Nanometrics Incorporated

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nanometrics Incorporated.The latest application filed is for "foup purge shield".

Company Profile

14.166.69

Nanometrics Incorporated - Milpitas CA US
Nanometrics Inc. - Kanata Ontario CA
Nanometrics Incorporated; - US
Nanometrics Inc. - Ontario CA
Nanometrics Inc. - CA CA
NANOMETRICS INCORPORATED - 1550 Buckeye Drive Milpitas CA
Nanometrics Incorporated - Sunnyvale CA
Nanometrics Incorporated - Sunnyvael CA
Nanometrics Inc. - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Trademarks

Patent Activity

Patent	Date
Surface height determination of transparent film Grant 10,557,803 - Lynch Feb	2020-02-11
Foup Purge Shield App 20200035531 - DOYLE; Paul A. ; et al.	2020-01-30
Local Purge Within Metrology And Inspection Systems App 20200011786 - DOYLE; Paul A. ; et al.	2020-01-09
Surface Height Determination Of Transparent Film App 20190391088 - LYNCH; Graham M.	2019-12-26
Interferometric characterization of surface topography Grant 10,488,184 - Heidrich , et al. Nov	2019-11-26
Local purge within metrology and inspection systems Grant 10,451,542 - Doyle , et al. Oc	2019-10-22
Sample Inspection Using Topography App 20190304851 - SMITH; Nigel P. ; et al.	2019-10-03
Correction Of Angular Error Of Plane-of-incidence Azimuth Of Optical Metrology Device App 20190272305 - VAGOS; Pedro ; et al.	2019-09-05
Local Purge Within Metrology And Inspection Systems App 20190170634 - DOYLE; Paul A. ; et al.	2019-06-06
Sub-resolution Defect Detection App 20190170655 - Smith; Nigel P.	2019-06-06
Correction of angular error of plane-of-incidence azimuth of optical metrology device Grant 10,296,554 - Vagos , et al.	2019-05-21
Scanning white-light interferometry system for characterization of patterned semiconductor features Grant 10,288,408 - Smith , et al.	2019-05-14
Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device Grant 10,274,367 - Shachaf , et al.	2019-04-30
Via characterization for BCD and depth metrology Grant 10,254,110 - Xiao , et al.	2019-04-09
Deconvolution To Reduce The Effective Spot Size Of A Spectroscopic Optical Metrology Device App 20180348055 - Shachaf; Amit ; et al.	2018-12-06
Image based overlay measurement with finite gratings Grant 10,107,621 - Smith October 23, 2	2018-10-23
Optical metrology with purged reference chip Grant 10,082,461 - Klassen , et al. September 25, 2	2018-09-25
Non-adhesive Mounting Assembly For A Tall Rochon Polarizer App 20180259742 - Klassen; Andrew Saul ; et al.	2018-09-13
Focusing System With Filter For Open Or Closed Loop Control App 20180252634 - Shachaf; Amit	2018-09-06
3D target for monitoring multiple patterning process Grant 10,061,210 - Hu , et al. August 28, 2	2018-08-28
Optical metrology using differential fitting Grant 9,995,689 - Vagos June 12, 2	2018-06-12
Scanning White-light Interferometry System For Characterization Of Patterned Semiconductor Features App 20180156597 - Smith; Nigel P. ; et al.	2018-06-07
Deconvolution to reduce the effective spot size of a spectroscopic optical metrology device Grant 9,958,327 - Shachaf , et al. May 1, 2	2018-05-01
Protected lens cover plate for an optical metrology device Grant 9,958,673 - Shields , et al. May 1, 2	2018-05-01
Focusing system with filter for open or closed loop control Grant 9,903,806 - Shachaf February 27, 2	2018-02-27
Optical metrology system for spectral imaging of a sample Grant 9,846,122 - Buczkowski , et al. December 19, 2	2017-12-19
