Patent | Date |
---|
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,684,551 - Baer , et al. | 2020-06-16 |
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20190310555 - Baer; Norman ;   et al. | 2019-10-10 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,317,802 - Baer , et al. | 2019-06-11 |
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20190155166 - Natt; Oliver ;   et al. | 2019-05-23 |
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 10,222,704 - Natt , et al. | 2019-03-05 |
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20180299784 - Baer; Norman ;   et al. | 2018-10-18 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 10,031,423 - Baer , et al. July 24, 2 | 2018-07-24 |
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180024439 - Natt; Oliver ;   et al. | 2018-01-25 |
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20170315449 - Baer; Norman ;   et al. | 2017-11-02 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 9,746,778 - Baer , et al. August 29, 2 | 2017-08-29 |
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 9,703,206 - Natt , et al. July 11, 2 | 2017-07-11 |
Mirror for use in a microlithography projection exposure apparatus Grant 9,568,845 - Rocktaeschel , et al. February 14, 2 | 2017-02-14 |
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160246180 - Natt; Oliver ;   et al. | 2016-08-25 |
Euv Exposure Apparatus With Reflective Elements Having Reduced Influence Of Temperature Variation App 20160195818 - Baer; Norman ;   et al. | 2016-07-07 |
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 9,341,957 - Natt , et al. May 17, 2 | 2016-05-17 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation Grant 9,316,929 - Baer , et al. April 19, 2 | 2016-04-19 |
Projection exposure apparatus for EUV microlithography and method for microlithographic exposure Grant 9,298,097 - Bienert , et al. March 29, 2 | 2016-03-29 |
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160077444 - Natt; Oliver ;   et al. | 2016-03-17 |
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 9,217,931 - Natt , et al. December 22, 2 | 2015-12-22 |
Illumination system of a microlithographic projection exposure apparatus Grant 9,116,441 - Dieckmann , et al. August 25, 2 | 2015-08-25 |
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20130258303 - Natt; Oliver ;   et al. | 2013-10-03 |
Projection Exposure Apparatus for EUV Microlithography and Method for Microlithographic Exposure App 20130250265 - Bienert; Marc ;   et al. | 2013-09-26 |
Method for operating an illumination system of a microlithographic projection exposure apparatus Grant 8,467,033 - Natt , et al. June 18, 2 | 2013-06-18 |
EUV Exposure Apparatus App 20130141707 - Baer; Norman ;   et al. | 2013-06-06 |
Mirror For Use In A Microlithography Projection Exposure Apparatus App 20120229784 - ROCKTAESCHEL; Martin ;   et al. | 2012-09-13 |
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20120188527 - Dieckmann; Nils ;   et al. | 2012-07-26 |
Illumination system of a microlithographic projection exposure apparatus Grant 8,169,594 - Dieckmann , et al. May 1, 2 | 2012-05-01 |
Method For Operating An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100321661 - Natt; Oliver ;   et al. | 2010-12-23 |
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20090323043 - Dieckmann; Nils ;   et al. | 2009-12-31 |
Instrument For Measuring The Angular Distribution Of Light Produced By An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20080079939 - Fiolka; Damian ;   et al. | 2008-04-03 |