Patent | Date |
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High-k/metal gate transistor with L-shaped gate encapsulation layer Grant 9,263,276 - Mo , et al. February 16, 2 | 2016-02-16 |
High-k/metal gate transistor with L-shaped gate encapsulation layer Grant 9,252,018 - Mo , et al. February 2, 2 | 2016-02-02 |
Selective deposition of germanium spacers on nitride Grant 8,900,961 - Chakravarti , et al. December 2, 2 | 2014-12-02 |
High-k dielectric gate structures resistant to oxide growth at the dielectric/silicon substrate interface and methods of manufacture thereof Grant 8,575,709 - Bu , et al. November 5, 2 | 2013-11-05 |
Field effect device with reduced thickness gate Grant 8,492,803 - Amos , et al. July 23, 2 | 2013-07-23 |
High-k/metal Gate Transistor With L-shaped Gate Encapsulation Layer App 20120299122 - MO; Renee T. ;   et al. | 2012-11-29 |
High-k dielectric gate structures resistant to oxide growth at the dielectric/silicon substrate interface and methods of manufacture thereof Grant 8,318,565 - Bu , et al. November 27, 2 | 2012-11-27 |
High-k Dielectric Gate Structures Resistant To Oxide Growth At The Dielectric/silicon Substrate Interface And Methods Of Manufacture Thereof App 20120286374 - Bu; Huiming ;   et al. | 2012-11-15 |
Addition of ballast hydrocarbon gas to doped polysilicon etch masked by resist Grant 8,198,103 - Dalton , et al. June 12, 2 | 2012-06-12 |
High-k Dielectric Gate Structures Resistant To Oxide Growth At The Dielectric/silicon Substrate Interface And Methods Of Manufacture Thereof App 20110221012 - Bu; Huiming ;   et al. | 2011-09-15 |
Structure and method to control oxidation in high-k gate structures Grant 7,955,926 - Natzle , et al. June 7, 2 | 2011-06-07 |
High-k/metal Gate Transistor With L-shaped Gate Encapsulation Layer App 20110115032 - MO; RENEE T. ;   et al. | 2011-05-19 |
Selective Deposition Of Germanium Spacers On Nitride App 20110034000 - Chakravarti; Ashima B. ;   et al. | 2011-02-10 |
Metal oxide field effect transistor with a sharp halo Grant 7,859,013 - Chen , et al. December 28, 2 | 2010-12-28 |
Subgroundrule space for improved metal high-k device Grant 7,851,299 - Natzle December 14, 2 | 2010-12-14 |
Method And Structure For Threshold Voltage Control And Drive Current Improvement For High-k Metal Gate Transistors App 20100244206 - Bu; Huiming ;   et al. | 2010-09-30 |
Subgroundrule Space For Improved Metal High-k Device App 20090250782 - Natzle; Wesley C. | 2009-10-08 |
Structure And Method To Control Oxidation In High-k Gate Structures App 20090243031 - Natzle; Wesley C. ;   et al. | 2009-10-01 |
Field Effect Transistor With Reduced Overlap Capacitance App 20090212332 - Wang; Xinlin ;   et al. | 2009-08-27 |
Field Effect Device With Reduced Thickness Gate App 20090159934 - Amos; Ricky S. ;   et al. | 2009-06-25 |
Feature dimension deviation correction system, method and program product Grant 7,502,660 - Horak , et al. March 10, 2 | 2009-03-10 |
Nitrogen based plasma process for metal gate MOS device Grant 7,498,271 - Donaton , et al. March 3, 2 | 2009-03-03 |
Field effect device with reduced thickness gate Grant 7,459,382 - Amos , et al. December 2, 2 | 2008-12-02 |
Addition Of Ballast Hydrocarbon Gas To Doped Polysilicon Etch Masked By Resist App 20080286972 - Dalton; Timothy J. ;   et al. | 2008-11-20 |
Selective Deposition of Germanium Spacers on Nitride App 20080242041 - Chakravarti; Ashima B. ;   et al. | 2008-10-02 |
Clustered Surface Preparation For Silicide And Metal Contacts App 20080156257 - Deshpande; Sadanand V. ;   et al. | 2008-07-03 |
Metal oxide field effect transistor with a sharp halo and a method of forming the transistor Grant 7,384,835 - Chen , et al. June 10, 2 | 2008-06-10 |
Metal Oxide Field Effect Transistor With A Sharp Halo App 20080093629 - Chen; Huajie ;   et al. | 2008-04-24 |
Clustered surface preparation for silicide and metal contacts Grant 7,344,983 - Deshpande , et al. March 18, 2 | 2008-03-18 |
Feature Dimension Deviation Correction System, Method And Program Product App 20080027577 - Horak; David V. ;   et al. | 2008-01-31 |
Metal Oxide Field Effect Transistor With A Sharp Halo And A Method Of Forming The Transistor App 20070275510 - Chen; Huajie ;   et al. | 2007-11-29 |
Feature dimension deviation correction system, method and program product Grant 7,289,864 - Horak , et al. October 30, 2 | 2007-10-30 |
Field Effect Device With Reduced Thickness Gate App 20070221964 - Amos; Ricky S. ;   et al. | 2007-09-27 |
Freestanding multiplayer IC wiring structure Grant 7,211,496 - Natzle May 1, 2 | 2007-05-01 |
Selective Deposition Of Germanium Spacers On Nitride App 20070059894 - Chakravarti; Ashima B. ;   et al. | 2007-03-15 |
Clustered Surface Preparation For Silicide And Metal Contacts App 20060211244 - Deshpande; Sadanand V. ;   et al. | 2006-09-21 |
