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Method for fabricating semiconductor integrated circuit device Grant 7,799,690 - Tanabe , et al. September 21, 2 | 2010-09-21 |
Method for fabricating semiconductor intergrated circuit device App 20080045027 - Tanabe; Yoshikazu ;   et al. | 2008-02-21 |
Method for fabricating semiconductor integrated circuit device Grant 7,250,376 - Tanabe , et al. July 31, 2 | 2007-07-31 |
Fabrication process of a semiconductor integrated circuit device Grant 7,122,469 - Tanabe , et al. October 17, 2 | 2006-10-17 |
Method for fabricating semiconductor integrated circuit device Grant 7,053,007 - Tanabe , et al. May 30, 2 | 2006-05-30 |
Method for fabricating semiconductor integrated circuit device Grant 7,008,880 - Tanabe , et al. March 7, 2 | 2006-03-07 |
Fabrication process of a semiconductor integrated circuit device Grant 6,987,069 - Tanabe , et al. January 17, 2 | 2006-01-17 |
Fabrication process of a semiconductor integrated circuit device App 20050266630 - Tanabe, Yoshikazu ;   et al. | 2005-12-01 |
Method for fabricating semiconductor integrated circuit device Grant 6,962,880 - Tanabe , et al. November 8, 2 | 2005-11-08 |
Method for fabricating semiconductor integrated circuit device Grant 6,962,881 - Tanabe , et al. November 8, 2 | 2005-11-08 |
Method for fabricating semiconductor integrated circuit device App 20050227501 - Tanabe, Yoshikazu ;   et al. | 2005-10-13 |
Method for fabricating semiconductor integrated circuit device App 20050208731 - Tanabe, Yoshikazu ;   et al. | 2005-09-22 |
Method for fabricating semiconductor integrated circuit device Grant 6,855,642 - Tanabe , et al. February 15, 2 | 2005-02-15 |
Fabrication process of a semiconductor integrated circuit device App 20040198067 - Tanabe, Yoshikazu ;   et al. | 2004-10-07 |
Fabrication process of a semiconductor integrated circuit device Grant 6,784,116 - Tanabe , et al. August 31, 2 | 2004-08-31 |
Method for fabricating semiconductor integrated circuit device App 20040161945 - Tanabe, Yoshikazu ;   et al. | 2004-08-19 |
Method for fabricating semiconductor intergrated circuit device App 20040157467 - Tanabe, Yoshikazu ;   et al. | 2004-08-12 |
Method for fabricating semiconductor integrated circuit device App 20040157468 - Tanabe, Yoshikazu ;   et al. | 2004-08-12 |
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process Grant 6,723,665 - Tanabe , et al. April 20, 2 | 2004-04-20 |
Method for fabricating semiconductor integrated circuit device App 20030219995 - Tanabe, Yoshikazu ;   et al. | 2003-11-27 |
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process App 20030203646 - Tanabe, Yoshikazu ;   et al. | 2003-10-30 |
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process Grant 6,602,808 - Tanabe , et al. August 5, 2 | 2003-08-05 |
Fabrication process of a semiconductor integrated circuit device App 20030143864 - Tanabe, Yoshikazu ;   et al. | 2003-07-31 |
Method for fabricating semiconductor integrated circuit device Grant 6,596,650 - Tanabe , et al. July 22, 2 | 2003-07-22 |
Method for fabricating semiconductor integrated circuit device Grant 6,569,780 - Tanabe , et al. May 27, 2 | 2003-05-27 |
Fabrication process of a semiconductor integrated circuit device Grant 6,528,403 - Tanabe , et al. March 4, 2 | 2003-03-04 |
Fabrication process of a semiconductor integrated circuit device Grant 6,503,819 - Tanabe , et al. January 7, 2 | 2003-01-07 |
Method for fabricating semiconductor integrated circuit device Grant 6,417,114 - Tanabe , et al. July 9, 2 | 2002-07-09 |
Fabrication process of a semiconductor integrated circuit device App 20020048967 - Tanabe, Yoshikazu ;   et al. | 2002-04-25 |
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process App 20020042211 - Tanabe, Yoshikazu ;   et al. | 2002-04-11 |
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process App 20020019149 - Tanabe, Yoshikazu ;   et al. | 2002-02-14 |
Method for fabricating semiconductor integrated circuit device App 20020009898 - Tanabe, Yoshikazu ;   et al. | 2002-01-24 |
Method for fabricating semiconductor integrated circuit device App 20020004315 - Tanabe, Yoshikazu ;   et al. | 2002-01-10 |
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process Grant 6,319,860 - Tanabe , et al. November 20, 2 | 2001-11-20 |
Fabrication process of a semiconductor integrated circuit device App 20010024870 - Tanabe, Yoshikazu ;   et al. | 2001-09-27 |
Method for fabricating semiconductor integrated circuit device App 20010010975 - Tanabe, Yoshikazu ;   et al. | 2001-08-02 |
Method for fabricating semiconductor integrated circuit device App 20010009813 - Tanabe, Yoshikazu ;   et al. | 2001-07-26 |
Method for fabricating semiconductor integrated circuit device App 20010006853 - Tanabe, Yoshikazu ;   et al. | 2001-07-05 |
Method for fabricating semiconductor integrated circuit device Grant 6,239,041 - Tanabe , et al. May 29, 2 | 2001-05-29 |
Fabrication process of a semiconductor integrated circuit device Grant 6,197,702 - Tanabe , et al. March 6, 2 | 2001-03-06 |
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process Grant 6,066,508 - Tanabe , et al. May 23, 2 | 2000-05-23 |
Method of manufacturing an improved SOI (silicon-on-insulator) semiconductor integrated circuit device Grant 6,063,686 - Masuda , et al. May 16, 2 | 2000-05-16 |
Semiconductor device having a PN junction formed on an insulator film Grant 4,819,055 - Nakazato , et al. April 4, 1 | 1989-04-04 |
SOI process for forming a thin film transistor using solid phase epitaxy Grant 4,808,546 - Moniwa , et al. February 28, 1 | 1989-02-28 |
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