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Patent applications and USPTO patent grants for Natalicio; John.The latest application filed is for "micro-adjustable wafer retaining apparatus".
Patent | Date |
---|---|
Micro-adjustable wafer retaining apparatus Grant 6,354,927 - Natalicio March 12, 2 | 2002-03-12 |
Non-abrasive conditioning for polishing pads Grant 6,283,836 - Fruitman , et al. September 4, 2 | 2001-09-04 |
Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing Grant 6,217,410 - Holzapfel , et al. April 17, 2 | 2001-04-17 |
Self-powered carrier for polishing or planarizing wafers Grant 6,213,855 - Natalicio April 10, 2 | 2001-04-10 |
Wafer planarization carrier having floating pad load ring Grant 6,113,468 - Natalicio September 5, 2 | 2000-09-05 |
Workpiece carrier with monopiece pressure plate and low gimbal point Grant 5,989,104 - Kim , et al. November 23, 1 | 1999-11-23 |
Wafer carrier for semiconductor wafer polishing machine Grant 5,916,015 - Natalicio June 29, 1 | 1999-06-29 |
Apparatus for rinsing wafers in the context of a combined cleaning rinsing and drying system Grant 5,899,216 - Goudie , et al. | 1999-05-04 |
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