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Lithium oxygen battery and electrolyte composition Grant 10,957,953 - Kang , et al. March 23, 2 | 2021-03-23 |
Water-Repellent Protective Film Forming Agent, Liquid Chemical for Forming Water-Repellent Protective Film, and Wafer Cleaning Method App 20190074173 - FUKUI; Yuki ;   et al. | 2019-03-07 |
Fluorinated sulfonate esters of aryl ketones for non-ionic photo-acid generators Grant 9,983,475 - Ishimaru , et al. May 29, 2 | 2018-05-29 |
Non-ionic aryl ketone based polymeric photo-acid generators Grant 9,951,164 - Ishimaru , et al. April 24, 2 | 2018-04-24 |
Non-ionic low diffusing photo-acid generators Grant 9,950,999 - Ishimaru , et al. April 24, 2 | 2018-04-24 |
Non-ionic Low Diffusing Photo-acid Generators App 20180044284 - Ishimaru; Takehisa ;   et al. | 2018-02-15 |
Fluorinated Sulfonate Esters Of Aryl Ketones For Non-ionic Photo-acid Generators App 20180046077 - Ishimaru; Takehisa ;   et al. | 2018-02-15 |
Non-ionic Aryl Ketone Based Polymeric Photo-acid Generators App 20180044459 - Ishimaru; Takehisa ;   et al. | 2018-02-15 |
Lithium Oxygen Battery And Electrolyte Composition App 20170222290 - Kang; Seok J. ;   et al. | 2017-08-03 |
Lithium oxygen battery and electrolyte composition Grant 9,666,918 - Kang , et al. May 30, 2 | 2017-05-30 |
Fluorine-containing sulfonic acid salt, fluorine-containing sulfonic acid salt resin, resist composition, and pattern forming method using same Grant 9,488,914 - Mori , et al. November 8, 2 | 2016-11-08 |
Non-ionic photo-acid generating polymers for resist applications Grant 9,244,345 - Ishimaru , et al. January 26, 2 | 2016-01-26 |
Fluorine-containing sulfonate resin, fluorine-containing N-sulfonyloxyimide resin, resist composition and pattern formation method Grant 9,221,928 - Kato , et al. December 29, 2 | 2015-12-29 |
Polymerizable fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern-forming method using same Grant 9,182,664 - Takihana , et al. November 10, 2 | 2015-11-10 |
Fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern formation method Grant 9,152,045 - Mori , et al. October 6, 2 | 2015-10-06 |
Lithium Oxygen Battery And Electrolyte Composition App 20150280296 - Kang; Seok J. ;   et al. | 2015-10-01 |
Fluorine-Containing Sulfonic Acid Salt, Fluorine-Containing Sulfonic Acid Salt Resin, Resist Composition, and Pattern Forming Method Using Same App 20150198879 - Mori; Kazunori ;   et al. | 2015-07-16 |
Ammonium fluoroalkanesulfonates and a synthesis method therefor Grant 9,024,058 - Nagamori , et al. May 5, 2 | 2015-05-05 |
Fluorine-containing sulfonic acid salts, photo-acid generator and resist composition and pattern formation method utilizing same Grant 8,993,212 - Takihana , et al. March 31, 2 | 2015-03-31 |
Sulfonic acid salt and derivative thereof, photo-acid generator, and process for production of sulfonic acid salt Grant 8,889,888 - Nagamori , et al. November 18, 2 | 2014-11-18 |
Fluoroalkanesulfonic acid ammonium salts and method for producing same Grant 8,877,960 - Nagamori , et al. November 4, 2 | 2014-11-04 |
Method for producing alkoxycarbonylfluoroalkanesulfonic acid salt Grant 8,846,966 - Hagiwara , et al. September 30, 2 | 2014-09-30 |
Fluorine-Containing Sulfonate, Fluorine-Containing Sulfonate Resin, Resist Composition and Pattern Formation Method App 20140287359 - MORI; Kazunori ;   et al. | 2014-09-25 |
Fluorinated dicarboxylic acid derivative and polymer obtained therefrom Grant 8,809,451 - Isono , et al. August 19, 2 | 2014-08-19 |