Optical critical dimension target design Grant 9,824,176 - Hu , et al. November 21, 2	2017-11-21
3d Target For Monitoring Multiple Patterning Process App 20170031248 - HU; Jiangtao ; et al.	2017-02-02
Optical Critical Dimension Target Design App 20170024509 - HU; Jiangtao ; et al.	2017-01-26
Interferometric Characterization Of Surface Topography App 20170016715 - HEIDRICH; Kevin Eduard ; et al.	2017-01-19
Simultaneous measurement of multiple overlay errors using diffraction based overlay Grant 9,547,244 - Li January 17, 2	2017-01-17
Optical Metrology Using Differential Fitting App 20160341670 - Vagos; Pedro	2016-11-24
Optical Metrology System For Spectral Imaging Of A Sample App 20160290927 - Buczkowski; Andrzej ; et al.	2016-10-06
Optical Metrology System For Spectral Imaging Of A Sample App 20160116411 - Buczkowski; Andrzej	2016-04-28
Deconvolution To Reduce The Effective Spot Size Of A Spectroscopic Optical Metrology Device App 20160097677 - Shachaf; Amit ; et al.	2016-04-07
Protected Lens Cover Plate For An Optical Metrology Device App 20160033763 - SHIELDS; Jason Robert ; et al.	2016-02-04
Optical Metrology With Purged Reference Chip App 20160033399 - KLASSEN; Andrew S. ; et al.	2016-02-04
Ellipsometer focusing system Grant 9,243,999 - Blasenheim , et al. January 26, 2	2016-01-26
Diffraction based overlay linearity testing Grant 9,239,523 - Li , et al. January 19, 2	2016-01-19
Optical metrology system for spectral imaging of a sample Grant 9,182,351 - Buczkowski November 10, 2	2015-11-10
Simultaneous Measurement Of Multiple Overlay Errors Using Diffraction Based Overlay App 20150308817 - Li; Jie	2015-10-29
Optical metrology with multiple angles of incidence and/or azimuth angles Grant 9,115,987 - Liu , et al. August 25, 2	2015-08-25
Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor Grant 9,110,127 - Kamieniecki August 18, 2	2015-08-18
Focusing System With Filter For Open Or Closed Loop Control App 20150168290 - Shachaf; Amit	2015-06-18
Via Characterization For Bcd And Depth Metrology App 20150168128 - XIAO; Ke ; et al.	2015-06-18
Optical Metrology With Multiple Angles Of Incidence And/or Azumith Angles App 20150153165 - Liu; Zhuan ; et al.	2015-06-04
Optical Metrology System For Spectral Imaging Of A Sample App 20150146193 - Buczkowski; Andrzej	2015-05-28
Simultaneous measurement of multiple overlay errors using diffraction based overlay Grant 9,007,584 - Li April 14, 2	2015-04-14
Correction Of Angular Error Of Plane-of-incidence Azimuth Of Optical Metrology Device App 20140249768 - Vagos; Pedro ; et al.	2014-09-04
Automated system check for metrology unit Grant 8,825,444 - Rovira , et al. September 2, 2	2014-09-02
Dark field diffraction based overlay Grant 8,817,273 - Jeong , et al. August 26, 2	2014-08-26
Thin films and surface topography measurement using reduced library Grant 8,818,754 - Kamenev , et al. August 26, 2	2014-08-26
Ellipsometer Focusing System App 20140098369 - Blasenheim; Barry J. ; et al.	2014-04-10
Dark Field Diffraction Based Overlay App 20130278942 - Jeong; Hwan J. ; et al.	2013-10-24
Ellipsometer focusing system Grant 8,559,008 - Blasenheim , et al. October 15, 2	2013-10-15
Plasma Lamp Ignition Source App 20130257270 - Rojeski; Ronald A.	2013-10-03
Capacitive displacement transducer for a weak-motion inertial sensor Grant 8,544,325 - Ackerley , et al. October 1, 2	2013-10-01
Dual Angles Of Incidence And Azimuth Angles Optical Metrology App 20130242303 - Liu; Zhuan	2013-09-19
