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Patent applications and USPTO patent grants for Neil; Mark A..The latest application filed is for "multilayer film metrology using an effective media approximation".
Patent | Date |
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Multilayer film metrology using an effective media approximation Grant 10,429,296 - Neil , et al. October 1, 2 | 2019-10-01 |
Multilayer Film Metrology Using An Effective Media Approximation App 20190033211 - Neil; Mark A. ;   et al. | 2019-01-31 |
Spectroscopy with tailored spectral sampling Grant 10,151,631 - Neil , et al. Dec | 2018-12-11 |
Spectroscopy with Tailored Spectral Sampling App 20180094978 - Neil; Mark A. ;   et al. | 2018-04-05 |
Apparatus And Methods For Real-time Three-dimensional Sem Imaging And Viewing Of Semiconductor Wafers App 20120223227 - CHEN; Chien-Huei ;   et al. | 2012-09-06 |
Region-of-interest based electron beam metrology Grant 7,241,991 - Standiford , et al. July 10, 2 | 2007-07-10 |
Automated focusing of electron image Grant 7,041,976 - Neil , et al. May 9, 2 | 2006-05-09 |
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