Patent applications and USPTO patent grants for NanoWorld AG.The latest application filed is for "micro-mechanical component with cantilever integrated electrical functional element".
Patent | Date |
---|---|
Micro-mechanical component with cantilever integrated electrical functional element Grant 8,810,110 - Sulzbach , et al. August 19, 2 | 2014-08-19 |
Micro-mechanical Component With Cantilever Integrated Electrical Functional Element App 20120242189 - Sulzbach; Thomas ;   et al. | 2012-09-27 |
Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip Grant 8,209,768 - Sulzbach , et al. June 26, 2 | 2012-06-26 |
SPM probe with shortened cantilever Grant 8,011,016 - Sulzbach , et al. August 30, 2 | 2011-08-30 |
Method Of Manufacturing An Spm Probe With A Scanning Tip And With An Alignment Aid Located Opposite The Scanning Tip App 20100095409 - SULZBACH; Thomas ;   et al. | 2010-04-15 |
SPM sensor Grant 7,536,901 - Krause , et al. May 26, 2 | 2009-05-26 |
Apparatus and process for the surface coating of workpieces App 20060124768 - Hartmann; Theo ;   et al. | 2006-06-15 |
SPM sensor App 20060123894 - Krause; Oliver ;   et al. | 2006-06-15 |
Process for producing an SPM sensor Grant 6,979,407 - Lutter December 27, 2 | 2005-12-27 |
SPM sensor and process for producing it Grant 6,958,124 - Lutter October 25, 2 | 2005-10-25 |
Micro device and process for producing it Grant 6,953,751 - Detterbeck , et al. October 11, 2 | 2005-10-11 |
Semiconductor component in a wafer assembly Grant 6,780,767 - Lutter August 24, 2 | 2004-08-24 |
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