Local stress measurement Grant 8,534,135 - Johnson , et al. September 17, 2	2013-09-17
Scatterometry measurement of asymmetric structures Grant 8,525,993 - Rabello , et al. September 3, 2	2013-09-03
Image Based Overlay Measurement With Finite Gratings App 20130208279 - Smith; Nigel P.	2013-08-15
Measurement of a sample using multiple models Grant 8,501,501 - Feng , et al. August 6, 2	2013-08-06
In-plane optical metrology Grant 8,462,345 - Feng June 11, 2	2013-06-11
Mueller matrix spectroscopy using chiroptic Grant 8,427,645 - Vagos , et al. April 23, 2	2013-04-23
Optical metrology on textured samples Grant 8,379,227 - Naot February 19, 2	2013-02-19
Multilayer alignment and overlay target and measurement method Grant 8,339,605 - Ausschnitt , et al. December 25, 2	2012-12-25
Silicon filter for photoluminescence metrology Grant 8,330,946 - Buczkowski , et al. December 11, 2	2012-12-11
Apparatus And Method For Electrical Characterization By Selecting And Adjusting The Light For A Target Depth Of A Semiconductor App 20120276665 - Kamieniecki; Emil	2012-11-01
Thin Films And Surface Topography Measurement Using Reduced Library App 20120271591 - Kamenev; Boris V. ; et al.	2012-10-25
Ellipsometer Focusing System App 20120257200 - Blasenheim; Barry J. ; et al.	2012-10-11
Parallel Acquisition Of Spectra For Diffraction Based Overlay App 20120224176 - Hammond; Michael J.	2012-09-06
Scanning focal length metrology Grant 8,259,297 - Yarussi September 4, 2	2012-09-04
Scanning focal length metrology Grant 8,259,296 - Yarussi , et al. September 4, 2	2012-09-04
Measurement of a sample using multiple models Grant 8,252,608 - Feng , et al. August 28, 2	2012-08-28
Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor Grant 8,232,817 - Kamieniecki July 31, 2	2012-07-31
Mueller Matrix Spectroscopy Using Chiroptic App 20120176618 - Vagos; Pedro ; et al.	2012-07-12
Simulating two-dimensional periodic patterns using compressed fourier space Grant 8,170,838 - Rabello , et al. May 1, 2	2012-05-01
Force-feedback seismometer Grant 8,159,904 - Bainbridge , et al. April 17, 2	2012-04-17
Modeling conductive patterns using an effective model Grant 8,126,694 - Liu , et al. February 28, 2	2012-02-28
In-Plane Optical Metrology App 20120039568 - Feng; Ye	2012-02-16
Multi layer alignment and overlay target and measurement method Grant 8,107,079 - Ausschnitt , et al. January 31, 2	2012-01-31
In-plane optical metrology Grant 8,068,228 - Feng November 29, 2	2011-11-29
Measurement of a sample using multiple models Grant 8,062,910 - Feng , et al. November 22, 2	2011-11-22
Local Stress Measurement App 20110265578 - Johnson; Timothy A. ; et al.	2011-11-03
Method for automatically de-skewing of multiple layer wafer for improved pattern recognition Grant 8,045,790 - Zhou , et al. October 25, 2	2011-10-25
Diffraction Based Overlay Linearity Testing App 20110238365 - Li; Jie ; et al.	2011-09-29
Method for evaluating microstructures on a workpiece based on the orientation of a grating on the workpiece Grant 8,027,037 - Littau , et al. September 27, 2	2011-09-27
Silicon Filter for Photoluminescence Metrology App 20110141460 - Buczkowski; Andrzej ; et al.	2011-06-16
Optical Metrology On Textured Samples App 20110096339 - Naot; Ira	2011-04-28
Scatterometry Measurement of Asymmetric Structures App 20110080585 - Rabello; Silvio J. ; et al.	2011-04-07
Seismic sensor Grant 7,870,789 - Hayman , et al. January 18, 2	2011-01-18
Overlay measurement target Grant 7,847,939 - Smith , et al. December 7, 2	2010-12-07
