Neff; Willi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Neff; Willi.The latest application filed is for "method and device for generating in particular euv radiation and/or soft x-ray radiation".

Company Profile

0.11.8

Neff; Willi - Kelmis BE
Neff; Willi - Michelstadt DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and device for generating EUV radiation and/or soft X-ray radiation Grant 7,809,112 - Derra , et al. October 5, 2	2010-10-05
Extreme UV and soft X ray generator Grant 7,734,014 - Bergmann , et al. June 8, 2	2010-06-08
Method and device for the generation of a plasma through electric discharge in a discharge space Grant 7,518,300 - Bosch , et al. April 14, 2	2009-04-14
Method and Device for Generating in Particular Euv Radiation And/or Soft X-Ray Radiation App 20080298552 - Derra; Gunther Hans ; et al.	2008-12-04
Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation Grant 7,427,766 - Jonkers , et al. September 23, 2	2008-09-23
Gas discharge lamp for extreme UV radiation Grant 7,397,190 - Derra , et al. July 8, 2	2008-07-08
Extreme Uv and Soft X Ray Generator App 20080143228 - Bergmann; Klaus ; et al.	2008-06-19
Method and apparatus for producing extreme ultraviolet radiation or soft x-ray radiation App 20070090304 - Jonkers; Jeroen ; et al.	2007-04-26
Method and device for the generation of a plasma through electric discharge in a discharge space App 20070001571 - Bosch; Eric Gerardus Theodoor ; et al.	2007-01-04
Method and device for producing extreme ultraviolet radiation and soft x-ray radiation Grant 7,126,143 - Klein , et al. October 24, 2	2006-10-24
Gas discharge lamp for euv radiation App 20060138960 - Derra; Guenther Hans ; et al.	2006-06-29
Method and device for the generation of far ultraviolet or soft x-ray radiation Grant 6,967,341 - Neff , et al. November 22, 2	2005-11-22
Method and device for the generation of far ultraviolet or soft x-ray radiation App 20050040347 - Neff, Willi ; et al.	2005-02-24
Method and device for producing extreme ultraviolet radiation and soft x-ray radiation App 20040183037 - Klein, Jurgen ; et al.	2004-09-23
Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge Grant 6,788,763 - Neff , et al. September 7, 2	2004-09-07
Method and device for treating the surfaces of items App 20040045806 - Neff, Willi ; et al.	2004-03-11
Process for cleaning a substrate using a barrier discharge Grant 5,698,039 - Patz , et al. December 16, 1	1997-12-16
Device for generating X-radiation with a plasma source Grant 5,023,897 - Neff , et al. June 11, 1	1991-06-11
Apparatus for generating a source of plasma with high radiation intensity in the X-ray region Grant 4,596,030 - Herziger , et al. June 17, 1	1986-06-17

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