| Patent | Date |
|---|
Integrated Platform For Tin Pvd And High-k Ald For Beol Mim Capacitor
App 20220310776 - WONG; Keith Tatseun ; et al. | 2022-09-29 |
Methods And Apparatus For Processing A Substrate
App 20220301867 - TANNOS; Jethro ; et al. | 2022-09-22 |
Methods And Apparatus For Processing A Substrate
App 20220298636 - ASRANI; Soham Sunjay ; et al. | 2022-09-22 |
Multiple sequential linear powder dispensers for additive manufacturing
Grant 11,446,740 - Rowland , et al. September 20, 2 | 2022-09-20 |
Lithography process window enhancement for photoresist patterning
Grant 11,429,026 - Dai , et al. August 30, 2 | 2022-08-30 |
Apparatus For Post Exposure Bake Of Photoresist
App 20220269180 - BUCHBERGER, JR.; Douglas A. ; et al. | 2022-08-25 |
Apparatus For Post Exposure Bake Of Photoresist
App 20220269179 - BUCHBERGER, JR.; Douglas A. ; et al. | 2022-08-25 |
Apparatus For Post Exposure Bake Of Photoresist
App 20220260917 - BUCHBERGER, JR.; Douglas A. ; et al. | 2022-08-18 |
Methods And Apparatus For Processing A Substrate
App 20220230887 - SHEK; Meiyee ; et al. | 2022-07-21 |
Multi-source ion beam etch system
Grant 11,387,071 - Liang , et al. July 12, 2 | 2022-07-12 |
Apparatus For Post Exposure Bake Of Photoresist
App 20220199414 - BUCHBERGER, JR.; Douglas A. ; et al. | 2022-06-23 |
Gas delivery module
Grant 11,361,978 - Khan , et al. June 14, 2 | 2022-06-14 |
Methods For Graphene Formation
App 20220172948 - Zhou; Jie ; et al. | 2022-06-02 |
Metal Based Hydrogen Barrier
App 20220157654 - Gandikota; Srinivas ; et al. | 2022-05-19 |
Monopole Antenna Array Source For Semiconductor Process Equipment
App 20220139668 - Liang; Qiwei ; et al. | 2022-05-05 |
Substrate vacuum transport and storage apparatus
Grant 11,302,549 - Thirunavukarasu , et al. April 12, 2 | 2022-04-12 |
Method of patterning a low-k dielectric film
Grant 11,302,519 - Nemani , et al. April 12, 2 | 2022-04-12 |
Method Of Forming A 2-dimensional Channel Material Using Ion Implantation
App 20220108886 - Wong; Keith T. ; et al. | 2022-04-07 |
Methods for graphene formation using microwave surface-wave plasma on dielectric materials
Grant 11,289,331 - Zhou , et al. March 29, 2 | 2022-03-29 |
Film Structure For Electric Field Assisted Bake Process
App 20220091513 - BANGAR; Mangesh Ashok ; et al. | 2022-03-24 |
Monopole antenna array source for semiconductor process equipment
Grant 11,244,808 - Liang , et al. February 8, 2 | 2022-02-08 |
Substrate transfer blade
Grant D941,787 - Malik , et al. January 25, 2 | 2022-01-25 |
Monopole antenna array source with gas supply or grid filter for semiconductor process equipment
Grant 11,222,769 - Liang , et al. January 11, 2 | 2022-01-11 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20220004104 - BABAYAN; Viachslav ; et al. | 2022-01-06 |
Methods and apparatuses for forming interconnection structures
Grant 11,205,589 - Ren , et al. December 21, 2 | 2021-12-21 |
Methods For Depositing Dielectric Material
App 20210384040 - CITLA; Bhargav S. ; et al. | 2021-12-09 |
Self-assembled Monolayer Deposition From Low Vapor Pressure Organic Molecules
App 20210375600 - Liang; Qiwei ; et al. | 2021-12-02 |
Selective Deposition Of Metal Oxide By Pulsed Chemical Vapor Deposition
App 20210317573 - WONG; Keith Tatseun ; et al. | 2021-10-14 |
Methods for etching a structure for MRAM applications
Grant 11,145,808 - Kim , et al. October 12, 2 | 2021-10-12 |
Additive Patterning Of Semiconductor Film Stacks
App 20210305501 - DUKOVIC; John O. ; et al. | 2021-09-30 |
Photoresist Patterning Process
App 20210294215 - DAI; Huixiong ; et al. | 2021-09-23 |
Lithography Process Window Enhancement For Photoresist Patterning
App 20210294216 - Dai; Huixiong ; et al. | 2021-09-23 |
Methods for depositing dielectric material
Grant 11,114,306 - Citla , et al. September 7, 2 | 2021-09-07 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 11,112,697 - Babayan , et al. September 7, 2 | 2021-09-07 |
Method for depositing and reflow of a high quality etch resistant gapfill dielectric film
Grant 11,114,333 - Nemani , et al. September 7, 2 | 2021-09-07 |
Multi-step Process For Flowable Gap-fill Film
App 20210257252 - CLEMONS; Maximillian ; et al. | 2021-08-19 |
High Pressure Annealing Process For Metal Containing Materials
App 20210257221 - SINGH; Kaushal K. ; et al. | 2021-08-19 |
Method and apparatus for thin wafer carrier
Grant 11,094,573 - Qiao , et al. August 17, 2 | 2021-08-17 |
Magnetic Memory And Method Of Fabrication
App 20210234091 - Kim; Jong Mun ; et al. | 2021-07-29 |
Pin-less Substrate Transfer Apparatus And Method For A Processing Chamber
App 20210225687 - MALIK; Sultan ; et al. | 2021-07-22 |
Chemical delivery chamber for self-assembled monolayer processes
Grant 11,066,747 - Liang , et al. July 20, 2 | 2021-07-20 |
Methods And Apparatus For Carbon Compound Film Deposition
App 20210217585 - LIANG; Qiwei ; et al. | 2021-07-15 |
Additive patterning of semiconductor film stacks
Grant 11,049,537 - Dukovic , et al. June 29, 2 | 2021-06-29 |
Methods Of Forming Amorphous Carbon Hard Mask Layers And Hard Mask Layers Formed Therefrom
App 20210193461 - CITLA; Bhargav S. ; et al. | 2021-06-24 |
Silicon Carbonitride Gapfill With Tunable Carbon Content