Fluorine-containing sulfonate, fluorine-containing sulfonate resin, resist composition and pattern formation method Grant 8,791,293 - Mori , et al. July 29, 2 | 2014-07-29 |
2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt and method for producing the same Grant 8,748,672 - Hagiwara , et al. June 10, 2 | 2014-06-10 |
Fluorine-containing compound, fluorine-containing polymer compound, resist composition, top coat composition and pattern formation method Grant 8,686,098 - Mori , et al. April 1, 2 | 2014-04-01 |
Top coating composition Grant 8,663,903 - Maeda , et al. March 4, 2 | 2014-03-04 |
Fluorine-containing sulfonates having polymerizable anions and manufacturing method therefor, fluorine-containing resins, resist compositions, and pattern-forming method using same Grant 8,663,897 - Masubuchi , et al. March 4, 2 | 2014-03-04 |
2-(Alkylcarbonyloxy)-1, 1-Difluoroethanesulfonic Acid Salt and Method for Producing the Same App 20130317250 - HAGIWARA; Yuji ;   et al. | 2013-11-28 |
Fluorine-containing compound, fluorine-containing polymer compound, resist composition and patterning method using same Grant 8,592,540 - Mori , et al. November 26, 2 | 2013-11-26 |
Polymerizable fluorine-containing compound Grant 8,592,622 - Isono , et al. November 26, 2 | 2013-11-26 |
Salt having fluorine-containing carbanion structure, derivative thereof, photoacid generator, resist material using the photoacid generator, and pattern forming method Grant 8,580,486 - Nagamori , et al. November 12, 2 | 2013-11-12 |
2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt and method for producing the same Grant 8,581,009 - Hagiwara , et al. November 12, 2 | 2013-11-12 |
Water Repellent Additive for Immersion Resist App 20130216960 - MAEDA; Kazuhiko ;   et al. | 2013-08-22 |
Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same Grant 8,513,457 - Isono , et al. August 20, 2 | 2013-08-20 |
Fluorine-Containing Sulfonic Acid Salts, Photo-Acid Generator And Resist Composition And Pattern Formation Method Utilizing Same App 20130209938 - Takihana; Ryozo ;   et al. | 2013-08-15 |
Polymerizable Fluorine-Containing Sulfonate, Fluorine-Containing Sulfonate Resin, Resist Composition And Pattern-Forming Method Using Same App 20130209937 - Takihana; Ryozo ;   et al. | 2013-08-15 |
Compound for Photoacid Generator, Resist Composition Using the Same, and Pattern-Forming Method App 20130130175 - HAGIWARA; Yuji ;   et al. | 2013-05-23 |
Compound for photoacid generator, resist composition using the same, and pattern-forming method Grant 8,435,717 - Hagiwara , et al. May 7, 2 | 2013-05-07 |
Fluorinated Diamine and Polymer Formed Therefrom App 20130085237 - NARIZUKA; Satoru ;   et al. | 2013-04-04 |
Fluorine-Containing Sulfonate, Fluorine-Containing Sulfonate Resin, Resist Composition and Pattern Formation Method App 20130065182 - MORI; Kazunori ;   et al. | 2013-03-14 |
Fluorine-Containing Sulfonate Resin, Fluorine-Containing N-Sulfonyloxyimide Resin, Resist Composition and Pattern Formation Method App 20120328985 - KATO; Misugi ;   et al. | 2012-12-27 |
Fluorine-Containing Sulfonate Resin, Resist Composition and Pattern Formation Method App 20120322006 - KATO; Misugi ;   et al. | 2012-12-20 |
Fluorine-containing dicarboxylic acids and their novel polymer compounds Grant 8,304,508 - Narizuka , et al. November 6, 2 | 2012-11-06 |
Sulfonic acid salt and derivative thereof, photoacid generator agent, and resist material and pattern formation method using the photoacid generator agent Grant 8,283,106 - Maeda , et al. October 9, 2 | 2012-10-09 |
