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Image Determining Device To Determine The State Of A Subject App 20210286987 - YAMAMOTO; Tetsuya ;   et al. | 2021-09-16 |
Image determining device to determine the state of a subject Grant 11,055,522 - Yamamoto , et al. July 6, 2 | 2021-07-06 |
Image Determining Device To Determine The State Of A Subject App 20190180093 - YAMAMOTO; Tetsuya ;   et al. | 2019-06-13 |
Image determining device to determine the state of a subject Grant 10,275,645 - Yamamoto , et al. | 2019-04-30 |
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Image Determining Device To Determine The State Of A Subject App 20180039827 - YAMAMOTO; Tetsuya ;   et al. | 2018-02-08 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,846,371 - Owa , et al. December 19, 2 | 2017-12-19 |
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20170329234 - OWA; Soichi ;   et al. | 2017-11-16 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,268,237 - Owa , et al. February 23, 2 | 2016-02-23 |
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20150301457 - OWA; Soichi ;   et al. | 2015-10-22 |
Image Determining Device To Determine The State Of A Subject App 20150235077 - YAMAMOTO; Tetsuya ;   et al. | 2015-08-20 |
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Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 9,019,467 - Owa , et al. April 28, 2 | 2015-04-28 |
Exposure apparatus, exposure method, and device manufacturing method Grant 8,780,326 - Kiuchi , et al. July 15, 2 | 2014-07-15 |
Electronic Device And Information Transmission System App 20130321625 - Yanagihara; Masamitsu ;   et al. | 2013-12-05 |
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Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141703 - OWA; Soichi ;   et al. | 2013-06-06 |
Exposure Method, Substrate Stage, Exposure Apparatus, And Device Manufacturing Method App 20130141701 - OWA; Soichi ;   et al. | 2013-06-06 |
Infection Spread Prevention Support System, Infection Spread Prevention Support Server, Examination Terminal, Mobile Terminal And Program App 20130138451 - SHIONO; Hirofumi ;   et al. | 2013-05-30 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,384,880 - Owa , et al. February 26, 2 | 2013-02-26 |
Image Determining Device App 20120250944 - Yamamoto; Tetsuya ;   et al. | 2012-10-04 |
Exposure method, substrate stage, exposure apparatus, and device manufacturing method Grant 8,208,117 - Owa , et al. June 26, 2 | 2012-06-26 |
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Exposure method, exposure apparatus and making method of the apparatus, and device and manufacturing method of the device Grant 6,813,004 - Horikoshi , et al. November 2, 2 | 2004-11-02 |
Mask and exposure apparatus App 20030090644 - Nei, Masahiro | 2003-05-15 |
Exposure apparatus and method Grant 6,549,271 - Yasuda , et al. April 15, 2 | 2003-04-15 |
Exposure apparatus and method App 20030016338 - Yasuda, Masahiko ;   et al. | 2003-01-23 |
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Exposure method and apparatus Grant 5,329,336 - Hirano , et al. July 12, 1 | 1994-07-12 |