Navala; Sergiy Yakovlevich

Patent Applications and Registrations

Patent applications and USPTO patent grants for Navala; Sergiy Yakovlevich.The latest application filed is for "plasma generating apparatus and plasma processing apparatus".

Company Profile

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Navala; Sergiy Yakovlevich - Gyeonggi-do KR
Navala; Sergiy Yakovlevich - Suwon KR
Navala; Sergiy Yakovlevich - Suwon-si KR
Navala, Sergiy Yakovlevich - Suwon-city KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Ionized physical vapor deposition apparatus using helical self-resonant coil Grant 7,404,879 - Tolmachev , et al. July 29, 2	2008-07-29
Gas injection apparatus for semiconductor processing system Grant 7,252,716 - Kim , et al. August 7, 2	2007-08-07
High-density plasma processing apparatus Grant 7,210,424 - Tolmachev , et al. May 1, 2	2007-05-01
Magnetron cathode and magnetron sputtering apparatus comprising the same Grant 7,052,583 - Navala , et al. May 30, 2	2006-05-30
Plasma generating apparatus and plasma processing apparatus App 20050173069 - Tolmachev, Yuri Nikolaevich ; et al.	2005-08-11
Ionized physical vapor deposition apparatus using helical self-resonant coil App 20050103623 - Tolmachev, Yuri Nikolaevich ; et al.	2005-05-19
High-density plasma processing apparatus App 20040261720 - Tolmachev, Yuri Nikolaevich ; et al.	2004-12-30
Magnetron cathode and magnetron sputtering apparatus comprising the same App 20040140204 - Navala, Sergiy Yakovlevich ; et al.	2004-07-22
Gas injection apparatus for semiconductor processing system App 20040099378 - Kim, Tae-Wan ; et al.	2004-05-27
Magnetron sputtering apparatus and magnetron sputtering method using the same App 20040094412 - Navala, Sergiy Yakovlevich ; et al.	2004-05-20

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