App 20210189555 - Shek; Mei-Yee ; et al. | 2021-06-24 |
Graphene Diffusion Barrier
App 20210167021 - Wu; Yong ; et al. | 2021-06-03 |
Methods for etching a structure for MRAM Applications
App 20210143323 - KIM; Jong Mun ; et al. | 2021-05-13 |
Process chamber for field guided exposure and method for implementing the process chamber
Grant 11,003,080 - Ramaswamy , et al. May 11, 2 | 2021-05-11 |
High pressure annealing process for metal containing materials
Grant 10,998,200 - Singh , et al. May 4, 2 | 2021-05-04 |
PROCESS TO IMPROVE INTERFACE STATE DENSITY Dit ON DEEP TRENCH ISOLATION (DTI) FOR CMOS IMAGE SENSOR
App 20210111222 - Li; Philip Hsin-hua ; et al. | 2021-04-15 |
Methods And Apparatuses For Forming Interconnection Structures
App 20210104434 - Ren; He ; et al. | 2021-04-08 |
Multi-source Ion Beam Etch System
App 20210104374 - Liang; Qiwei ; et al. | 2021-04-08 |
Methods And Apparatus For Depositing Dielectric Material
App 20210090883 - Citla; Bhargav S. ; et al. | 2021-03-25 |
Lithography Simulation And Optical Proximity Correction
App 20210088896 - DAI; Huixiong ; et al. | 2021-03-25 |
High temperature vapor delivery system and method
Grant 10,954,594 - Babayan , et al. March 23, 2 | 2021-03-23 |
Chamber with individually controllable plasma generation regions for a reactor for processing a workpiece
Grant 10,957,518 - Ramaswamy , et al. March 23, 2 | 2021-03-23 |
Low vapor pressure chemical delivery
Grant 10,947,621 - Khan , et al. March 16, 2 | 2021-03-16 |
Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom
Grant 10,950,429 - Citla , et al. March 16, 2 | 2021-03-16 |
Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment
Grant 10,927,449 - Liu , et al. February 23, 2 | 2021-02-23 |
Process Control Of Electric Field Guided Photoresist Baking Process
App 20210041785 - DAI; Huixiong ; et al. | 2021-02-11 |
Methods of forming metal silicide layers and metal silicide layers formed therefrom
Grant 10,916,433 - Ren , et al. February 9, 2 | 2021-02-09 |
Formation of crystalline, layered transition metal dichalcogenides
Grant 10,916,426 - Wong , et al. February 9, 2 | 2021-02-09 |
Graphene diffusion barrier
Grant 10,916,505 - Wu , et al. February 9, 2 | 2021-02-09 |
Additive Patterning Of Semiconductor Film Stacks
App 20210035619 - DUKOVIC; John O. ; et al. | 2021-02-04 |
Flowable Film Curing Using H2 Plasma
App 20210025058 - JIANG; Shishi ; et al. | 2021-01-28 |
Enhanced selective deposition process
Grant 10,892,161 - Liu , et al. January 12, 2 | 2021-01-12 |
Electrostatic chucking force measurement tool for process chamber carriers
Grant 10,879,094 - Nemani , et al. December 29, 2 | 2020-12-29 |
High density, low stress amorphous carbon film, and process and equipment for its deposition
Grant 10,858,727 - Liu , et al. December 8, 2 | 2020-12-08 |
Metal Based Hydrogen Barrier
App 20200373200 - Gandikota; Srinivas ; et al. | 2020-11-26 |
High pressure treatment of silicon nitride film
Grant 10,847,360 - Wong , et al. November 24, 2 | 2020-11-24 |
Gas Delivery System For High Pressure Processing Chamber
App 20200350183 - LIANG; Qiwei ; et al. | 2020-11-05 |
Directional treatment for multi-dimensional device processing
Grant 10,825,665 - Godet , et al. November 3, 2 | 2020-11-03 |
Gas Delivery Module
App 20200343103 - KHAN; Adib M. ; et al. | 2020-10-29 |
Silicon nitride films with high nitrogen content
Grant 10,811,250 - Basu , et al. October 20, 2 | 2020-10-20 |
Chamber With Individually Controllable Plasma Generation Regions For A Reactor For Processing A Workpiece
App 20200312630 - Ramaswamy; Kartik ; et al. | 2020-10-01 |
High Selectivity Atomic Later Deposition Process
App 20200303183 - AHLES; Christopher ; et al. | 2020-09-24 |
High Selectivity Atomic Layer Deposition Process
App 20200283898 - Choi; Jong ; et al. | 2020-09-10 |
Gas delivery module
Grant 10,748,783 - Khan , et al. A | 2020-08-18 |
Film Structure For Electric Field Guided Photoresist Patterning Process
App 20200233307 - DAI; Huixiong ; et al. | 2020-07-23 |
Gas delivery system for high pressure processing chamber
Grant 10,720,341 - Liang , et al. | 2020-07-21 |
Method to fabricate thermally stable low K-FinFET spacer
Grant 10,714,331 - Balseanu , et al. | 2020-07-14 |
In-situ CVD and ALD coating of chamber to control metal contamination
Grant 10,704,141 - Malik , et al. | 2020-07-07 |
Methods of patterning nickel silicide layers on a semiconductor device
Grant 10,692,734 - Kim , et al. | 2020-06-23 |
Semiconductor Processing System
App 20200185260 - MALIK; Sultan ; et al. | 2020-06-11 |
Cluster processing system for forming a transition metal material
App 20200161176 - WONG; Keith Tatseun ; et al. | 2020-05-21 |
Method And Apparatus For Thin Wafer Carrier
App 20200161156 - QIAO; Jingyu ; et al. | 2020-05-21 |
Methods Of Patterning Nickel Silicide Layers On A Semiconductor Device
App 20200135492 - KIM; JONG MUN ; et al. | 2020-04-30 |
Seam-healing method upon supra-atmospheric process in diffusion promoting ambient
Grant 10,636,704 - Mebarki , et al. | 2020-04-28 |
Methods For Graphene Formation
App 20200105525 - Zhou; Jie ; et al. | 2020-04-02 |
Methods For Depositing Dielectric Material
App 20200090946 - CITLA; Bhargav S. ; et al. | 2020-03-19 |
