - FRANOSCH; MARTIN ;   et al. | 2008-01-24 |
Method of producing a piezoelectric component Grant 7,310,861 - Aigner , et al. December 25, 2 | 2007-12-25 |
Apparatus for housing a micromechanical structure and method for producing the same Grant 7,300,823 - Franosch , et al. November 27, 2 | 2007-11-27 |
Method of producing a topology-optimized electrode for a resonator in thin-film technology App 20070209174 - Aigner; Robert ;   et al. | 2007-09-13 |
BAW resonator having piezoelectric layers oriented in opposed directions Grant 6,975,183 - Aigner , et al. December 13, 2 | 2005-12-13 |
Apparatus for housing a micromechanical structure and method for producing the same App 20050146022 - Franosch, Martin ;   et al. | 2005-07-07 |
Bulk acoustic wave filter utilizing resonators with different aspect ratios Grant 6,909,340 - Aigner , et al. June 21, 2 | 2005-06-21 |
Semiconductor element comprising a sequence of layers for converting acoustic or thermal signal and electrical voltage changes into each other and method for producing the same Grant 6,878,604 - Aigner , et al. April 12, 2 | 2005-04-12 |
Piezoelectric oscillating circuit, method for manufacturing the same and filter arrangement App 20050062363 - Aigner, Robert ;   et al. | 2005-03-24 |
Piezoelectric resonator device having detuning layer sequence Grant 6,864,619 - Aigner , et al. March 8, 2 | 2005-03-08 |
Medical strip electrode App 20050038356 - Fortin, Jurgen ;   et al. | 2005-02-17 |
BAW resonator App 20050012568 - Aigner, Robert ;   et al. | 2005-01-20 |
Method for producing a layer with a predefined layer thickness profile App 20040212459 - Aigner, Robert ;   et al. | 2004-10-28 |
Piezoelectric component and method for producing it App 20040201305 - Aigner, Robert ;   et al. | 2004-10-14 |
Piezoelectric resonator device having detuning layer sequence App 20040130847 - Aigner, Robert ;   et al. | 2004-07-08 |
Acoustic resonator App 20040046622 - Aigner, Robert ;   et al. | 2004-03-11 |
Bulk acoustic wave filter App 20030227356 - Aigner, Robert ;   et al. | 2003-12-11 |
Semiconductor element comprising a sequence of layers for converting acoustic or thermal signal and electrical voltage changes into each other and method for producing the same App 20030190792 - Aigner, Robert ;   et al. | 2003-10-09 |