Neal; Matthew J.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Neal; Matthew J..The latest application filed is for "mems devices and methods of manufacture".
- Neal; Matthew J. - Marlborough MA
| Patent | Date |
|---|---|
| MEMS devices and methods for inhibiting errant motion of MEMS components Grant 6,900,510 - Tamura , et al. May 31, 2 | 2005-05-31 |
| MEMS actuators Grant 6,858,911 - Tamura , et al. February 22, 2 | 2005-02-22 |
| MEMS devices and methods of manufacture Grant 6,812,055 - Tamura , et al. November 2, 2 | 2004-11-02 |
| Mems Devices And Methods Of Manufacture App 20040129953 - Tamura, Hirokazu ; et al. | 2004-07-08 |
| MEMS devices and methods of manufacture Grant 6,717,227 - Tamura , et al. April 6, 2 | 2004-04-06 |
| MEMS actuators App 20030155840 - Tamura, Hirokazu ; et al. | 2003-08-21 |
| MEMS devices and methods for inhibiting errant motion of MEMS components App 20030155841 - Tamura, Hirokazu ; et al. | 2003-08-21 |
| MEMS devices and methods of manufacture App 20030156451 - Tamura, Hirokazu ; et al. | 2003-08-21 |
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