Sealing ring assembly and mounting method Grant 7,842,179 - Mayes , et al. November 30, 2	2010-11-30
Simulating Two-Dimensional Periodic Patterns Using Compressed Fourier Space App 20100274521 - Rabello; Silvio J. ; et al.	2010-10-28
Determining overlay error using an in-chip overlay target Grant 7,808,643 - Smith , et al. October 5, 2	2010-10-05
Focusing system and method Grant 7,804,641 - Hammond , et al. September 28, 2	2010-09-28
Capacitive Displacement Transducer App 20100223998 - Ackerley; Nicholas Jason ; et al.	2010-09-09
Force-feedback Seismometer App 20100226211 - Bainbridge; Geoffrey ; et al.	2010-09-09
Non-contact apparatus and method for measuring a property of a dielectric layer on a wafer Grant 7,751,061 - Vagos July 6, 2	2010-07-06
Apparatus and Method for Electrical Characterization by Selecting and Adjusting the Light for a Target Depth of a Semiconductor App 20100156445 - Kamieniecki; Emil	2010-06-24
Method for Evaluating Microstructures on a Workpiece Based on the Orientation of a Grating on the Workpiece App 20100135571 - Littau; Mike ; et al.	2010-06-03
Monitoring apparatus and method for improving the accuracy and repeatability of electrochemical capacitance voltage (ECV) measurements Grant 7,713,404 - Mayes , et al. May 11, 2	2010-05-11
Scanning focal length metrology Grant 7,697,135 - Yarussi , et al. April 13, 2	2010-04-13
Apparatus and method for electrical characterization by selecting and adjusting the light for a target depth of a semiconductor Grant 7,663,385 - Kamieniecki February 16, 2	2010-02-16
Method for evaluating microstructures on a workpiece based on the orientation of a grating on the workpiece Grant 7,656,542 - Littau , et al. February 2, 2	2010-02-02
Line profile asymmetry measurement Grant 7,639,371 - Raymond December 29, 2	2009-12-29
Imaging Diffraction Based Overlay App 20090296075 - Hu; Jiangtao ; et al.	2009-12-03
Apparatus and method for enhanced critical dimension scatterometry Grant 7,615,752 - Raymond , et al. November 10, 2	2009-11-10
Modeling Conductive Patterns Using An Effective Model App 20090276198 - Liu; Zhuan ; et al.	2009-11-05
Inertial sensor having a flexing element supporting a movable mass Grant 7,594,438 - Ackerley , et al. September 29, 2	2009-09-29
Sealing Ring Assembly and Mounting Method App 20090229997 - Mayes; Ian Christopher ; et al.	2009-09-17
Detection method and apparatus metal particulates on semiconductors Grant 7,589,834 - Higgs September 15, 2	2009-09-15
Line Profile Asymmetry Measurement App 20090190138 - Raymond; Christopher	2009-07-30
Sealing ring assembly and mounting method Grant 7,556,725 - Mayes , et al. July 7, 2	2009-07-07
Support Pin with Dome Shaped Upper Surface App 20090148256 - Poris; Jaime	2009-06-11
Scatterometry method with characteristic signatures matching Grant 7,532,317 - Smith , et al. May 12, 2	2009-05-12
Determining Overlay Error Using an In-chip Overlay Target App 20090116014 - Smith; Nigel P. ; et al.	2009-05-07
Line profile asymmetry measurement Grant 7,515,279 - Raymond April 7, 2	2009-04-07
Scatterometer having a computer system that reads data from selected pixels of the sensor array Grant 7,511,293 - Raymond , et al. March 31, 2	2009-03-31
Photoluminescence imaging with preferential detection of photoluminescence signals emitted from a specified material layer of a wafer or other workpiece Grant 7,504,642 - Hummel , et al. March 17, 2	2009-03-17
