Patent | Date |
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Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a device Grant 9,298,110 - Steinhoff , et al. March 29, 2 | 2016-03-29 |
Lithographic Apparatus and Device Manufacturing Method App 20130194562 - Neerhof; Hendrik Antony Johannes ;   et al. | 2013-08-01 |
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus Grant 8,476,167 - Van Mierlo , et al. July 2, 2 | 2013-07-02 |
System For Removing Contaminant Particles, Lithographic Apparatus, Method For Removing Contaminant Particles And Method For Manufacturing A Device App 20130070218 - Ivanov; Vladimir Vitalevich ;   et al. | 2013-03-21 |
Image-Compensating Addressable Electrostatic Chuck System App 20120026480 - LOOPSTRA; Erik Roelof ;   et al. | 2012-02-02 |
Radiation Source Apparatus, Lithographic Apparatus, Method Of Generating And Delivering Radiation And Method For Manufacturing A Device App 20110222040 - STEINHOFF; Jens Arno ;   et al. | 2011-09-15 |
Lithographic apparatus and device manufacturing method Grant 8,013,981 - Neerhof , et al. September 6, 2 | 2011-09-06 |
Lithographic Apparatus and Method of Manufacturing an Electrostatic Clamp for a Lithographic Apparatus App 20110126406 - VAN MIERLO; Hubert Adriaan ;   et al. | 2011-06-02 |
Lithographic apparatus and device manufacturing method App 20080309912 - Neerhof; Hendrik Antony Johannes ;   et al. | 2008-12-18 |
Lithographic apparatus and device manufacturing method Grant 7,375,353 - Neerhof , et al. May 20, 2 | 2008-05-20 |
Lithographic apparatus and device manufacturing method Grant 7,361,911 - Moors , et al. April 22, 2 | 2008-04-22 |
Lithographic apparatus and device manufacturing method App 20070170376 - Neerhof; Hendrik Antony Johannes ;   et al. | 2007-07-26 |
Lithographic apparatus and device manufacturing method Grant 7,245,357 - Van Zwet , et al. July 17, 2 | 2007-07-17 |
Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus App 20070139855 - Van Mierlo; Hubert Adriaan ;   et al. | 2007-06-21 |
Lithographic apparatus and device manufacturing method App 20070057201 - Neerhof; Hendrik Antony Johannes ;   et al. | 2007-03-15 |
Electrostatic clamp assembly for a lithographic apparatus Grant 7,187,433 - Ottens , et al. March 6, 2 | 2007-03-06 |
Lithographic apparatus and device manufacturing method Grant 7,119,346 - Neerhof , et al. October 10, 2 | 2006-10-10 |
Lithographic apparatus and method to detect correct clamping of an object Grant 7,110,090 - Neerhof September 19, 2 | 2006-09-19 |
Lithographic Apparatus And Device Manufacturing Method App 20060097201 - Neerhof; Hendrik Antony Johannes ;   et al. | 2006-05-11 |
Lithographic apparatus and device manufacturing method Grant 7,041,989 - Neerhof , et al. May 9, 2 | 2006-05-09 |
Electrostatic clamp assembly for a lithographic apparatus App 20050174555 - Ottens, Joost Jeroen ;   et al. | 2005-08-11 |
Lithographic apparatus and device manufacturing method App 20050151096 - Neerhof, Hendrik Antony Johannes ;   et al. | 2005-07-14 |
Lithographic apparatus and device manufacturing method App 20050128459 - Zwet, Erwin Van ;   et al. | 2005-06-16 |
Lithographic Apparatus And Device Manufacturing Method App 20050128463 - Ottens, Joost Jeroen ;   et al. | 2005-06-16 |
Lithographic apparatus and method to detect correct clamping of an object App 20040223127 - Neerhof, Hendrik Antony Johannes | 2004-11-11 |