Addition Of Ballast Hydrocarbon Gas To Doped Polysilicon Etch Masked By Resist App 20060166416 - Dalton; Timothy J. ;   et al. | 2006-07-27 |
Etch selectivity enhancement for tunable etch resistant anti-reflective layer Grant 7,077,903 - Babich , et al. July 18, 2 | 2006-07-18 |
Apparatus And Method For Controlling Process Non-uniformity App 20060096951 - Natzle; Wesley C. ;   et al. | 2006-05-11 |
Feature Dimension Deviation Correction System, Method And Program Product App 20060007453 - Horak; David V. ;   et al. | 2006-01-12 |
Method of making sub-lithographic features Grant 6,960,510 - Deshpande , et al. November 1, 2 | 2005-11-01 |
Freestanding multilayer IC wiring structure App 20050151256 - Natzle, Wesley C. | 2005-07-14 |
Structure and method to fabricate ultra-thin Si channel devices Grant 6,905,941 - Doris , et al. June 14, 2 | 2005-06-14 |
Etch selectivity enhancement for tunable etch resistant anti-reflective layer App 20050098091 - Babich, Katherina E. ;   et al. | 2005-05-12 |
Vapor phase etch trim structure with top etch blocking layer Grant 6,884,734 - Buehrer , et al. April 26, 2 | 2005-04-26 |
Low defect pre-emitter and pre-base oxide etch for bipolar transistors and related tooling Grant 6,858,532 - Natzle , et al. February 22, 2 | 2005-02-22 |
MOSFET device with in-situ doped, raised source and drain structures Grant 6,858,903 - Natzle , et al. February 22, 2 | 2005-02-22 |
Structure and method to fabricate ultra-thin Si channel devices App 20050003589 - Doris, Bruce B. ;   et al. | 2005-01-06 |
Method for reducing line edge roughness of oxide material using chemical oxide removal Grant 6,838,347 - Liu , et al. January 4, 2 | 2005-01-04 |
Damascene double-gate MOSFET with vertical channel regions Grant 6,835,614 - Hanafi , et al. December 28, 2 | 2004-12-28 |
Mosfet Device With In-situ Doped, Raised Source And Drain Structures App 20040248368 - Natzle, Wesley C. ;   et al. | 2004-12-09 |
STRUCTURE AND METHOD TO FABRICATE ULTRA-THIN Si CHANNEL DEVICES App 20040241981 - Doris, Bruce B. ;   et al. | 2004-12-02 |
Vapor phase etch trim structure with top etch blocking layer App 20040198030 - Buehrer, Frederick W. ;   et al. | 2004-10-07 |
Preserving Teos Hard Mask Using Cor For Raised Source-drain Including Removable/disposable Spacer App 20040191998 - Natzle, Wesley C. ;   et al. | 2004-09-30 |
Preserving TEOS hard mask using COR for raised source-drain including removable/disposable spacer Grant 6,790,733 - Natzle , et al. September 14, 2 | 2004-09-14 |
Method of manufacture of MOSFET device with in-situ doped, raised source and drain structures Grant 6,774,000 - Natzle , et al. August 10, 2 | 2004-08-10 |
Low defect pre-emitter and pre-base oxide etch for bipolar transistors and related tooling App 20040110354 - Natzle, Wesley C. ;   et al. | 2004-06-10 |
Method of manufacture of MOSFET device with in-situ doped, raised source and drain structures App 20040097047 - Natzle, Wesley C. ;   et al. | 2004-05-20 |
Damascene double-gate MOSFET with vertical channel regions App 20040092067 - Hanafi, Hussein I. ;   et al. | 2004-05-13 |
Method of making sub-lithographic features App 20040002203 - Deshpande, Sadanand V. ;   et al. | 2004-01-01 |
Damascene double-gate MOSFET with vertical channel regions Grant 6,635,923 - Hanafi , et al. October 21, 2 | 2003-10-21 |
Damascene double-gate MOSFET with vertical channel regions App 20020177263 - Hanafi, Hussein I. ;   et al. | 2002-11-28 |
Structure and method for producing low leakage isolation devices Grant 6,319,794 - Akatsu , et al. November 20, 2 | 2001-11-20 |
Vapor phase etching of oxide masked by resist or masking material Grant 6,074,951 - Kleinhenz , et al. June 13, 2 | 2000-06-13 |
Method of patterning sidewalls of a trench in integrated circuit manufacturing Grant 6,071,815 - Kleinhenz , et al. June 6, 2 | 2000-06-06 |
Oxide layer patterned by vapor phase etching Grant 5,876,879 - Kleinhenz , et al. March 2, 1 | 1999-03-02 |
Folded trench and RIE/deposition process for high-value capacitors Grant 5,838,045 - Muller , et al. November 17, 1 | 1998-11-17 |
Trench sidewall patterned by vapor phase etching Grant 5,838,055 - Kleinhenz , et al. November 17, 1 | 1998-11-17 |
Oxide strip that improves planarity Grant 5,766,971 - Ahlgren , et al. June 16, 1 | 1998-06-16 |
Sealed chamber with heating lamps provided within transparent tubes Grant 5,636,320 - Yu , et al. June 3, 1 | 1997-06-03 |
Supersonic molecular beam etching of surfaces Grant 5,286,331 - Chen , et al. February 15, 1 | 1994-02-15 |
Device and method for accurate etching and removal of thin film Grant 5,282,925 - Jeng , et al. February 1, 1 | 1994-02-01 |
Thin film resistor and method for producing same Grant 5,081,439 - Natzle , et al. January 14, 1 | 1992-01-14 |