Gas control in process chamber
Grant 10,590,530 - Liang , et al. | 2020-03-17 |
Selective deposition of metal silicides
Grant 10,586,707 - Hung , et al. | 2020-03-10 |
Method to improve film quality for PVD carbon with reactive gas and bias power
Grant 10,570,506 - Citla , et al. Feb | 2020-02-25 |
Method to improve film stability
Grant 10,566,188 - Clemons , et al. Feb | 2020-02-18 |
Multi-cassette carrying case
Grant 10,566,226 - Thirunavukarasu , et al. Feb | 2020-02-18 |
Graphene Diffusion Barrier
App 20200051920 - Wu; Yong ; et al. | 2020-02-13 |
Gas Delivery Module
App 20200035509 - KHAN; Adib M. ; et al. | 2020-01-30 |
Processing Apparatus
App 20200035513 - KHAN; Adib ; et al. | 2020-01-30 |
High pressure wafer processing systems and related methods
Grant 10,529,603 - Liang , et al. J | 2020-01-07 |
In-situ Cvd And Ald Coating Of Chamber To Control Metal Contamination
App 20190368035 - MALIK; Sultan ; et al. | 2019-12-05 |
Formation Of Crystalline, Layered Transition Metal Dichalcogenides
App 20190362971 - WONG; Keith Tatseun ; et al. | 2019-11-28 |
Methods Of Patterning A Wafer Substrate
App 20190362965 - WONG; Keith Tatseun ; et al. | 2019-11-28 |
Method To Improve Film Stability
App 20190355579 - CLEMONS; Maximillian ; et al. | 2019-11-21 |
Methods Of Forming Amorphous Carbon Hard Mask Layers And Hard Mask Layers Formed Therefrom
App 20190348283 - CITLA; Bhargav S. ; et al. | 2019-11-14 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 10,474,033 - Babayan , et al. Nov | 2019-11-12 |
Multi-cassette Carrying Case
App 20190326147 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2019-10-24 |
Substrate Transfer Chamber
App 20190326146 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2019-10-24 |
Method To Fabricate Thermally Stable Low K-finfet Spacer
App 20190311896 - BALSEANU; Mihaela ; et al. | 2019-10-10 |
Methods Of Forming Metal Silicide Layers And Metal Silicide Layers Formed Therefrom
App 20190311908 - REN; He ; et al. | 2019-10-10 |
Microwave anneal to improve CVD metal gap-fill and throughput
Grant 10,438,849 - Ren , et al. O | 2019-10-08 |
Integrated Cluster Tool For Selective Area Deposition
App 20190301009 - KAUFMAN-OSBORN; Tobin ; et al. | 2019-10-03 |
Hybrid laser and implant treatment for overlay error correction
Grant 10,429,747 - Bangar , et al. O | 2019-10-01 |
Monopole antenna array source with phase shifted zones for semiconductor process equipment
Grant 10,431,427 - Liang , et al. O | 2019-10-01 |
High Pressure Annealing Process For Metal Containing Materials
App 20190279879 - SINGH; Kaushal K. ; et al. | 2019-09-12 |
Method For Processing A Mask Substrate To Enable Better Film Quality
App 20190258153 - NEMANI; Srinivas D. ; et al. | 2019-08-22 |
Method For Depositing And Reflow Of A High Quality Etch Resistant Gapfill Dielectric Film
App 20190259625 - NEMANI; Srinivas D. ; et al. | 2019-08-22 |
Diamond Like Carbon Layer Formed By An Electron Beam Plasma Process
App 20190228970 - YANG; Yang ; et al. | 2019-07-25 |
Integrated cluster tool for selective area deposition
Grant 10,358,715 - Kaufman-Osborn , et al. | 2019-07-23 |
Substrate transfer chamber
Grant 10,347,516 - Thirunavukarasu , et al. July 9, 2 | 2019-07-09 |
High Pressure Wafer Processing Systems And Related Methods
App 20190198367 - LIANG; Qiwei ; et al. | 2019-06-27 |
Gas Control In Process Chamber
App 20190194805 - LIANG; Qiwei ; et al. | 2019-06-27 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20190187563 - BABAYAN; Viachslav ; et al. | 2019-06-20 |
Low-temperature atomic layer deposition of boron nitride and BN structures
Grant 10,297,441 - Wolf , et al. | 2019-05-21 |
Gas Delivery System For High Pressure Processing Chamber
App 20190148178 - LIANG; Qiwei ; et al. | 2019-05-16 |
Enhanced Selective Deposition Process
App 20190148144 - LIU; Biao ; et al. | 2019-05-16 |
Gas Delivery System For High Pressure Processing Chamber
App 20190119769 - KHAN; Adib ; et al. | 2019-04-25 |
Low Vapor Pressure Chemical Delivery
App 20190119813 - KHAN; Adib ; et al. | 2019-04-25 |
Methods for fabricating nanowire for semiconductor applications
Grant 10,269,571 - Wong , et al. | 2019-04-23 |
Selective Deposition Of Metal Silicides
App 20190103278 - HUNG; Raymond ; et al. | 2019-04-04 |
Diamond like carbon layer formed by an electron beam plasma process
Grant 10,249,495 - Yang , et al. | 2019-04-02 |
Gas control in process chamber
Grant 10,240,232 - Liang , et al. | 2019-03-26 |
Methods of etching films with reduced surface roughness
Grant 10,233,547 - Schmiege , et al. | 2019-03-19 |
High pressure wafer processing systems and related methods
Grant 10,224,224 - Liang , et al. | 2019-03-05 |
Seam-healing Method Upon Supra-atmospheric Process In Diffusion Promoting Ambient
App 20190051557 - MEBARKI; Bencherki ; et al. | 2019-02-14 |
Microwave Reactor For Deposition or Treatment of Carbon Compounds
App 20190051495 - Liang; Qiwei ; et al. | 2019-02-14 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 10,203,604 - Babayan , et al. Feb | 2019-02-12 |
Methods For Fabricating Nanowire For Semiconductor Applications
App 20190019681 - WONG; Keith Tatseun ; et al. | 2019-01-17 |
Process Chamber For Field Guided Exposure And Method For Implementing The Process Chamber
