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Gas supply device, gas supply method and film forming method
Grant 11,155,923 - Yamaguchi , et al. October 26, 2 | 2021-10-26 |
Raw Material Supply Apparatus And Film Forming Apparatus
App 20210324513 - KIMOTO; Tomohisa ; et al. | 2021-10-21 |
Film forming method
Grant 10,910,225 - Narushima , et al. February 2, 2 | 2021-02-02 |
Substrate Processing Method And Substrate Processing Apparatus
App 20210010130 - NARUSHIMA; Kensaku ; et al. | 2021-01-14 |
Film forming method and film forming apparatus
Grant 10,872,814 - Narushima , et al. December 22, 2 | 2020-12-22 |
Gas supply method and film forming method
Grant 10,870,919 - Yamaguchi , et al. December 22, 2 | 2020-12-22 |
Film forming method
Grant 10,829,854 - Narushima , et al. November 10, 2 | 2020-11-10 |
Substrate Processing Method and Film Forming System
App 20200258747 - A1 | 2020-08-13 |
Film Forming Method And Film Forming Apparatus
App 20200098624 - NARUSHIMA; Kensaku ; et al. | 2020-03-26 |
Method of Forming Tungsten Film and Controller
App 20190292656 - NARUSHIMA; Kensaku ; et al. | 2019-09-26 |
Flow Rate Control Method, Flow Rate Control Device, And Film Forming Apparatus
App 20190284698 - MO; Kennan ; et al. | 2019-09-19 |
Method of filling recesses in substrate with tungsten
Grant 10,316,410 - Narushima , et al. | 2019-06-11 |
Film Forming Method
App 20190164768 - NARUSHIMA; Kensaku ; et al. | 2019-05-30 |
Raw material gas supply apparatus, raw material gas supply method and storage medium
Grant 10,256,101 - Yagi , et al. | 2019-04-09 |
Film formation device
Grant 10,221,478 - Narushima , et al. | 2019-03-05 |
Gas Supply Device, Gas Supply Method And Film Forming Method
App 20180251894 - YAMAGUCHI; Katsumasa ; et al. | 2018-09-06 |
Gas Supply Device, Gas Supply Method And Film Forming Method
App 20180251898 - Yamaguchi; Katsumasa ; et al. | 2018-09-06 |
Film Forming Method
App 20180237911 - NARUSHIMA; Kensaku ; et al. | 2018-08-23 |
Method of Filling Recesses in Substrate with Tungsten
App 20180073141 - NARUSHIMA; Kensaku ; et al. | 2018-03-15 |
Etching method, etching apparatus and storage medium
Grant 9,646,848 - Toda , et al. May 9, 2 | 2017-05-09 |
Raw Material Gas Supply Apparatus, Raw Material Gas Supply Method And Storage Medium
App 20170092549 - YAGI; Hironori ; et al. | 2017-03-30 |
Tungsten film forming method
Grant 9,536,745 - Narushima , et al. January 3, 2 | 2017-01-03 |
Tungsten Film Forming Method
App 20160233099 - NARUSHIMA; Kensaku ; et al. | 2016-08-11 |
Etching method, storage medium and etching apparatus
Grant 9,390,933 - Narushima , et al. July 12, 2 | 2016-07-12 |
Film Formation Device
App 20160083837 - NARUSHIMA; Kensaku ; et al. | 2016-03-24 |
Etching Method, Etching Apparatus And Storage Medium
App 20160005621 - TODA; Satoshi ; et al. | 2016-01-07 |
Film Deposition Apparatus, Film Deposition Method, And Computer-readable Storage Medium
App 20150184294 - KATO; Hitoshi ; et al. | 2015-07-02 |
Etching Method, Storage Medium And Etching Apparatus
App 20150187593 - NARUSHIMA; Kensaku ; et al. | 2015-07-02 |
Film-forming method and film-forming apparatus
Grant 8,334,208 - Narushima December 18, 2 | 2012-12-18 |
Ti-based film forming method and storage medium
Grant 8,263,181 - Narushima , et al. September 11, 2 | 2012-09-11 |
Ti-containing film formation method and storage medium
Grant 8,257,790 - Narushima , et al. September 4, 2 | 2012-09-04 |
Surface Treatment Method, Shower Head, Processing Container, And Processing Apparatus Using Them
App 20120115400 - KAKEGAWA; Takashi ; et al. | 2012-05-10 |
Method For Forming Metal Nitride Film
App 20120034793 - Narushima; Kensaku ; et al. | 2012-02-09 |
Film-forming Method And Film-forming Apparatus
App 20110237076 - NARUSHIMA; Kensaku | 2011-09-29 |
Film forming method and substrate processing apparatus
Grant 7,981,794 - Narushima , et al. July 19, 2 | 2011-07-19 |
Film Deposition Apparatus, Film Deposition Method, And Computer-readable Storage Medium
App 20110159188 - Kato; Hitoshi ; et al. | 2011-06-30 |
Surface Treatment Method, Shower Head, Processing Container, And Processing Apparatus Using Them
App 20110061432 - KAKEGAWA; Takashi ; et al. | 2011-03-17 |
Gas treatment method and computer readable storage medium
Grant 7,906,442 - Narushima , et al. March 15, 2 | 2011-03-15 |
Film Forming Method And Substrate Processing Apparatus
App 20100304561 - Narushima; Kensaku ; et al. | 2010-12-02 |
Film Formation Method And Apparatus Utilizing Plasma Cvd
App 20100240216 - TADA; Kunihiro ; et al. | 2010-09-23 |
METHOD FOR FORMING Ti-BASED FILM AND STORAGE MEDIUM
App 20100227062 - Narushima; Kensaku ; et al. | 2010-09-09 |
Method For Forming Ti Film And Tin Film, Contact Structure, Computer Readable Storage Medium And Computer Program
App 20100216304 - Tada; Kunihiro ; et al. | 2010-08-26 |
Method for forming Ti film and TiN film, contact structure, computer readable storing medium and computer program
Grant 7,737,005 - Tada , et al. June 15, 2 | 2010-06-15 |
Gas Treatment Method And Computer Readable Storage Medium
App 20100081292 - Narushima; Kensaku ; et al. | 2010-04-01 |
Ti-BASED FILM FORMING METHOD AND STORAGE MEDIUM
App 20090208650 - NARUSHIMA; Kensaku ; et al. | 2009-08-20 |
Method for Forming Ti Film and Tin Film, Contact Structure, Computer Readable Storing Medium and Computer Program
App 20070257372 - Tada; Kunihiro ; et al. | 2007-11-08 |
Gas Supplying unit and substrate processing apparatus
App 20070131168 - Gomi; Hisashi ; et al. | 2007-06-14 |
Film formation method
App 20060127601 - Murakami; Seishi ; et al. | 2006-06-15 |
Film formation method and apparatus utilizing plasma CVD
App 20050233093 - Tada, Kunihiro ; et al. | 2005-10-20 |
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