Nasser-Ghodsi; Mehran

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nasser-Ghodsi; Mehran.The latest application filed is for "multi-column scanning electron microscopy system".

Company Profile

3.55.29

Nasser-Ghodsi; Mehran - Hamilton MA
- Hamilton MA US
Nasser-Ghodsi; Mehran - Halmilton MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multi-column scanning electron microscopy system Grant 10,354,832 - Haynes , et al. July 16, 2	2019-07-16
Multi-Column Scanning Electron Microscopy System App 20180358200 - Haynes; Robert ; et al.	2018-12-13
Electron emitter device with integrated multi-pole electrode structure Grant 9,793,089 - Plettner , et al. October 17, 2	2017-10-17
Apparatus and methods for inspecting extreme ultra violet reticles Grant 9,679,372 - Nasser-Ghodsi , et al. June 13, 2	2017-06-13
Multi-layer ceramic vacuum to atmosphere electric feed through Grant 9,591,770 - Haynes , et al. March 7, 2	2017-03-07
Apparatus and method for optical inspection, magnetic field and height mapping Grant 9,513,230 - Gerling , et al. December 6, 2	2016-12-06
Asymmetrical detector design and methodology Grant 9,418,819 - Gerling , et al. August 16, 2	2016-08-16
Apparatus And Methods For Inspecting Extreme Ultra Violet Reticles App 20150117754 - Nasser-Ghodsi; Mehran ; et al.	2015-04-30
Dummy Barrier Layer Features For Patterning Of Sparsely Distributed Metal Features On The Barrier With Cmp App 20150076697 - Plettner; Tomas ; et al.	2015-03-19
Electron Emitter Device With Integrated Multi-poleelectrode Structure App 20150076988 - Plettner; Thomas ; et al.	2015-03-19
Asymmetrical Detector Design And Methodology App 20150069234 - Gerling; John ; et al.	2015-03-12
Apparatus and methods for inspecting extreme ultra violet reticles Grant 8,953,869 - Nasser-Ghodsi , et al. February 10, 2	2015-02-10
Sharp scattering angle trap for electron beam apparatus Grant 8,890,066 - Gotkis , et al. November 18, 2	2014-11-18
Multi-layer Ceramic Vacuum To Atmosphere Electric Feed Through App 20140318855 - Haynes; Robert ; et al.	2014-10-30
Methods and Systems for Measuring a Characteristic of a Substrate or Preparing a Substrate for Analysis App 20140291516 - Nasser-Ghodsi; Mehran ; et al.	2014-10-02
Apparatus And Method For Optical Inspection, Magnetic Field And Height Mapping App 20140218503 - Gerling; John ; et al.	2014-08-07
Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis Grant 8,765,496 - Nasser-Ghodsi , et al. July 1, 2	2014-07-01
Permanent magnet lens array Grant 8,698,094 - Sears , et al. April 15, 2	2014-04-15
Auger elemental identification algorithm Grant 8,658,973 - Neil , et al. February 25, 2	2014-02-25
Background reduction system including louver Grant 8,633,457 - Nasser-Ghodsi , et al. January 21, 2	2014-01-21
Apparatus and methods for forming an electrical conduction path through an insulating layer Grant 8,618,513 - Plettner , et al. December 31, 2	2013-12-31
Apparatus and methods for forming an electrical conduction path through an insulating layer Grant 08618513 -	2013-12-31
Auger Elemental Identification Algorithm App 20130341504 - Neill; Mark ; et al.	2013-12-26
Apparatus And Methods For Inspecting Extreme Ultra Violet Reticles App 20130336574 - Nasser-Ghodsi; Mehran ; et al.	2013-12-19
Electron generation and delivery system for contamination sensitive emitters Grant 8,530,867 - Nasser-Ghodsi September 10, 2	2013-09-10
Non-planar extractor structure for electron source Grant 8,513,619 - Nasser-Ghodsi , et al. August 20, 2	2013-08-20
Multiple-column electron beam apparatus and methods Grant 8,455,838 - Shadman , et al. June 4, 2	2013-06-04
Charged-particle energy analyzer Grant 8,421,030 - Shadman , et al. April 16, 2	2013-04-16
Multiple-column Electron Beam Apparatus And Methods App 20130001418 - SHADMAN; Khashayar ; et al.	2013-01-03
Background Reduction System Including Louver App 20130001417 - Nasser-Ghodsi; Mehran ; et al.	2013-01-03
Apparatus And Methods For Forming An Electrical Conduction Path Through An Insulating Layer App 20120298879 - PLETTNER; Tomas ; et al.	2012-11-29
In-situ differential spectroscopy Grant 8,283,631 - Vaez-Iravani , et al. October 9, 2	2012-10-09
Transverse focusing action in hyperbolic field detectors Grant 8,237,120 - Toth , et al. August 7, 2	2012-08-07
Methods and apparatus for electron beam assisted etching at low temperatures Grant 8,202,440 - Nasser-Ghodsi , et al. June 19, 2	2012-06-19
Electron generation and delivery system for contamination sensitive emitters Grant 8,188,451 - Nasser-Ghodsi May 29, 2	2012-05-29