Fluorine-Containing Compound, Fluorine-Containing Polymer, Negative-Type Resist Composition, and Patterning Process Using Same App 20120226070 - ISONO; Yoshimi ;   et al. | 2012-09-06 |
Processes for production of 2-bromo-2,2-difluoroethanol and 2-(alkylcarbonyloxy)-1, 1-difluoroethanesulfonic acid salt Grant 8,222,448 - Jodry , et al. July 17, 2 | 2012-07-17 |
Fluorine-containing compound, fluorine-containing polymer, negative-type resist composition, and patterning process using same Grant 8,187,787 - Isono , et al. May 29, 2 | 2012-05-29 |
Fluorine-Containing Compound, Fluorine-Containing Polymer Compound, Resist Composition, Top Coat Composition And Pattern Formation Method App 20120077126 - Mori; Kazunori ;   et al. | 2012-03-29 |
Water Repellent Additive for Immersion Resist App 20120064459 - Maeda; Kazuhiko ;   et al. | 2012-03-15 |
Top Coating Composition App 20120040294 - Maeda; Kazuhiko ;   et al. | 2012-02-16 |
Processes for production of 2-bromo-2,2-difluoroethanol and 2-(alkylcarbonyloxy)-1,1-difluoroethanesulfonic acid salt Grant 8,110,711 - Jodry , et al. February 7, 2 | 2012-02-07 |
Ammonium Fluoroalkanesulfonates and a Synthesis Method Therefor App 20120004447 - Nagamori; Masashi ;   et al. | 2012-01-05 |
Processes for Production of 2-Bromo-2,2-Difluoroethanol and 2-(Alkylcarbonyloxy)-1, 1-Difluoroethanesulfonic Acid Salt App 20110319652 - Jodry; Jonathan Joachim ;   et al. | 2011-12-29 |
Fluorine-Containing Compound, Fluorine-Containing Polymer Compound, Resist Composition and Patterning Method Using Same App 20110318542 - Mori; Kazunori ;   et al. | 2011-12-29 |
Fluoroalkanesulfonic Acid Ammonium Salts and Method for Producing Same App 20110313190 - Nagamori; Masashi ;   et al. | 2011-12-22 |
Fluorinated Dicarboxylic Acid Derivative and Polymer Obtained Therefrom App 20110301305 - Isono; Yoshimi ;   et al. | 2011-12-08 |
Fluorine-Containing Dicarboxylic Acids and Their Novel Polymer Compounds App 20110282026 - NARIZUKA; Satoru ;   et al. | 2011-11-17 |
Method for Producing Alkoxycarbonylfluoroalkanesulfonic Acid Salt App 20110207954 - Hagiwara; Yuji ;   et al. | 2011-08-25 |
Fluorine-containing dicarboxylic acids and their novel polymer compounds Grant 8,003,749 - Narizuka , et al. August 23, 2 | 2011-08-23 |
Fluorine-Containing Sulfonates Having Polymerizable Anions and Manufacturing Method Therefor, Fluorine-Containing Resins, Resist Compositions, and Pattern-Forming Method Using Same App 20110177453 - Masubuchi; Takashi ;   et al. | 2011-07-21 |
Polymerizable sulfonic acid onium salt and resin Grant 7,956,142 - Nagai , et al. June 7, 2 | 2011-06-07 |
Novel Sulfonic Acid Salt and Derivative thereof, Photo-Acid Generator, and Process for Production of Sulfonic Acid Salt App 20110112306 - Nagamori; Masashi ;   et al. | 2011-05-12 |
Polymerizable Fluorine-Containing Compound App 20110098500 - ISONO; Yoshimi ;   et al. | 2011-04-28 |
Fluorine-containing polymerizable monomer and polymer compound using same Grant 7,932,348 - Saegusa , et al. April 26, 2 | 2011-04-26 |
Novel Salt Having Fluorine-Containing Carbanion Structure, Derivative Thereof, Photoacid Generator, Resist Material Using the Photoacid Generator, and Pattern Forming Method App 20110070544 - Nagamori; Masashi ;   et al. | 2011-03-24 |
Positive-type resist composition Grant 7,906,269 - Isono , et al. March 15, 2 | 2011-03-15 |