App 20190018322 - RAMASWAMY; Kartik ; et al. | 2019-01-17 |
Gas Delivery System For High Pressure Processing Chamber
App 20190017131 - Khan; Adib M. ; et al. | 2019-01-17 |
Gas delivery system for high pressure processing chamber
Grant 10,179,941 - Khan , et al. Ja | 2019-01-15 |
Silicon Nitride Films With High Nitrogen Content
App 20190013197 - Basu; Atashi ; et al. | 2019-01-10 |
Methods and apparatus for transferring a substrate
Grant 10,153,187 - Thirunavukarasu , et al. Dec | 2018-12-11 |
Monopole Antenna Array Source With Gas Supply Or Grid Filter For Semiconductor Process Equipment
App 20180342374 - Liang; Qiwei ; et al. | 2018-11-29 |
High Pressure Treatment Of Silicon Nitride Film
App 20180342384 - Wong; Keith Tatseun ; et al. | 2018-11-29 |
Monopole Antenna Array Source With Phase Shifted Zones For Semiconductor Process Equipment
App 20180342372 - Liang; Qiwei ; et al. | 2018-11-29 |
Monopole Antenna Array Source For Semiconductor Process Equipment
App 20180342373 - Liang; Qiwei ; et al. | 2018-11-29 |
Methods for forming fin structures with desired profile for 3D structure semiconductor applications
Grant 10,128,337 - Zhou , et al. November 13, 2 | 2018-11-13 |
Process chamber for field guided exposure and method for implementing the process chamber
Grant 10,095,114 - Ramaswamy , et al. October 9, 2 | 2018-10-09 |
Gapfill film modification for advanced CMP and recess flow
Grant 10,096,512 - Chen , et al. October 9, 2 | 2018-10-09 |
High Pressure Wafer Processing Systems And Related Methods
App 20180261480 - LIANG; Qiwei ; et al. | 2018-09-13 |
High Pressure Wafer Processing Systems And Related Methods
App 20180258533 - Liang; Qiwei ; et al. | 2018-09-13 |
Seam-healing method upon supra-atmospheric process in diffusion promoting ambient
Grant 10,049,927 - Mebarki , et al. August 14, 2 | 2018-08-14 |
Linear Powder Dispenser That Raster Scans For Additive Manufacturing
App 20180221949 - Rowland; Christopher A. ; et al. | 2018-08-09 |
Multiple Sequential Linear Powder Dispensers For Additive Manufacturing
App 20180221948 - Rowland; Christopher A. ; et al. | 2018-08-09 |
Extension Of Pvd Chamber With Multiple Reaction Gases, High Bias Power, And High Power Impulse Source For Deposition, Implantation, And Treatment
App 20180209035 - LIU; Jingjing ; et al. | 2018-07-26 |
Method To Improve Film Quality For Pvd Carbon With Reactive Gas And Bias Power
App 20180209037 - CITLA; Bhargav ; et al. | 2018-07-26 |
Methods of Etching Films with Reduced Surface Roughness
App 20180195179 - Schmiege; Benjamin ; et al. | 2018-07-12 |
Method and apparatus for backside cleaning of substrates
Grant 9,993,853 - Thirunavukarasu , et al. June 12, 2 | 2018-06-12 |
Electrostatic Chucking Force Measurement Tool For Process Chamber Carriers
App 20180144959 - Nemani; Srinivas D. ; et al. | 2018-05-24 |
Self-aligned multiple spacer patterning schemes for advanced nanometer technology
Grant 9,978,596 - Zhang , et al. May 22, 2 | 2018-05-22 |
Hybrid Laser And Implant Treatment For Overlay Error Correction
App 20180136569 - BANGAR; Mangesh ; et al. | 2018-05-17 |
Stress Balanced Electrostatic Substrate Carrier With Contacts
App 20180122679 - Roy; Shambhu N. ; et al. | 2018-05-03 |
Plasma poisoning to enable selective deposition
Grant 9,947,539 - Godet , et al. April 17, 2 | 2018-04-17 |
Independently Controllable Powder Delivery For Additive Manufacturing
App 20180065178 - Rowland; Christopher A. ; et al. | 2018-03-08 |
Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applications
Grant 9,911,594 - Nemani , et al. March 6, 2 | 2018-03-06 |
High Density, Low Stress Amorphous Carbon Film, And Process And Equipment For Its Deposition
App 20180051368 - Liu; Jingjing ; et al. | 2018-02-22 |
Methods of etching films with reduced surface roughness
Grant 9,896,770 - Schmiege , et al. February 20, 2 | 2018-02-20 |
Substrate Support With In Situ Wafer Rotation
App 20180033673 - Nemani; Srinivas D. ; et al. | 2018-02-01 |
Processed Wafer As Top Plate Of A Workpiece Carrier In Semiconductor And Mechanical Processing
App 20180025931 - Nemani; Srinivas D. ; et al. | 2018-01-25 |
Silicide phase control by confinement
Grant 9,865,466 - Mebarki , et al. January 9, 2 | 2018-01-09 |
Diamond Like Carbon Layer Formed By An Electron Beam Plasma Process
App 20170372899 - YANG; Yang ; et al. | 2017-12-28 |
Single platform, multiple cycle spacer deposition and etch
Grant 9,852,916 - Chen , et al. December 26, 2 | 2017-12-26 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20170363960 - BABAYAN; Viachslav ; et al. | 2017-12-21 |
Protective via cap for improved interconnect performance
Grant 9,847,289 - Naik , et al. December 19, 2 | 2017-12-19 |
Methods for forming 2-dimensional self-aligned vias
Grant 9,847,252 - Mebarki , et al. December 19, 2 | 2017-12-19 |
Seam-healing Method Upon Supra-atmospheric Process In Diffusion Promoting Ambient
App 20170358490 - MEBARKI; Bencherki ; et al. | 2017-12-14 |
Integrated Cluster Tool For Selective Area Deposition
App 20170350004 - KAUFMAN-OSBORN; Tobin ; et al. | 2017-12-07 |
Methods For Forming Fin Structures With Desired Profile For 3d Structure Semiconductor Applications
