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Patent applications and USPTO patent grants for NASALEVICH; Maxim Aleksandrovich.The latest application filed is for "pellicle and pellicle assembly".
Patent | Date |
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Pellicle And Pellicle Assembly App 20220252974 - VLES; David Ferdinand ;   et al. | 2022-08-11 |
Metal-silicide-nitridation For Stress Reduction App 20220187701 - VAN ZWOL; Pieter-Jan ;   et al. | 2022-06-16 |
Pellicle and pellicle assembly Grant 11,347,142 - Vles , et al. May 31, 2 | 2022-05-31 |
Pellicle frame and pellicle assembly Grant 11,314,163 - Duys , et al. April 26, 2 | 2022-04-26 |
Pellicle And Pellicle Assembly App 20220121111 - VLES; David Ferdinand ;   et al. | 2022-04-21 |
Metal-silicide-nitridation for stress reduction Grant 11,287,737 - Van Zwol , et al. March 29, 2 | 2022-03-29 |
Cooling apparatus and plasma-cleaning station for cooling apparatus Grant 11,287,752 - Koevoets , et al. March 29, 2 | 2022-03-29 |
Cooling apparatus and plasma-cleaning station for cooling apparatus Grant 11,231,657 - Koevoets , et al. January 25, 2 | 2022-01-25 |
Pellicle and pellicle assembly Grant 11,231,646 - Vles , et al. January 25, 2 | 2022-01-25 |
Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off Grant 11,143,975 - Nikipelov , et al. October 12, 2 | 2021-10-12 |
Pellicle For Euv Lithography App 20210240070 - DE GRAAF; Dennis ;   et al. | 2021-08-05 |
Pellicle And Pellicle Assembly App 20210208500 - VLES; David Ferdinand ;   et al. | 2021-07-08 |
Metal-silicide-nitridation For Stress Reduction App 20210181618 - VAN ZWOL; Pieter-Jan ;   et al. | 2021-06-17 |
A Lithographic Apparatus Comprising An Object With An Upper Layer Having Improved Resistance To Peeling Off App 20210132517 - NIKIPELOV; Andrey ;   et al. | 2021-05-06 |
Pellicle and pellicle assembly Grant 10,983,431 - Vles , et al. April 20, 2 | 2021-04-20 |
Membrane For Euv Lithography App 20210109438 - Nasalevich; Maxim Aleksandrovich ;   et al. | 2021-04-15 |
Sensor mark and a method of manufacturing a sensor mark Grant 10,976,196 - Klugkist , et al. April 13, 2 | 2021-04-13 |
Membrane for EUV lithography Grant 10,908,496 - Nasalevich , et al. February 2, 2 | 2021-02-02 |
Graphene Pellicle Lithographic Apparatus App 20200406244 - KURGANOVA; Evgenia ;   et al. | 2020-12-31 |
Pellicle Frame And Pellicle Assembly App 20200319546 - DUYS; Anton Wilhelmus ;   et al. | 2020-10-08 |
Cooling Apparatus And Plasma-cleaning Station For Cooling Apparatus App 20200233319 - Koevoets; Adrianus, Hendrik ;   et al. | 2020-07-23 |
Pellicle And Pellicle Assembly App 20200209736 - VLES; David Ferdinand ;   et al. | 2020-07-02 |
Simultaneous Double-side Coating Of Multilayer Graphene Pellicle By Local Thermal Processing App 20200159107 - KURGANOVA; Evgenia ;   et al. | 2020-05-21 |
Sensor Mark And A Method Of Manufacturing A Sensor Mark App 20200064183 - KLUGKIST; Joost Andre ;   et al. | 2020-02-27 |
Pellicle And Pellicle Assembly App 20200064731 - VLES; David Ferdinand ;   et al. | 2020-02-27 |
Pellicle and pellicle assembly Grant 10,466,585 - Vles , et al. No | 2019-11-05 |
A Membrane For Euv Lithography App 20190129299 - NASALEVICH; Maxim Aleksandrovich ;   et al. | 2019-05-02 |
Method Of Manufacturing A Pellicle For A Lithographic Apparatus, A Pellicle For A Lithographic Apparatus, A Lithographic Apparatus, A Device Manufacturing Method, An Apparatus For Processing A Pellicle, And A Method For Processing A Pellicle App 20190056654 - PETER; Maria ;   et al. | 2019-02-21 |
Pellicle And Pellicle Assembly App 20180364561 - VLES; David Ferdinand ;   et al. | 2018-12-20 |
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