| Patent | Date |
|---|
Bottom Antireflective Materials And Compositions
App 20150227043 - YAO; Huirong ; et al. | 2015-08-13 |
Compositions of neutral layer for directed self assembly block copolymers and processes thereof
Grant 9,052,598 - Wu , et al. June 9, 2 | 2015-06-09 |
Bottom Antireflective Materials And Compositions
App 20140295349 - YAO; Huirong ; et al. | 2014-10-02 |
Compositions Of Neutral Layer For Directed Self Assembly Block Copolymers And Processes Thereof
App 20140193754 - WU; Hengpeng ; et al. | 2014-07-10 |
Compositions of neutral layer for directed self assembly block copolymers and processes thereof
Grant 8,691,925 - Wu , et al. April 8, 2 | 2014-04-08 |
Positive-working photoimageable bottom antireflective coating
Grant 8,632,948 - Padmanaban , et al. January 21, 2 | 2014-01-21 |
Antireflective composition for photoresists
Grant 8,551,686 - Yao , et al. October 8, 2 | 2013-10-08 |
Silicon-based antireflective coating compositions
Grant 8,524,441 - Zhang , et al. September 3, 2 | 2013-09-03 |
Compositions Of Neutral Layer For Directed Self Assembly Block Copolymers And Processes Thereof
App 20130078576 - WU; Hengpeng ; et al. | 2013-03-28 |
Edge Bead Remover For Coatings
App 20120108067 - Neisser; Mark O. ; et al. | 2012-05-03 |
Bottom antireflective coating compositions
Grant 8,088,548 - Houlihan , et al. January 3, 2 | 2012-01-03 |
Positive-working photoimageable bottom antireflective coating
Grant 8,039,202 - Sui , et al. October 18, 2 | 2011-10-18 |
Antireflective Composition for Photoresists
App 20110104613 - Yao; Huirong ; et al. | 2011-05-05 |
Positive-Working Photoimageable Bottom Antireflective Coating
App 20110076626 - Padmanaban; Munirathna ; et al. | 2011-03-31 |
Solvent mixtures for antireflective coating compositions for photoresists
Grant 7,824,844 - Xiang , et al. November 2, 2 | 2010-11-02 |
Positive-working photoimageable bottom antireflective coating
Grant 7,824,837 - Wu , et al. November 2, 2 | 2010-11-02 |
Process of imaging a photoresist with multiple antireflective coatings
Grant 7,816,071 - Abdallah , et al. October 19, 2 | 2010-10-19 |
Anti-reflective coatings
Grant 7,553,905 - Abdallah , et al. June 30, 2 | 2009-06-30 |
Bottom Antireflective Coating Compositions
App 20090104559 - Houlihan; Francis M. ; et al. | 2009-04-23 |
Solvent Mixtures for Antireflective Coating Compositions for Photoresists
App 20080176165 - Xiang; Zhong ; et al. | 2008-07-24 |
Positive -Working Photoimageable Bottom Antireflective Coating
App 20080090184 - Sui; Yu ; et al. | 2008-04-17 |
Positive-Working Photoimageable Bottom Antireflective Coating
App 20080038666 - Wu; Hengpeng ; et al. | 2008-02-14 |
Antireflective Coating Compositions Comprising Siloxane Polymer
App 20070298349 - Zhang; Ruzhi ; et al. | 2007-12-27 |
Antireflective compositions for photoresists
Grant 7,264,913 - Wu , et al. September 4, 2 | 2007-09-04 |
Anti-reflective coatings
App 20070099108 - Abdallah; David J. ; et al. | 2007-05-03 |
Process for producing an image using a first minimum bottom antireflective coating composition
App 20060199103 - Neisser; Mark O. ; et al. | 2006-09-07 |
Process of imaging a photoresist with multiple antireflective coatings
App 20060177774 - Abdallah; David J. ; et al. | 2006-08-10 |
Process of imaging a photoresist with multiple antireflective coatings
App 20060177772 - Abdallah; David J. ; et al. | 2006-08-10 |
Process for making polyesters
Grant 7,081,511 - Wu , et al. July 25, 2 | 2006-07-25 |
Process for producing an image using a first minimum bottom antireflective coating composition
Grant 7,070,914 - Neisser , et al. July 4, 2 | 2006-07-04 |
Negative-working photoimageable bottom antireflective coating
App 20060063105 - Oberlander; Joseph E. ; et al. | 2006-03-23 |
Process for making polyesters
App 20050234201 - Wu, Hengpeng ; et al. | 2005-10-20 |
Positive-working photoimageable bottom antireflective coating
App 20050214674 - Sui, Yu ; et al. | 2005-09-29 |
Positive-working photoimageable bottom antireflective coating
Grant 6,844,131 - Oberlander , et al. January 18, 2 | 2005-01-18 |
Negative-acting aqueous photoresist composition
Grant 6,800,415 - Lu , et al. October 5, 2 | 2004-10-05 |
Antireflective compositions for photoresists
App 20040101779 - Wu, Hengpeng ; et al. | 2004-05-27 |
Negative-working photoimageable bottom antireflective coating
App 20030215736 - Oberlander, Joseph E. ; et al. | 2003-11-20 |
Process for producing an image using a first minimum bottom antireflective coating composition
App 20030129547 - Neisser, Mark O. ; et al. | 2003-07-10 |
Positive-working photoimageable bottom antireflective coating
App 20030129531 - Oberlander, Joseph E. ; et al. | 2003-07-10 |
Negative- acting aqueous photoresist composition
App 20030077539 - Lu, Ping-Hung ; et al. | 2003-04-24 |
Process and apparatus to adjust exposure dose in lithography systems
Grant 6,346,979 - Ausschnitt , et al. February 12, 2 | 2002-02-12 |
Simple repair method for phase shifting masks
Grant 5,795,685 - Liebmann , et al. August 18, 1 | 1998-08-18 |
Multi mask method for selective mask feature enhancement
Grant 5,563,012 - Neisser October 8, 1 | 1996-10-08 |
Process for producing ceramic circuit structures having conductive vias
Grant 5,337,475 - Aoude , et al. August 16, 1 | 1994-08-16 |
Via paste compositions and use thereof to form conductive vias in circuitized ceramic substrates
Grant 5,283,104 - Aoude , et al. February 1, 1 | 1994-02-01 |
Process for making a compliant thermally conductive compound
Grant 5,213,704 - Anderson, Jr. , et al. May 25, 1 | 1993-05-25 |
Compliant thermally conductive compound
Grant 5,094,769 - Anderson, Jr. , et al. March 10, 1 | 1992-03-10 |
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