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name:-0.13364315032959
name:-0.022009134292603
name:-0.0070700645446777
Natt; Oliver Patent Filings

Natt; Oliver

Patent Applications and Registrations

Patent applications and USPTO patent grants for Natt; Oliver.The latest application filed is for "euv exposure apparatus with reflective elements having reduced influence of temperature variation".

Company Profile
5.17.17
  • Natt; Oliver - Aalen DE
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Grant 10,684,551 - Baer , et al.
2020-06-16
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation
App 20190310555 - Baer; Norman ;   et al.
2019-10-10
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Grant 10,317,802 - Baer , et al.
2019-06-11
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20190155166 - Natt; Oliver ;   et al.
2019-05-23
Method for operating an illumination system of a microlithographic projection exposure apparatus
Grant 10,222,704 - Natt , et al.
2019-03-05
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation
App 20180299784 - Baer; Norman ;   et al.
2018-10-18
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Grant 10,031,423 - Baer , et al. July 24, 2
2018-07-24
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20180024439 - Natt; Oliver ;   et al.
2018-01-25
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation
App 20170315449 - Baer; Norman ;   et al.
2017-11-02
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Grant 9,746,778 - Baer , et al. August 29, 2
2017-08-29
Method for operating an illumination system of a microlithographic projection exposure apparatus
Grant 9,703,206 - Natt , et al. July 11, 2
2017-07-11
Mirror for use in a microlithography projection exposure apparatus
Grant 9,568,845 - Rocktaeschel , et al. February 14, 2
2017-02-14
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20160246180 - Natt; Oliver ;   et al.
2016-08-25
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation
App 20160195818 - Baer; Norman ;   et al.
2016-07-07
Method for operating an illumination system of a microlithographic projection exposure apparatus
Grant 9,341,957 - Natt , et al. May 17, 2
2016-05-17
EUV exposure apparatus with reflective elements having reduced influence of temperature variation
Grant 9,316,929 - Baer , et al. April 19, 2
2016-04-19
Projection exposure apparatus for EUV microlithography and method for microlithographic exposure
Grant 9,298,097 - Bienert , et al. March 29, 2
2016-03-29
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20160077444 - Natt; Oliver ;   et al.
2016-03-17
Method for operating an illumination system of a microlithographic projection exposure apparatus
Grant 9,217,931 - Natt , et al. December 22, 2
2015-12-22
Illumination system of a microlithographic projection exposure apparatus
Grant 9,116,441 - Dieckmann , et al. August 25, 2
2015-08-25
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20130258303 - Natt; Oliver ;   et al.
2013-10-03
Projection Exposure Apparatus for EUV Microlithography and Method for Microlithographic Exposure
App 20130250265 - Bienert; Marc ;   et al.
2013-09-26
Method for operating an illumination system of a microlithographic projection exposure apparatus
Grant 8,467,033 - Natt , et al. June 18, 2
2013-06-18
EUV Exposure Apparatus
App 20130141707 - Baer; Norman ;   et al.
2013-06-06
Mirror For Use In A Microlithography Projection Exposure Apparatus
App 20120229784 - ROCKTAESCHEL; Martin ;   et al.
2012-09-13
Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20120188527 - Dieckmann; Nils ;   et al.
2012-07-26
Illumination system of a microlithographic projection exposure apparatus
Grant 8,169,594 - Dieckmann , et al. May 1, 2
2012-05-01
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20100321661 - Natt; Oliver ;   et al.
2010-12-23
Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20090323043 - Dieckmann; Nils ;   et al.
2009-12-31
Instrument For Measuring The Angular Distribution Of Light Produced By An Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20080079939 - Fiolka; Damian ;   et al.
2008-04-03

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