Nawata; Ryo

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nawata; Ryo.The latest application filed is for "feedback control device, article manufacturing method, and feedback control method".

Company Profile

5.13.22

Nawata; Ryo - Tokyo JP
Nawata; Ryo - Tochigi JP
Nawata; Ryo - Utsunomiya-shi JP
Nawata; Ryo - Utsunomiya JP
Nawata; Ryo - Tochigi-ken JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Feedback Control Device, Article Manufacturing Method, And Feedback Control Method App 20220107610 - Nawata; Ryo ; et al.	2022-04-07
Control Apparatus, Imprint Apparatus, And Method Of Manufacturing Article App 20220063176 - Nawata; Ryo ; et al.	2022-03-03
Imprinting Apparatus, Imprinting Method, Method For Producing Article, Substrate, And Mold App 20210157230 - Nawata; Ryo	2021-05-27
Imprint Method And Method For Manufacturing Article App 20200376741 - Nawata; Ryo	2020-12-03
Imprint Method, Imprint Apparatus, And Article Manufacturing Method App 20200189175 - Nawata; Ryo	2020-06-18
Vibration control apparatus, lithography apparatus, and method of manufacturing article Grant 10,209,633 - Nawata , et al. Feb	2019-02-19
Vibration reduction apparatus, lithography apparatus and method of manufacturing article Grant 9,671,704 - Nawata June 6, 2	2017-06-06
Vibration reduction apparatus, lithography apparatus, and method of manufacturing article Grant 9,665,108 - Nawata May 30, 2	2017-05-30
Vibration Control Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20170102626 - Nawata; Ryo ; et al.	2017-04-13
Vibration control apparatus, lithography apparatus, and article manufacturing method Grant 9,599,185 - Nawata March 21, 2	2017-03-21
Vibration Control Apparatus, Lithography Apparatus, And Article Manufacturing Method App 20150369330 - Nawata; Ryo	2015-12-24
Vibration Reduction Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20150268566 - Nawata; Ryo	2015-09-24
Vibration control apparatus, lithography apparatus, and method of manufacturing article Grant 9,052,614 - Nawata , et al. June 9, 2	2015-06-09
Vibration Reduction Apparatus, Lithography Apparatus And Method Of Manufacturing Article App 20150153659 - Nawata; Ryo	2015-06-04
Image Acquisition Apparatus And Method For Adjusting Image Acquisition Apparatus App 20130147939 - Nawata; Ryo ; et al.	2013-06-13
Imaging Apparatus And Control Method Therefor App 20120314050 - Nawata; Ryo ; et al.	2012-12-13
Vibration Control Apparatus, Lithography Apparatus, And Method Of Manufacturing Article App 20120105820 - Nawata; Ryo ; et al.	2012-05-03
Vibration Isolation Device, Exposure Apparatus, And Device Manufacturing Method Using Same App 20120045723 - NAWATA; Ryo ; et al.	2012-02-23
Optical element positioning apparatus, projection optical system and exposure apparatus Grant 7,948,695 - Nawata , et al. May 24, 2	2011-05-24
Optical Element Positioning Apparatus, Projection Optical System and Exposure Apparatus App 20100321803 - Nawata; Ryo ; et al.	2010-12-23
Optical element positioning apparatus, projection optical system and exposure apparatus Grant 7,821,726 - Nawata , et al. October 26, 2	2010-10-26
Mirror Substrate, Mirror, Exposure Apparatus, Device Manufacturing Method, And Mirror Manufacturing Method App 20100165313 - Nawata; Ryo ; et al.	2010-07-01
Exposure apparatus and exposure method Grant 7,733,462 - Nawata June 8, 2	2010-06-08
Optical apparatus, exposure apparatus, and device manufacturing method Grant 7,643,150 - Nawata January 5, 2	2010-01-05
Technique for positioning optical system element Grant 7,589,911 - Nawata , et al. September 15, 2	2009-09-15
Optical Element Positioning Apparatus, Projection Optical System And Exposure Apparatus App 20090021847 - Nawata; Ryo ; et al.	2009-01-22
Anti-vibration Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20080068603 - Nawata; Ryo ; et al.	2008-03-20
Optical Apparatus, Exposure Apparatus, And Device Manufacturing Method App 20080037029 - Nawata; Ryo	2008-02-14
Positioning apparatus, exposure apparatus, and method for producing device Grant 7,221,463 - Mizuno , et al. May 22, 2	2007-05-22
Positioning device, exposure apparatus using the positioning device, and device production method Grant 7,133,115 - Nawata , et al. November 7, 2	2006-11-07
Exposure apparatus and exposure method App 20060209283 - Nawata; Ryo	2006-09-21
Positioning device, exposure apparatus using the positioning device, and device production method App 20050077986 - Nawata, Ryo ; et al.	2005-04-14
Technique for positioning optical system element App 20050063288 - Nawata, Ryo ; et al.	2005-03-24
Positioning apparatus, exposure apparatus, and method for producing device App 20040179192 - Mizuno, Makoto ; et al.	2004-09-16

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