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Substrate cleaning method and substrate cleaning device Grant 9,209,010 - Matsui , et al. December 8, 2 | 2015-12-08 |
Substrate wiring method and semiconductor manufacturing device Grant 8,940,638 - Hoshino , et al. January 27, 2 | 2015-01-27 |
Method And Apparatus For Forming Dielectric Film Of Low-dielectric Constant And Method For Detaching Porogen App 20140134852 - IZAWA; Yusaku ;   et al. | 2014-05-15 |
Cluster Beam Generating Apparatus, Substrate Processing Apparatus, Cluster Beam Generating Method, And Substrate Processing Method App 20140083976 - TOYODA; Noriaki ;   et al. | 2014-03-27 |
Input switching apparatus and input switching method of audio/video signal, and audio/video system Grant 8,635,655 - Narushima January 21, 2 | 2014-01-21 |
Thin Film Forming Device For Solar Cell And Thin Film Forming Method App 20130295751 - Kato; Takamasa ;   et al. | 2013-11-07 |
Input Switching Apparatus and Input Switching Method of Audio/Video Signal, and Audio/Video System App 20130086622 - NARUSHIMA; Masaki | 2013-04-04 |
Substrate Cleaning Method And Substrate Cleaning Device App 20130056033 - Matsui; Hidefumi ;   et al. | 2013-03-07 |
Substrate Cleaning Method And Semiconductor Manufacturing Apparatus App 20130056024 - Hoshino; Satohiko ;   et al. | 2013-03-07 |
Substrate Wiring Method And Semiconductor Manufacturing Device App 20130040459 - Hoshino; Satohiko ;   et al. | 2013-02-14 |
Cluster Beam Generating Apparatus, Substrate Processing Apparatus, Cluster Beam Generating Method, And Substrate Processing Method App 20120125889 - TOYODA; Noriaki ;   et al. | 2012-05-24 |
Surface Processing Method And Surface Processing Apparatus App 20120128892 - TOYODA; Noriaki ;   et al. | 2012-05-24 |
Charged particle separation apparatus and charged particle bombardment apparatus Grant 8,168,946 - Narushima , et al. May 1, 2 | 2012-05-01 |
Charged Particle Separation Apparatus And Charged Particle Bombardment Apparatus App 20100319545 - NARUSHIMA; MASAKI ;   et al. | 2010-12-23 |
Charged Particle Separation Apparatus And Charged Particle Bombardment Apparatus App 20100320380 - Narushima; Masaki ;   et al. | 2010-12-23 |
Semiconductor Manufacturing Apparatus, Semiconductor Device Manufacturing Method, Storage Medium And Computer Program App 20100099254 - Narushima; Masaki ;   et al. | 2010-04-22 |
Heat Treatment Method And Heat Treatment Apparatus App 20090325393 - Miyoshi; Hidenori ;   et al. | 2009-12-31 |
Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device Grant 7,393,172 - Saeki , et al. July 1, 2 | 2008-07-01 |
Vacuum process system Grant 7,198,448 - Ozawa , et al. April 3, 2 | 2007-04-03 |
Vacuum process system App 20060182539 - Ozawa; Jun ;   et al. | 2006-08-17 |
Semiconductor processing system Grant 7,090,741 - Narushima , et al. August 15, 2 | 2006-08-15 |
Deposition method App 20060099348 - Narushima; Masaki ;   et al. | 2006-05-11 |
Film formation method App 20060084266 - Narushima; Masaki ;   et al. | 2006-04-20 |
Vacuum process system Grant 7,025,554 - Ozawa , et al. April 11, 2 | 2006-04-11 |
Ceramic heater system and substrate processing apparatus having the same installed therein Grant 6,951,587 - Narushima October 4, 2 | 2005-10-04 |
Semiconductor processing system App 20050006230 - Narushima, Masaki ;   et al. | 2005-01-13 |
Processing apparatus Grant 6,802,934 - Saeki , et al. October 12, 2 | 2004-10-12 |
Vacuum process system App 20040105737 - Ozawa, Jun ;   et al. | 2004-06-03 |
Alignment processing mechanism and semiconductor processing device using it Grant 6,702,865 - Ozawa , et al. March 9, 2 | 2004-03-09 |
Processing apparatus App 20030136515 - Saeki, Hiroaki ;   et al. | 2003-07-24 |
Processing apparatus App 20020020355 - Saeki, Hiroaki ;   et al. | 2002-02-21 |
Multi-chamber system provided with carrier units Grant 5,474,410 - Ozawa , et al. December 12, 1 | 1995-12-12 |
Surface processing apparatus Grant 5,332,442 - Kubodera , et al. July 26, 1 | 1994-07-26 |
Method for holding a plate-like member Grant 5,065,495 - Narushima , et al. November 19, 1 | 1991-11-19 |
Plate-like member receiving apparatus Grant 4,955,590 - Narushima , et al. September 11, 1 | 1990-09-11 |