Nariman; Homi E.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nariman; Homi E..The latest application filed is for "methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same".

Company Profile

0.10.0

Nariman; Homi E. - Austin TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same Grant 6,972,853 - Stirton , et al. December 6, 2	2005-12-06
Method of monitoring anneal processes using scatterometry, and system for performing same Grant 6,933,158 - Lensing , et al. August 23, 2	2005-08-23
Structures for analyzing electromigration, and methods of using same Grant 6,927,080 - Nariman , et al. August 9, 2	2005-08-09
Method of using scatterometry for analysis of electromigration, and structures for performing same Grant 6,881,594 - Stirton , et al. April 19, 2	2005-04-19
Scatterometry structure with embedded ring oscillator, and methods of using same Grant 6,791,697 - Nariman September 14, 2	2004-09-14
Method of making a shaped gate electrode structure, and device comprising same Grant 6,767,835 - Nariman , et al. July 27, 2	2004-07-27
Method and structure for calibrating scatterometry-based metrology tool used to measure dimensions of features on a semiconductor device Grant 6,742,168 - Nariman May 25, 2	2004-05-25
Method of measuring implant profiles using scatterometric techniques wherein dispersion coefficients are varied based upon depth Grant 6,660,543 - Stirton , et al. December 9, 2	2003-12-09
High-reliability damascene interconnect formation for semiconductor fabrication Grant 6,157,081 - Nariman , et al. December 5, 2	2000-12-05
Semiconductor device having self-aligned asymmetric source/drain regions and method of fabrication thereof Grant 6,146,952 - Nariman , et al. November 14, 2	2000-11-14

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