Apparatus and method for enhanced critical dimension scatterometry Grant 7,502,101 - Raymond , et al. March 10, 2	2009-03-10
Method and apparatus for measuring thickness and optical properties of a thin-film on a substrate Grant 7,492,467 - Du-Nour , et al. February 17, 2	2009-02-17
In-Plane Optical Metrology App 20090040613 - Feng; Ye	2009-02-12
Methods and systems for determining overlay error based on target image symmetry Grant 7,477,396 - Smith , et al. January 13, 2	2009-01-13
Method for Automatically De-Skewing of Multiple Layer Wafer for Improved Pattern Recognition App 20090010529 - Zhou; Jian ; et al.	2009-01-08
Imaging tool calibration artifact and method Grant 7,473,502 - Ausschnitt , et al. January 6, 2	2009-01-06
Method and apparatus for process control with in-die metrology Grant 7,469,164 - Du-Nour December 23, 2	2008-12-23
Measurement of a sample using multiple models Grant 7,465,590 - Feng , et al. December 16, 2	2008-12-16
Correction of optical metrology for focus offset Grant 7,450,225 - Liu , et al. November 11, 2	2008-11-11
Micro defects in semi-conductors Grant 7,446,868 - Higgs , et al. November 4, 2	2008-11-04
Differential wavelength photoluminescence for non-contact measuring of contaminants and defects located below the surface of a wafer or other workpiece Grant 7,446,321 - Laurent , et al. November 4, 2	2008-11-04
Method for automatic de-skewing of multiple layer wafer for improved pattern recognition Grant 7,433,509 - Zhou , et al. October 7, 2	2008-10-07
Darkfield defect inspection with spectral contents Grant 7,433,034 - Huang October 7, 2	2008-10-07
Apparatus and method for non-contact assessment of a constituent in semiconductor substrates Grant 7,410,815 - Vagos August 12, 2	2008-08-12
Inertial Sensor App 20080148851 - Ackerley; Nicholas Jason ; et al.	2008-06-26
Mass positioning apparatus for a seismic sensor Grant 7,388,806 - Hayman , et al. June 17, 2	2008-06-17
Seismic Sensor App 20080134786 - Hayman; Mark Jonathan Brice ; et al.	2008-06-12
Mass positioning adjustment mechanism for a seismic sensor Grant 7,385,873 - Hayman , et al. June 10, 2	2008-06-10
Overlay measurement target Grant 7,379,184 - Smith , et al. May 27, 2	2008-05-27
Seismic sensor with thermal stabilization Grant 7,376,049 - Hayman , et al. May 20, 2	2008-05-20
Spectrometer measurement of diffracting structures Grant 7,372,565 - Holden , et al. May 13, 2	2008-05-13
Characterizing residue on a sample Grant 7,362,448 - Liu , et al. April 22, 2	2008-04-22
Generation of Monochromatic and Collimated X-Ray Beams App 20080075229 - Ryan; Thomas W.	2008-03-27
Methods and apparatuses for assessing overlay error on workpieces App 20080018897 - Littau; Michael	2008-01-24
Non-Contact Apparatus and Method for Measuring a Property of a Dielectric Layer on a Wafer App 20080018882 - Vagos; Pedro	2008-01-24
Transferring, buffering and measuring a substrate in a metrology system Grant 7,301,623 - Madsen , et al. November 27, 2	2007-11-27
Metrology/inspection positioning system Grant 7,295,314 - Spady , et al. November 13, 2	2007-11-13
Image control in a metrology/inspection positioning system Grant 7,289,215 - Spady , et al. October 30, 2	2007-10-30
Image Control In A Metrology/inspection Positioning System App 20070222991 - Spady; Blaine R. ; et al.	2007-09-27
Alignment target to be measured with multiple polarization states Grant 7,236,244 - Yang , et al. June 26, 2	2007-06-26
Alignment target with designed in offset Grant 7,230,705 - Yang , et al. June 12, 2	2007-06-12
