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Processing System And Device Manufacturing Method App 20190177105 - KITO; Yoshiaki ;   et al. | 2019-06-13 |
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Display Element Manufacturing Method And Manufacturing Apparatus App 20180158740 - HAMADA; Tomohide ;   et al. | 2018-06-07 |
Method For Manufacturing Wiring Pattern, Method For Manufacturing Transistor, And Member For Transfer App 20180108539 - NAKAZUMI; Makoto ;   et al. | 2018-04-19 |
Display element manufacturing method and manufacturing apparatus Grant 9,917,023 - Hamada , et al. March 13, 2 | 2018-03-13 |
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Method for manufacturing display element, manufacturing apparatus of display element and display device Grant 9,310,656 - Nara , et al. April 12, 2 | 2016-04-12 |
Flexible substrate, manufacturing method of display element, and manufacturing apparatus of display element Grant 9,178,155 - Nara , et al. November 3, 2 | 2015-11-03 |
Display Element Manufacturing Method And Manufacturing Apparatus App 20150311128 - HAMADA; Tomohide ;   et al. | 2015-10-29 |
Method and apparatus for manufacturing display devices Grant 9,172,063 - Hamada , et al. October 27, 2 | 2015-10-27 |
Display element manufacturing method and manufacturing apparatus Grant 9,086,585 - Hamada , et al. July 21, 2 | 2015-07-21 |
Defect detection method of display device and defect detection apparatus of display device Grant 8,926,387 - Nara , et al. January 6, 2 | 2015-01-06 |
Exposure method, exposure apparatus, and method for producing device with plurality of projection optical systems and pattern having first partial pattern area and second partial area having overlaid area with first partial pattern area Grant 8,917,378 - Nara December 23, 2 | 2014-12-23 |
Method For Manufacturing Display Element, Manufacturing Apparatus Of Display Element And Display Device App 20130224894 - NARA; Kei ;   et al. | 2013-08-29 |
Exposure method, exposure device, and micro device manufacturing method Grant 8,456,617 - Nara June 4, 2 | 2013-06-04 |
Method for manufacturing display element, manufacturing apparatus of display element and display device Grant 8,432,528 - Nara , et al. April 30, 2 | 2013-04-30 |
Pattern Formation Method App 20130078389 - NARA; Kei ;   et al. | 2013-03-28 |
Defect Detection Method Of Display Device And Defect Detection Apparatus Of Display Device App 20130065472 - NARA; Kei ;   et al. | 2013-03-14 |
Display element manufacturing method and manufacturing apparatus, thin film transistor manufacturing method and manufacturing apparatus, and circuit forming apparatus Grant 8,349,672 - Nara , et al. January 8, 2 | 2013-01-08 |
Defect detection method of display device and defect detection apparatus of display device Grant 8,301,289 - Nara , et al. October 30, 2 | 2012-10-30 |
Method for manufacturing display element and manufacturing apparatus of display element Grant 8,262,974 - Nara , et al. September 11, 2 | 2012-09-11 |
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Display element manufacturing method and manufacturing apparatus, thin film transistor manufacturing method and manufacturing apparatus, and circuit forming apparatus App 20110151630 - NARA; Kei ;   et al. | 2011-06-23 |
Defect Detection Method Of Display Device And Defect Detection Apparatus Of Display Device App 20100256796 - NARA; Kei ;   et al. | 2010-10-07 |
Method For Manufacturing Display Element, Manufacturing Apparatus Of Display Element And Display Device App 20100165269 - NARA; Kei ;   et al. | 2010-07-01 |
Method For Manufacturing Display Element And Manufacturing Apparatus Of Display Element App 20100164130 - NARA; Kei ;   et al. | 2010-07-01 |
Flexible Substrate, Manufacturing Method Of Display Element, And Manufacturing Apparatus Of Display Element App 20100143595 - NARA; Kei ;   et al. | 2010-06-10 |
Exposure Method, Exposure Device, And Micro Device Manufacturing Method App 20090280441 - NARA; Kei | 2009-11-12 |
Exposure Method, Exposure Apparatus, And Method For Producing Device App 20090257033 - Nara; Kei | 2009-10-15 |
Exposure system, device production system, exposure method, and device production method App 20080266539 - Nara; Kei ;   et al. | 2008-10-30 |
Method And Apparatus For Manufacturing Display Devices App 20080254704 - HAMADA; Tomohide ;   et al. | 2008-10-16 |
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Alignment device and method based on imaging characteristics of the image pickup system Grant 5,978,094 - Narabe , et al. November 2, 1 | 1999-11-02 |
Projection exposure apparatus and method having a positional deviation detection system that employs light from an exposure illumination system Grant 5,912,726 - Toguchi , et al. June 15, 1 | 1999-06-15 |
Scanning exposure apparatus and method Grant 5,777,722 - Miyazaki , et al. July 7, 1 | 1998-07-07 |
Exposure apparatus with light shielding portion for plotosensitive elements Grant 5,760,881 - Miyazaki , et al. June 2, 1 | 1998-06-02 |
Exposure method and apparatus Grant 5,623,343 - Nara , et al. April 22, 1 | 1997-04-22 |
Exposure apparatus Grant 5,617,211 - Nara , et al. April 1, 1 | 1997-04-01 |
Scanning exposure apparatus and exposure method Grant 5,602,620 - Miyazaki , et al. February 11, 1 | 1997-02-11 |
Alignment method and apparatus Grant 5,565,988 - Nara , et al. October 15, 1 | 1996-10-15 |
Distance measuring apparatus using multiple switched interferometers Grant 5,523,841 - Nara , et al. June 4, 1 | 1996-06-04 |