Narasimhan; Murali K.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Narasimhan; Murali K..The latest application filed is for "cobalt deposition on barrier surfaces".
- Narasimhan; Murali K. - San Jose CA
- - San Jose CA US
| Patent | Date |
|---|---|
| Cobalt deposition on barrier surfaces Grant 9,209,074 - Lu , et al. December 8, 2 | 2015-12-08 |
| Cobalt Deposition On Barrier Surfaces App 20150255333 - LU; Jiang ; et al. | 2015-09-10 |
| Cobalt deposition on barrier surfaces Grant 9,051,641 - Lu , et al. June 9, 2 | 2015-06-09 |
| High temperature tungsten metallization process Grant 8,835,311 - Collins , et al. September 16, 2 | 2014-09-16 |
| High Temperature Tungsten Metallization Process App 20140187038 - COLLINS; Joshua ; et al. | 2014-07-03 |
| Cu surface plasma treatment to improve gapfill window Grant 8,764,961 - Luo , et al. July 1, 2 | 2014-07-01 |
| Apparatus For Providing Plasma To A Process Chamber App 20140165911 - KAO; CHIEN-TEH ; et al. | 2014-06-19 |
| Methods for contact clean Grant 8,642,473 - Chang , et al. February 4, 2 | 2014-02-04 |
| High temperature tungsten metallization process Grant 8,617,985 - Collins , et al. December 31, 2 | 2013-12-31 |
| High temperature tungsten metallization process Grant 08617985 - | 2013-12-31 |
| High Temperature Tungsten Metallization Process App 20130109172 - COLLINS; JOSHUA ; et al. | 2013-05-02 |
| In-situ Clean Process For Metal Deposition Chambers App 20120237693 - Jackson; Michael ; et al. | 2012-09-20 |
| Pre-clean Chamber With Reduced Ion Current App 20110315319 - FORSTER; JOHN C. ; et al. | 2011-12-29 |
| Cu Surface Plasma Treatment To Improve Gapfill Window App 20100096273 - Luo; Qian ; et al. | 2010-04-22 |
| Cobalt Deposition On Barrier Surfaces App 20090053426 - LU; JIANG ; et al. | 2009-02-26 |
| Process and apparatus for integrating sheet resistance measurements and reflectance measurements of a thin film in a common apparatus Grant 7,050,160 - Johnson , et al. May 23, 2 | 2006-05-23 |
| Continuous process for forming improved titanium nitride barrier layers Grant 5,972,178 - Narasimhan , et al. October 26, 1 | 1999-10-26 |
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