Naulleau; Patrick P.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Naulleau; Patrick P..The latest application filed is for "extended surface parallel coating inspection method".

Company Profile

0.12.7

Naulleau; Patrick P. - Oakland CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Diffractive optical element for extreme ultraviolet wavefront control Grant 7,027,226 - Goldberg , et al. April 11, 2	2006-04-11
Extended surface parallel coating inspection method Grant 7,016,030 - Naulleau March 21, 2	2006-03-21
Holographic illuminator for synchrotron-based projection lithography systems Grant 6,927,887 - Naulleau August 9, 2	2005-08-09
Extended surface parallel coating inspection method App 20050083515 - Naulleau, Patrick P.	2005-04-21
Method of fabricating reflection-mode EUV diffusers Grant 6,861,273 - Anderson , et al. March 1, 2	2005-03-01
Apparatus for generating partially coherent radiation Grant 6,859,263 - Naulleau February 22, 2	2005-02-22
Apparatus for generating partially coherent radiation Grant 6,798,494 - Naulleau September 28, 2	2004-09-28
Synchrotron-based EUV lithography illuminator simulator Grant 6,768,567 - Naulleau July 27, 2	2004-07-27
Dual-domain lateral shearing interferometer Grant 6,707,560 - Naulleau , et al. March 16, 2	2004-03-16
Synchrotron-based EUV lithography illuminator simulator App 20030227657 - Naulleau, Patrick P.	2003-12-11
Apparatus for generating partially coherent radiation App 20030174303 - Naulleau, Patrick P.	2003-09-18
Hybrid shearing and phase-shifting point diffraction interferometer Grant 6,573,997 - Goldberg , et al. June 3, 2	2003-06-03
Diffractive optical element for extreme ultraviolet wavefront control App 20030081316 - Goldberg, Kenneth Alan ; et al.	2003-05-01
Holographic illuminator for synchrotron-based projection lithography systems App 20030072046 - Naulleau, Patrick P.	2003-04-17
Apparatus for generating partially coherent radiation App 20030043359 - Naulleau, Patrick P.	2003-03-06
Method of fabricating reflection-mode EUV diffusers App 20020160545 - Anderson, Erik ; et al.	2002-10-31
Method of fabricating reflection-mode EUV diffraction elements Grant 6,392,792 - Naulleau May 21, 2	2002-05-21
Interferometric at-wavelength flare characterization of EUV optical systems Grant 6,233,056 - Naulleau , et al. May 15, 2	2001-05-15
In Situ alignment system for phase-shifting point-diffraction interferometry Grant 6,118,535 - Goldberg , et al. September 12, 2	2000-09-12

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