App 20170352726 - ZHOU; Jie ; et al. | 2017-12-07 |
Immersion field guided exposure and post-exposure bake process
Grant 9,829,790 - Buchberger, Jr. , et al. November 28, 2 | 2017-11-28 |
Plasma Poisoning To Enable Selective Deposition
App 20170323778 - Godet; Ludovic ; et al. | 2017-11-09 |
Chemical Delivery Chamber For Self-assembled Monolayer Processes
App 20170306491 - LIANG; Qiwei ; et al. | 2017-10-26 |
Microwave Anneal To Improve Cvd Metal Gap-fill And Throughput
App 20170309515 - Ren; He ; et al. | 2017-10-26 |
Methods For Forming 2-dimensional Self-aligned Vias
App 20170294348 - MEBARKI; Bencherki ; et al. | 2017-10-12 |
Integrated Metrology And Process Tool To Enable Local Stress/overlay Correction
App 20170287752 - GODET; Ludovic ; et al. | 2017-10-05 |
Advanced process flow for high quality FCVD films
Grant 9,777,378 - Nemani , et al. October 3, 2 | 2017-10-03 |
3D material modification for advanced processing
Grant 9,773,675 - Godet , et al. September 26, 2 | 2017-09-26 |
Selective deposition utilizing masks and directional plasma treatment
Grant 9,754,791 - Godet , et al. September 5, 2 | 2017-09-05 |
Etching oxide-nitride stacks using C.sub.4F.sub.6H.sub.2
Grant 9,748,366 - Kim , et al. August 29, 2 | 2017-08-29 |
Localized stress modulation for overlay and EPE
Grant 9,748,148 - Yieh , et al. August 29, 2 | 2017-08-29 |
Cyclic spacer etching process with improved profile control
Grant 9,721,807 - Zhou , et al. August 1, 2 | 2017-08-01 |
Plasma poisoning to enable selective deposition
Grant 9,716,005 - Godet , et al. July 25, 2 | 2017-07-25 |
Additive Manufacturing With Laser And Plasma
App 20170203364 - Ramaswamy; Kartik ; et al. | 2017-07-20 |
Layerwise Heating, Linewise Heating, Plasma Heating And Multiple Feed Materials In Additive Manufacturing
App 20170203363 - Rowland; Christopher A. ; et al. | 2017-07-20 |
Method for patterning a semiconductor substrate
Grant 9,698,015 - Nemani July 4, 2 | 2017-07-04 |
Additive Manufacturing With Laser And Gas Flow
App 20170182556 - Ramaswamy; Kartik ; et al. | 2017-06-29 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20170154797 - Babayan; Viachslav ; et al. | 2017-06-01 |
3d Material Modification For Advanced Processing
App 20170154776 - GODET; Ludovic ; et al. | 2017-06-01 |
Gate electrode material residual removal process
Grant 9,640,385 - Citla , et al. May 2, 2 | 2017-05-02 |
Gapfill Film Modification For Advanced Cmp And Recess Flow
App 20170117157 - CHEN; Erica ; et al. | 2017-04-27 |
3D material modification for advanced processing
Grant 9,620,407 - Godet , et al. April 11, 2 | 2017-04-11 |
Methods Of Etching Films With Reduced Surface Roughness
App 20170096740 - Schmiege; Benjamin ; et al. | 2017-04-06 |
Silicide Phase Control By Confinement
App 20170092502 - MEBARKI; Bencherki ; et al. | 2017-03-30 |
Plasma Reactor For Processing A Workpiece With An Array Of Plasma Point Sources
App 20170092470 - Ramaswamy; Kartik ; et al. | 2017-03-30 |
Self-aligned Multiple Spacer Patterning Schemes For Advanced Nanometer Technology
App 20170092494 - ZHANG; Ying ; et al. | 2017-03-30 |
High Temperature Vapor Delivery System And Method
App 20170088949 - BABAYAN; Viachslav ; et al. | 2017-03-30 |
Air gap formation in interconnection structure by implantation process
Grant 9,595,467 - Xue , et al. March 14, 2 | 2017-03-14 |
Selective Atomic Layer Deposition Process Utilizing Patterned Self Assembled Monolayers For 3d Structure Semiconductor Applications
App 20170053797 - NEMANI; Srinivas D. ; et al. | 2017-02-23 |
Self-aligned multiple spacer patterning schemes for advanced nanometer technology
Grant 9,548,201 - Zhang , et al. January 17, 2 | 2017-01-17 |
Methods for forming features in a material layer utilizing a combination of a main etching and a cyclical etching process
Grant 9,543,163 - Ling , et al. January 10, 2 | 2017-01-10 |
Methods of etching films with reduced surface roughness
Grant 9,540,736 - Schmiege , et al. January 10, 2 | 2017-01-10 |
Plasma uniformity control by arrays of unit cell plasmas
Grant 9,528,185 - Nam , et al. December 27, 2 | 2016-12-27 |
Gas Control In Process Chamber
App 20160369395 - LIANG; Qiwei ; et al. | 2016-12-22 |
Immersion Field Guided Exposure And Post-exposure Bake Process
App 20160357107 - BUCHBERGER, JR.; Douglas A. ; et al. | 2016-12-08 |
Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applications
Grant 9,515,166 - Nemani , et al. December 6, 2 | 2016-12-06 |
Methods for barrier layer removal
Grant 9,514,953 - Kao , et al. December 6, 2 | 2016-12-06 |
Methods for forming interconnection structures in an integrated cluster system for semicondcutor applications
Grant 9,508,561 - Naik , et al. November 29, 2 | 2016-11-29 |
Apparatus and methods for spacer deposition and selective removal in an advanced patterning process
Grant 9,484,202 - Zhou , et al. November 1, 2 | 2016-11-01 |
Cyclic spacer etching process with improved profile control
Grant 9,478,433 - Zhou , et al. October 25, 2 | 2016-10-25 |
Single Platform, Multiple Cycle Spacer Deposition And Etch
App 20160307768 - CHEN; Hao ; et al. | 2016-10-20 |
Cyclic Spacer Etching Process With Improved Profile Control
App 20160293437 - ZHOU; Qingjun ; et al. | 2016-10-06 |