Fluorine-containing compound, fluorine-containing polymer, postive-type resist composition, and patterning process using same Grant 7,887,990 - Isono , et al. February 15, 2 | 2011-02-15 |
2-(Alkylcarbonyloxy)-1, 1-Difluoroethanesulfonic Acid Salt and Method for Producing the Same App 20110034721 - Hagiwara; Yuji ;   et al. | 2011-02-10 |
Processes for Production of 2-Bromo-2,2-Difluoroethanol and 2-(Alkylcarbonyloxy)-1,1-Difluoroethanesulfonic Acid Salt App 20110015431 - Jodry; Jonathan Joachim ;   et al. | 2011-01-20 |
Novel Sulfonic Acid Salt and Derivative Thereof, Photoacid Generator Agent, and Resist Material and Pattern Formation Method Using the Photoacid Generator Agent App 20100304303 - Maeda; Kazuhiko ;   et al. | 2010-12-02 |
Fluorine-containing polymerizable monomer and polymer compound using same Grant 7,825,280 - Saegusa , et al. November 2, 2 | 2010-11-02 |
Fluorine-Containing Polymerizable Monomer and Polymer Compound Using Same App 20100234556 - SAEGUSA; Hiroshi ;   et al. | 2010-09-16 |
Fluorine-containing polymerizable monomer and polymer compound using same Grant 7,728,103 - Saegusa , et al. June 1, 2 | 2010-06-01 |
Polymerizable Sulfonic Acid Onium Salt And Resin App 20100063232 - Nagai; Tomoki ;   et al. | 2010-03-11 |
Compound for Photoacid Generator, Resist Composition Using the Same, and Pattern-Forming Method App 20100035185 - Hagiwara; Yuji ;   et al. | 2010-02-11 |
Fluorinated Diamine and Polymer Formed Therefrom App 20100029895 - Narizuka; Satoru ;   et al. | 2010-02-04 |
Fluorine-containing polymerizable monomer and polymer compound using same Grant 7,629,434 - Saegusa , et al. December 8, 2 | 2009-12-08 |
Fluorine-Containing Polymerizable Monomer and Polymer Compound Using Same App 20090292104 - Saegusa; Hiroshi ;   et al. | 2009-11-26 |
Positive-Type Resist Composition App 20090061353 - ISONO; Yoshimi ;   et al. | 2009-03-05 |
Novel Fluorine-containing Dicarboxylic Acids And Their Novel Polymer Compounds App 20090030173 - Narizuka; Satoru ;   et al. | 2009-01-29 |
Fluorine-containing polymerizable monomer and polymer compound using same App 20090023886 - Saegusa; Hiroshi ;   et al. | 2009-01-22 |
Fluorine-Containing Compound, Fluorine-Containing Polymer, Negative-Type Resist Composition, and Patterning Process Using Same App 20090011199 - Isono; Yoshimi ;   et al. | 2009-01-08 |
Fluorine-Containing Compound, Fluorine-Containing Polymer, Postive-Type Resist Composition, And Patterning Process Using Same App 20080311507 - ISONO; Yoshimi ;   et al. | 2008-12-18 |
Fluorine-Containing Polymerizable Monomer and Polymer Compound Using Same App 20080234460 - Saegusa; Hiroshi ;   et al. | 2008-09-25 |
Process for producing alkoxycarbonylfluoroalkanesulfonates Grant 7,414,148 - Fujiwara , et al. August 19, 2 | 2008-08-19 |
Process For Producing Alkoxycarbonylfluoroalkanesulfonates App 20080108846 - FUJIWARA; Masaki ;   et al. | 2008-05-08 |
Method for producing palladium complex compound Grant 6,878,663 - Kume , et al. April 12, 2 | 2005-04-12 |
Method for producing palladium complex compound Grant 6,706,905 - Kume , et al. March 16, 2 | 2004-03-16 |
Method for producing palladium complex compound App 20020111482 - Kume, Takashi ;   et al. | 2002-08-15 |
Process for producing trifluoromethylbenzylamines Grant 6,376,712 - Narizuka , et al. April 23, 2 | 2002-04-23 |
Process for producing trifluoromethylbenzylamines App 20020013500 - Narizuka, Satoru ;   et al. | 2002-01-31 |
Process for producing trifluoromethylbenzylamines App 20020007086 - Narizuka, Satoru ;   et al. | 2002-01-17 |