Modeling a sample with an underlying complicated structure Grant 7,202,958 - McGahan April 10, 2	2007-04-10
Eddy current sensor with concentric confocal distance sensor Grant 7,173,417 - Poris , et al. February 6, 2	2007-02-06
Apparatus and method for the measurement of diffracting structures Grant 7,115,858 - Holden , et al. October 3, 2	2006-10-03
Pulsed spectroscopy with spatially variable polarization modulation element Grant 7,064,828 - Rovira , et al. June 20, 2	2006-06-20
Spectroscopically measured overlay target Grant 7,061,615 - Lowe-Webb June 13, 2	2006-06-13
Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation Grant 7,061,613 - Huang , et al. June 13, 2	2006-06-13
Positioning two elements using an alignment target with a designed offset Grant 7,046,361 - Yang , et al. May 16, 2	2006-05-16
Method and apparatus for inspecting defects on polishing pads to be used with chemical mechanical polishing apparatus Grant 7,027,640 - Park , et al. April 11, 2	2006-04-11
Accurate thickness measurement of thin conductive film Grant 7,005,306 - Poris February 28, 2	2006-02-28
Measuring an alignment target with a single polarization state Grant 6,992,764 - Yang , et al. January 31, 2	2006-01-31
Method and apparatus for using an alignment target with designed in offset Grant 6,982,793 - Yang , et al. January 3, 2	2006-01-03
Encoder measurement based on layer thickness Grant 6,970,255 - Spady , et al. November 29, 2	2005-11-29
Encoder with an alignment target Grant 6,958,819 - Heaton , et al. October 25, 2	2005-10-25
Measuring an alignment target with multiple polarization states Grant 6,949,462 - Yang , et al. September 27, 2	2005-09-27
Leveling a measured height profile Grant 6,925,860 - Poris , et al. August 9, 2	2005-08-09
Precision polar coordinate stage Grant 6,910,847 - Blaufus , et al. June 28, 2	2005-06-28
Measurement of diffracting structures using one-half of the non-zero diffracted orders Grant 6,898,537 - McGahan May 24, 2	2005-05-24
Method of measuring small pads on a substrate Grant 6,859,279 - Tabet February 22, 2	2005-02-22
Reference calibration of metrology instrument App 20050036143 - Huang, Chunsheng	2005-02-17
Optical metrology system with combined interferometer and ellipsometer Grant 6,856,384 - Rovira February 15, 2	2005-02-15
Stage with two substrate buffer station Grant 6,854,948 - Spady , et al. February 15, 2	2005-02-15
Enhanced throughput of a metrology tool Grant 6,853,873 - Rollo , et al. February 8, 2	2005-02-08
Configurable metrology device that operates in reflectance mode, transmittance mode, or mixed mode Grant 6,842,251 - Holden January 11, 2	2005-01-11
High precision substrate prealigner Grant 6,836,690 - Spady , et al. December 28, 2	2004-12-28
Method of determining material using intensity of light Grant 6,813,031 - Poris , et al. November 2, 2	2004-11-02
Compact rotating stage Grant 6,779,278 - Spady , et al. August 24, 2	2004-08-24
Method of generating calibration data for relative height measurement Grant 6,772,620 - Poris August 10, 2	2004-08-10
Substrate surface profile and stress measurement Grant 6,762,846 - Poris July 13, 2	2004-07-13
Combination of normal and oblique incidence polarimetry for the characterization of gratings Grant 6,713,753 - Rovira , et al. March 30, 2	2004-03-30
Method of measuring dishing Grant 6,710,888 - Poris March 23, 2	2004-03-23
Method of measuring dishing using relative height measurements Grant 6,700,670 - Poris March 2, 2	2004-03-02