Cyclic Spacer Etching Process With Improved Profile Control
App 20160293438 - ZHOU; Qingjun ; et al. | 2016-10-06 |
Gate Electrode Material Residual Removal Process
App 20160240385 - Citla; Bhargav ; et al. | 2016-08-18 |
Selective Deposition Utilizing Masks And Directional Plasma Treatment
App 20160233100 - GODET; Ludovic ; et al. | 2016-08-11 |
Development of high etch selective hardmask material by ion implantation into amorphous carbon films
Grant 9,412,613 - Manna , et al. August 9, 2 | 2016-08-09 |
Single platform, multiple cycle spacer deposition and etch
Grant 9,406,522 - Chen , et al. August 2, 2 | 2016-08-02 |
Advanced Process Flow For High Quality Fcvd Films
App 20160194758 - NEMANI; Srinivas D. ; et al. | 2016-07-07 |
Air gap process
Grant 9,385,028 - Nemani , et al. July 5, 2 | 2016-07-05 |
Method and apparatus for selective deposition
Grant 9,385,219 - Yieh , et al. July 5, 2 | 2016-07-05 |
Method to reduce K value of dielectric layer for advanced FinFET formation
Grant 9,379,021 - Yieh , et al. June 28, 2 | 2016-06-28 |
Temperature ramping using gas distribution plate heat
Grant 9,368,370 - Belostotskiy , et al. June 14, 2 | 2016-06-14 |
Metal-containing films as dielectric capping barrier for advanced interconnects
Grant 9,368,448 - Chen , et al. June 14, 2 | 2016-06-14 |
3d Material Modification For Advanced Processing
App 20160163546 - GODET; Ludovic ; et al. | 2016-06-09 |
Method And Apparatus For Backside Cleaning Of Substrates
App 20160151808 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-06-02 |
Air Gap Formation In Interconnection Structure By Implantation Process
App 20160141202 - XUE; Jun ; et al. | 2016-05-19 |
Process Chamber for Field Guided Exposure and method for Implementing the process chamber
App 20160139503 - RAMASWAMY; Kartik ; et al. | 2016-05-19 |
Multi-cassette Carrying Case
App 20160133491 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
Substrate Transfer Chamber
App 20160133494 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
Methods And Apparatus For Transferring A Substrate
App 20160133490 - THIRUNAVUKARASU; SRISKANTHARAJAH ; et al. | 2016-05-12 |
Methods for etching silicon using hydrogen radicals in a hot wire chemical vapor deposition chamber
Grant 9,305,796 - Chatterjee , et al. April 5, 2 | 2016-04-05 |
Methods for etching a dielectric barrier layer in a dual damascene structure
Grant 9,299,577 - Ren , et al. March 29, 2 | 2016-03-29 |
Flowable Film Properties Tuning Using Implantation
App 20160079034 - Yieh; Ellie Y. ; et al. | 2016-03-17 |
Plasma Uniformity Control By Arrays Of Unit Cell Plasmas
App 20160053376 - NAM; Sang Ki ; et al. | 2016-02-25 |
Spacer formation
Grant 9,269,590 - Luere , et al. February 23, 2 | 2016-02-23 |
Ultra-thin structure to protect copper and method of preparation
Grant 9,257,330 - Chatterjee , et al. February 9, 2 | 2016-02-09 |
Methods Of Etching Films With Reduced Surface Roughness
App 20160032460 - Schmiege; Benjamin ; et al. | 2016-02-04 |
Single Platform, Multiple Cycle Spacer Deposition And Etch
App 20160027655 - Chen; Hao ; et al. | 2016-01-28 |
Localized Stress Modulation For Overlay And Epe
App 20160005662 - YIEH; Ellie Y. ; et al. | 2016-01-07 |
Method And Apparatus For Selective Deposition
App 20160005839 - YIEH; Ellie Y. ; et al. | 2016-01-07 |
Method Of Patterning A Low-k Dielectric Film
App 20150380215 - Nemani; Srinivas D. ; et al. | 2015-12-31 |
Methods For Forming Fin Structures With Desired Dimensions For 3d Structure Semiconductor Applications
App 20150380526 - GODET; Ludovic ; et al. | 2015-12-31 |
Self-aligned Multiple Spacer Patterning Schemes For Advanced Nanometer Technology
App 20150371852 - ZHANG; Ying ; et al. | 2015-12-24 |
Methods for silicon recess structures in a substrate by utilizing a doping layer
Grant 9,214,377 - Zhang , et al. December 15, 2 | 2015-12-15 |
Protective Via Cap For Improved Interconnect Performance
App 20150348902 - Naik; Mehul ; et al. | 2015-12-03 |
Halogen-free gas-phase silicon etch
Grant 9,190,290 - Xue , et al. November 17, 2 | 2015-11-17 |
Directional Treatment For Multi-dimensional Device Processing
App 20150325411 - GODET; Ludovic ; et al. | 2015-11-12 |
Method of patterning a low-k dielectric film
Grant 9,165,783 - Nemani , et al. October 20, 2 | 2015-10-20 |
Selective Atomic Layer Deposition Process Utilizing Patterned Self Assembled Monolayers For 3d Structure Semiconductor Applications
App 20150294863 - NEMANI; Srinivas D. ; et al. | 2015-10-15 |
Spacer Formation
App 20150287612 - Luere; Olivier ; et al. | 2015-10-08 |
Halogen-free Gas-phase Silicon Etch
App 20150279687 - Xue; Jun ; et al. | 2015-10-01 |
Methods For Forming Interconnection Structures In An Integrated Cluster System For Semicondcutor Applications
App 20150262869 - NAIK; Mehul B. ; et al. | 2015-09-17 |
Temperature Ramping Using Gas Distribution Plate Heat
App 20150262834 - BELOSTOTSKIY; Sergey G. ; et al. | 2015-09-17 |
Grazing Angle Plasma Processing For Modifying A Substrate Surface
App 20150255243 - GODET; Ludovic ; et al. | 2015-09-10 |
Air Gap Process
App 20150221541 - Nemani; Srinivas D. ; et al. | 2015-08-06 |
Method For Material Removal In Dry Etch Reactor
App 20150214066 - Luere; Olivier ; et al. | 2015-07-30 |