Use of ion implantation in chemical etching Grant 8,008,207 - Yu , et al. August 30, 2	2011-08-30
Charged-particle Energy Analyzer App 20110168886 - Shadman; Khashayar ; et al.	2011-07-14
Tungsten plug deposition quality evaluation method by EBACE technology Grant 7,945,086 - Gotkis , et al. May 17, 2	2011-05-17
Contamination pinning for auger analysis Grant 7,855,362 - Brodie , et al. December 21, 2	2010-12-21
Apparatus and method for e-beam dark imaging with perspective control Grant 7,838,833 - Lent , et al. November 23, 2	2010-11-23
Sharpening metal carbide emitters Grant 7,828,622 - Brodie , et al. November 9, 2	2010-11-09
Auger electron spectrometer with applied magnetic field at target surface Grant 7,755,042 - Toth , et al. July 13, 2	2010-07-13
Method and instrument for chemical defect characterization in high vacuum Grant 7,635,842 - Nasser-Ghodsi , et al. December 22, 2	2009-12-22
Transverse magnetic field voltage isolator Grant 7,612,348 - Gubbens , et al. November 3, 2	2009-11-03
Charged particle microscopy using super resolution Grant 7,598,492 - Krzeczowski , et al. October 6, 2	2009-10-06
Calibration standard for a dual beam (FIB/SEM) machine Grant 7,576,317 - Tortonese , et al. August 18, 2	2009-08-18
Tungsten Plug Deposition Quality Evaluation Method By Ebace Technology App 20090010526 - Gotkis; Yehiel ; et al.	2009-01-08
Methods And Systems For Measuring A Characteristic Of A Substrate Or Preparing A Substrate For Analysis App 20080264905 - Nasser-Ghodsi; Mehran ; et al.	2008-10-30
Methods and systems for creating a recipe for a defect review process Grant 7,440,086 - Borowicz , et al. October 21, 2	2008-10-21
Method And Instrument For Chemical Defect Characterization In High Vacuum App 20080197277 - Nasser-Ghodsi; Mehran ; et al.	2008-08-21
Transverse magnetic field voltage isolator Grant 7,394,339 - Gubbens , et al. July 1, 2	2008-07-01
Calibration standard for a dual beam (FIB/SEM) machine Grant 7,372,016 - Tortonese , et al. May 13, 2	2008-05-13
Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis Grant 7,365,321 - Nasser-Ghodsi , et al. April 29, 2	2008-04-29
Use Of Ion Implantation In Chemical Etching App 20070264831 - Yu; Ming Lun ; et al.	2007-11-15
Etch Selectivity Enhancement In Electron Beam Activated Chemical Etch App 20070158304 - Nasser-Ghodsi; Mehran ; et al.	2007-07-12
Structural Modification Using Electron Beam Activated Chemical Etch App 20070158303 - NASSER-GHODSI; MEHRAN ; et al.	2007-07-12
Three-dimensional Imaging Using Electron Beam Activated Chemical Etch App 20070158562 - NASSER-GHODSI; MEHRAN ; et al.	2007-07-12
Methods and Systems for Creating a Recipe for a Defect Review Process App 20070067134 - Borowicz; S. Mark ; et al.	2007-03-22
Methods and systems for preparing a copper containing substrate for analysis Grant 7,148,073 - Soltz , et al. December 12, 2	2006-12-12
Integrated electron beam and contaminant removal system Grant 7,078,689 - Adler , et al. July 18, 2	2006-07-18
Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis App 20050221229 - Nasser-Ghodsi, Mehran ; et al.	2005-10-06
Methods and apparatus for electron beam inspection of samples Grant 6,943,350 - Nasser-Ghodsi , et al. September 13, 2	2005-09-13
Methods and apparatus for dishing and erosion characterization Grant 6,810,105 - Nasser-Ghodsi , et al. October 26, 2	2004-10-26
Methods and apparatus for void characterization Grant 6,801,596 - Nasser-Ghodsi , et al. October 5, 2	2004-10-05
Methods and apparatus for electron beam inspection of samples App 20040041095 - Nasser-Ghodsi, Mehran ; et al.	2004-03-04
Method and apparatus for endpoint detection in electron beam assisted etching App 20040043621 - Nasser-Ghodsi, Mehran	2004-03-04
Methods and apparatus for electron beam inspection of samples Grant 6,677,586 - Nasser-Ghodsi , et al. January 13, 2	2004-01-13
Methods and apparatus for defect localization Grant 6,664,541 - Nasser-Ghodsi , et al. December 16, 2	2003-12-16
Methods and apparatus for dishing and erosion characterization App 20030142782 - Nasser-Ghodsi, Mehran ; et al.	2003-07-31
Methods and apparatus for defect localization App 20030062477 - Nasser-Ghodsi, Mehran ; et al.	2003-04-03
Methods and apparatus for void characterization App 20030063705 - Nasser-Ghodsi, Mehran ; et al.	2003-04-03
Ion implantation with charge neutralization Grant 6,271,529 - Farley , et al. August 7, 2	2001-08-07
Ion source Grant 6,184,532 - Dudnikov , et al. February 6, 2	2001-02-06
Broad range ion implanter Grant 5,907,158 - Nasser-Ghodsi , et al. May 25, 1	1999-05-25