Alignment of a rotatable polarizer with a sample Grant 6,665,070 - Yarussi , et al. December 16, 2	2003-12-16
Dual spot confocal displacement sensor Grant 6,657,216 - Poris December 2, 2	2003-12-02
Profiling method Grant 6,633,389 - Poris , et al. October 14, 2	2003-10-14
Method and apparatus for inspecting defects on polishing pads to be used with chemical mechanical polishing apparatus App 20030039387 - Park, Sung-Jin ; et al.	2003-02-27
Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizer Grant 6,522,406 - Rovira , et al. February 18, 2	2003-02-18
Edge gripped substrate loading and unloading method Grant 6,485,253 - Adams , et al. November 26, 2	2002-11-26
Elemental concentration measuring methods and instruments Grant 6,381,009 - McGahan April 30, 2	2002-04-30
Edge gripped substrate lift mechanism Grant 6,343,905 - Adams , et al. February 5, 2	2002-02-05
Compact optical reflectometer system Grant 6,181,427 - Yarussi , et al. January 30, 2	2001-01-30
Sample support with a non-reflecting sample supporting surface Grant 6,108,077 - Heaton , et al. August 22, 2	2000-08-22
Integrated optical measurement instruments Grant 5,943,122 - Holmes August 24, 1	1999-08-24
Precision weighing to monitor the thickness and uniformity of deposited or etched thin film Grant 5,625,170 - Poris April 29, 1	1997-04-29
Scatter correction in reflectivity measurements Grant 5,452,091 - Johnson September 19, 1	1995-09-19
Method for determining absolute reflectance of a material in the ultraviolet range Grant RE34,783 - Coates November 8, 1	1994-11-08
Wide band non-coated beam splitter Grant 5,164,857 - Lin November 17, 1	1992-11-17
Method for determining absolute reflectance of a material in the ultraviolet range Grant 5,045,704 - Coates September 3, 1	1991-09-03
Sensor devices with internal packaged coolers Grant 4,926,227 - Jensen May 15, 1	1990-05-15
Method for normalizing the detection signals of magnified images of fluorescing materials Grant 4,884,890 - Coates December 5, 1	1989-12-05
Thickness measurements of thin conductive films Grant 4,849,694 - Coates July 18, 1	1989-07-18
Thin dielectric film measuring system Grant 4,826,321 - Coates , et al. May 2, 1	1989-05-02
Secondary electron emission control in electron microscopes Grant 4,743,757 - Coates May 10, 1	1988-05-10
Method for electron gun alignment in electron microscopes Grant 4,663,525 - Ohtsuki , et al. May 5, 1	1987-05-05
Microscope stage assembly and control system Grant 4,627,009 - Holmes , et al. December 2, 1	1986-12-02
Integrated circuit wafer handling system Grant 4,604,020 - Toro Lira , et al. August 5, 1	1986-08-05
Method and apparatus for automatic optical focusing on an optically discernible feature on an object Grant 4,600,832 - Grund July 15, 1	1986-07-15
Integrated circuit wafer transport mechanism Grant 4,427,332 - Manriquez January 24, 1	1984-01-24
Computerized micromeasuring system and method therefor Grant 4,373,817 - Coates February 15, 1	1983-02-15
Method for the precise determination of photoresist exposure time Grant 4,308,586 - Coates December 29, 1	1981-12-29

Company Registrations

NCAGE Code	03XZ7	NANOMETRICS INC
NCAGE Code	7S589	NANOMETRICS INC
NCAGE Code	62055	NANOMETRICS INCORPORATED
NCAGE Code	62240	NANOMETRICS INC
CAGE Code	03XZ7	NANOMETRICS INC
CAGE Code	7S589	NANOMETRICS INC
CAGE Code	62240	NANOMETRICS INC
S.A.M. Registration	03XZ7 [246623821]	NANOMETRICS INC
SEC	0000704532	NANOMETRICS INC of DELAWARE

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