Methods For Etching A Dielectric Barrier Layer In A Dual Damascene Structure
App 20150214101 - REN; He ; et al. | 2015-07-30 |
Method of patterning a silicon nitride dielectric film
Grant 9,093,389 - Nemani , et al. July 28, 2 | 2015-07-28 |
Recessing Ultra-low K Dielectric Using Remote Plasma Source
App 20150200042 - Ling; Mang Mang ; et al. | 2015-07-16 |
Development Of High Etch Selective Hardmask Material By Ion Implantation Into Amorphous Carbon Films
App 20150194317 - MANNA; PRAMIT ; et al. | 2015-07-09 |
Metal-containing Films As Dielectric Capping Barrier For Advanced Interconnects
App 20150179581 - CHEN; Yihong ; et al. | 2015-06-25 |
Methods for etching materials used in MRAM applications
Grant 9,059,398 - Kim , et al. June 16, 2 | 2015-06-16 |
Ultra-thin Structure To Protect Copper And Method Of Preparation
App 20150147879 - Chatterjee; Amit ; et al. | 2015-05-28 |
Methods For Barrier Layer Removal
App 20150140827 - KAO; Chia-Ling ; et al. | 2015-05-21 |
Methods For Etching Silicon Using Hydrogen Radicals In A Hot Wire Chemical Vapor Deposition Chamber
App 20150126041 - CHATTERJEE; SUKTI ; et al. | 2015-05-07 |
Methods For Silicon Recess Structures In A Substrate By Utilizing A Doping Layer
App 20150118822 - ZHANG; Ying ; et al. | 2015-04-30 |
Method For Patterning A Semiconductor Substrate
App 20150108619 - NEMANI; Srinivas D. | 2015-04-23 |
Method of removing a metal hardmask
Grant 9,006,106 - Kao , et al. April 14, 2 | 2015-04-14 |
Etching Oxide-nitride Stacks Using C4f6h2
App 20150097276 - Kim; Jong Mun ; et al. | 2015-04-09 |
Method To Reduce K Value Of Dielectric Layer For Advanced Finfet Formation
App 20150099360 - YIEH; Ellie Y. ; et al. | 2015-04-09 |
Method of patterning a low-k dielectric film
Grant 8,987,139 - Kao , et al. March 24, 2 | 2015-03-24 |
Method For Stabilizing An Interface Post Etch To Minimize Queue Time Issues Before Next Processing Step
App 20150079799 - NEMANI; Srinivas D. ; et al. | 2015-03-19 |
Methods For Etching An Etching Stop Layerutilizing A Cyclical Etching Process
App 20150079798 - LING; Mang-Mang ; et al. | 2015-03-19 |
Methods for etching an etching stop layer utilizing a cyclical etching process
Grant 8,980,758 - Ling , et al. March 17, 2 | 2015-03-17 |
Method of removing a photoresist from a low-k dielectric film
Grant 8,980,754 - Zhou , et al. March 17, 2 | 2015-03-17 |
Low Temperature Plasma Anneal Process For Sublimative Etch Processes
App 20150064921 - NEMANI; Srinivas D. ; et al. | 2015-03-05 |
Methods For Forming Features In A Material Layer Utilizing A Combination Of A Main Etching And A Cyclical Etching Process
App 20150056814 - LING; Mang-Mang ; et al. | 2015-02-26 |
Method of multiple patterning of a low-K dielectric film
Grant 8,940,642 - Nemani , et al. January 27, 2 | 2015-01-27 |
Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material
Grant 8,932,959 - Nemani , et al. January 13, 2 | 2015-01-13 |
Directed Block Copolymer Self-assembly Patterns For Advanced Photolithography Applications
App 20140357083 - LING; Mang-Mang ; et al. | 2014-12-04 |
Delicate dry clean
Grant 8,895,449 - Zhu , et al. November 25, 2 | 2014-11-25 |
Delicate Dry Clean
App 20140342532 - Zhu; Lina ; et al. | 2014-11-20 |
Near Surface Etch Selectivity Enhancement
App 20140342569 - Zhu; Lina ; et al. | 2014-11-20 |
Post etch treatment (PET) of a low-K dielectric film
Grant 8,871,650 - Nemani , et al. October 28, 2 | 2014-10-28 |
Patterning Magnetic Memory
App 20140308758 - Nemani; Srinivas D. ; et al. | 2014-10-16 |
Method Of Removing A Metal Hardmask
App 20140273496 - Kao; Chia-Ling ; et al. | 2014-09-18 |
Multi-mode Etch Chamber Source Assembly
App 20140262031 - BELOSTOTSKIY; Sergey G. ; et al. | 2014-09-18 |
Methods For Improving Etching Resistance For An Amorphous Carbon Film
App 20140263173 - ROSSLEE; Craig ; et al. | 2014-09-18 |
Patterning Of Magnetic Tunnel Junction (mtj) Film Stacks
App 20140248718 - Kim; Jisoo ; et al. | 2014-09-04 |
Method of patterning a low-k dielectric film
Grant 8,802,572 - Nemani , et al. August 12, 2 | 2014-08-12 |
Method Of Patterning A Low-k Dielectric Film
App 20140213060 - Kao; Chia-Ling ; et al. | 2014-07-31 |
Method Of Patterning A Silicon Nitride Dielectric Film
App 20140199851 - Nemani; Srinivas D. ; et al. | 2014-07-17 |
Method And System For Etching Plural Layers On A Workpiece Including A Lower Layer Containing An Advanced Memory Material
App 20140170856 - Nemani; Srinivas D. ; et al. | 2014-06-19 |
Silicon oxide recess etch
Grant 8,748,322 - Fung , et al. June 10, 2 | 2014-06-10 |
Method of patterning a low-K dielectric film
Grant 8,741,775 - Nemani , et al. June 3, 2 | 2014-06-03 |
Method Of Patterning A Low-k Dielectric Film
App 20140120726 - Nemani; Srinivas D. ; et al. | 2014-05-01 |
Method of patterning a low-K dielectric film
Grant 8,647,990 - Zhou , et al. February 11, 2 | 2014-02-11 |
Methods For Etching Materials Used In Mram Applications
App 20140038311 - Kim; Jisoo ; et al. | 2014-02-06 |
Method Of Patterning A Low-k Dielectric Film
App 20140017898 - Nemani; Srinivas D. ; et al. | 2014-01-16 |
Method Of Etching High Aspect Ratio Features In A Dielectric Layer
App 20130122712 - KIM; Jong Mun ; et al. | 2013-05-16 |
Post Etch Treatment (pet) Of A Low-k Dielectric Film
App 20130109187 - Nemani; Srinivas D. ; et al. | 2013-05-02 |
Method Of Patterning A Low-k Dielectric Film
App 20130040464 - Zhou; Yifeng ; et al. | 2013-02-14 |
Method Of Multiple Patterning Of A Low-k Dielectric Film
App 20130023122 - Nemani; Srinivas D. ; et al. | 2013-01-24 |
Method of patterning a low-k dielectric film
Grant 8,314,033 - Zhou , et al. November 20, 2 | 2012-11-20 |
High quality silicon oxide films by remote plasma CVD from disilane precursors
Grant 8,242,031 - Mallick , et al. August 14, 2 | 2012-08-14 |
Dielectric deposition and etch back processes for bottom up gapfill
Grant 8,232,176 - Lubomirsky , et al. July 31, 2 | 2012-07-31 |
Process sequence for formation of patterned hard mask film (RFP) without need for photoresist or dry etch
Grant 8,153,348 - Nemani , et al. April 10, 2 | 2012-04-10 |
Dopant activation in doped semiconductor substrates
Grant 7,989,366 - Munro , et al. August 2, 2 | 2011-08-02 |
Methods for forming a silicon oxide layer over a substrate
Grant 7,943,531 - Nemani , et al. May 17, 2 | 2011-05-17 |
Deposition-plasma cure cycle process to enhance film quality of silicon dioxide
Grant 7,902,080 - Chen , et al. March 8, 2 | 2011-03-08 |
High quality silicon oxide films by remote plasma CVD from disilane precursors
Grant 7,867,923 - Mallick , et al. January 11, 2 | 2011-01-11 |
Curing methods for silicon dioxide multi-layers
Grant 7,825,044 - Mallick , et al. November 2, 2 | 2010-11-02 |
Method for depositing and curing low-k films for gapfill and conformal film applications
Grant 7,790,634 - Munro , et al. September 7, 2 | 2010-09-07 |
Two-layer film for next generation damascene barrier application with good oxidation resistance
Grant 7,749,563 - Zheng , et al. July 6, 2 | 2010-07-06 |
Post deposition plasma treatment to increase tensile stress of HDP-CVD SIO.sub.2
Grant 7,745,351 - Chen , et al. June 29, 2 | 2010-06-29 |
Curing methods for silicon dioxide thin films deposited from alkoxysilane precursor with harp II process
Grant 7,745,352 - Mallick , et al. June 29, 2 | 2010-06-29 |
Method and system for improving dielectric film quality for void free gap fill
Grant 7,541,297 - Mallick , et al. June 2, 2 | 2009-06-02 |
Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD
Grant 7,524,750 - Nemani , et al. April 28, 2 | 2009-04-28 |
Formation of high quality dielectric films of silicon dioxide for STI: usage of different siloxane-based precursors for harp II--remote plasma enhanced deposition processes
Grant 7,498,273 - Mallick , et al. March 3, 2 | 2009-03-03 |
Apparatus for abatement of by-products generated from deposition processes and cleaning of deposition chambers
Grant 7,494,628 - Pokharna , et al. February 24, 2 | 2009-02-24 |
Post deposition plasma treatment to increase tensile stress of HDP-CVD SIO.sub.2
Grant 7,465,680 - Chen , et al. December 16, 2 | 2008-12-16 |
Method for forming ultra low k films using electron beam
Grant 7,422,774 - Zheng , et al. September 9, 2 | 2008-09-09 |
Use of germanium dioxide and/or alloys of GeO2 with silicon dioxide for semiconductor dielectric applications
Grant 7,189,639 - Krishnaraj , et al. March 13, 2 | 2007-03-13 |
Method of depositing dielectric materials including oxygen-doped silicon carbide in damascene applications
Grant 7,151,053 - Lee , et al. December 19, 2 | 2006-12-19 |
Method of depositing dielectric films
Grant 7,117,064 - Nemani , et al. October 3, 2 | 2006-10-03 |
Silicon oxide gapfill deposition using liquid precursors
Grant 7,087,536 - Nemani , et al. August 8, 2 | 2006-08-08 |
Method for forming ultra low k films using electron beam
Grant 7,060,330 - Zheng , et al. June 13, 2 | 2006-06-13 |
Process and apparatus for abatement of by products generated from deposition processes and cleaning of deposition chambers
Grant 7,060,234 - Pokharna , et al. June 13, 2 | 2006-06-13 |
Ultra low dielectric materials based on hybrid system of linear silicon precursor and organic porogen by plasma-enhanced chemical vapor deposition (PECVD)
Grant 7,056,560 - Yim , et al. June 6, 2 | 2006-06-06 |
Method of depositing dielectric films
Grant 7,001,850 - Nemani , et al. February 21, 2 | 2006-02-21 |
Method for cleaning a process chamber
Grant 6,902,629 - Zheng , et al. June 7, 2 | 2005-06-07 |
Method for depositing a low dielectric constant film
Grant 6,897,163 - Gaillard , et al. May 24, 2 | 2005-05-24 |
Method of depositing dielectric materials in damascene applications
Grant 6,890,850 - Lee , et al. May 10, 2 | 2005-05-10 |
Side wall passivation films for damascene cu/low k electronic devices
Grant 6,878,620 - Nguyen , et al. April 12, 2 | 2005-04-12 |
Use of cyclic siloxanes for hardness improvement of low k dielectric films
Grant 6,815,373 - Singh , et al. November 9, 2 | 2004-11-09 |
Plasma enhanced CVD low k carbon-doped silicon oxide film deposition using VHF-RF power
Grant 6,797,643 - Rocha-Alvarez , et al. September 28, 2 | 2004-09-28 |
Method of depositing dielectric films
Grant 6,764,958 - Nemani , et al. July 20, 2 | 2004-07-20 |
Method of depositing organosillicate layers
Grant 6,531,398 - Gaillard , et al. March 11, 2 | 2003-03-11 |
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