Nangoy; Roy C.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nangoy; Roy C..The latest application filed is for "cleaning system for polishing liquid delivery arm".

Company Profile

3.20.23

Nangoy; Roy C. - Santa Clara CA
Nangoy; Roy C - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Clog detection in a multi-port fluid delivery system Grant 11,251,047 - Nangoy , et al. February 15, 2	2022-02-15
Cleaning System For Polishing Liquid Delivery Arm App 20210402565 - Nangoy; Roy C. ; et al.	2021-12-30
Clog Detection In A Multi-port Fluid Delivery System App 20190148160 - NANGOY; Roy C. ; et al.	2019-05-16
Automatic Cleaning Machine For Cleaning Process Kits App 20190070639 - NANGOY; Roy C. ; et al.	2019-03-07
Gas distribution apparatus for directional and proportional delivery of process gas to a process chamber Grant 9,488,315 - Nangoy , et al. November 8, 2	2016-11-08
Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery Grant 9,305,810 - Singh , et al. April 5, 2	2016-04-05
Stationary actively-cooled shadow ring for heat dissipation in plasma chamber Grant 9,196,498 - Nangoy November 24, 2	2015-11-24
Proportional and uniform controlled gas flow delivery for dry plasma etch apparatus Grant 9,162,236 - Nangoy , et al. October 20, 2	2015-10-20
Bipolar electrostatic chuck for dicing tape thermal management during plasma dicing Grant 9,117,868 - Nangoy August 25, 2	2015-08-25
Method and apparatus for high efficiency gas dissociation in inductive coupled plasma reactor Grant 9,070,633 - Nangoy , et al. June 30, 2	2015-06-30
Cooling pedestal for dicing tape thermal management during plasma dicing Grant 9,034,771 - Nangoy May 19, 2	2015-05-19
High efficiency gas dissociation in inductively coupled plasma reactor with improved uniformity Grant 8,920,599 - Dinev , et al. December 30, 2	2014-12-30
Gas Distribution Apparatus For Directional And Proportional Delivery Of Process Gas To A Process Chamber App 20140261805 - Nangoy; Roy C. ; et al.	2014-09-18
Method And Apparatus For High Efficiency Gas Dissociation In Inductive Coupled Plasma Reactor App 20140256148 - NANGOY; Roy C. ; et al.	2014-09-11
Method and apparatus for high efficiency gas dissociation in inductive couple plasma reactor Grant 8,753,474 - Nangoy , et al. June 17, 2	2014-06-17
Proportional And Uniform Controlled Gas Flow Delivery For Dry Plasma Etch Apparatus App 20130284700 - NANGOY; Roy C. ; et al.	2013-10-31
Method And Apparatus For Fast Gas Exchange, Fast Gas Switching, And Programmable Gas Delivery App 20130000731 - SINGH; Saravjeet ; et al.	2013-01-03
Measurement Of Pad Thickness And Control Of Conditioning App 20120270477 - Nangoy; Roy C. ; et al.	2012-10-25
High Efficiency Gas Dissociation In Inductively Coupled Plasma Reactor With Improved Uniformity App 20120091098 - Dinev; Jivko ; et al.	2012-04-19
In-situ performance prediction of pad conditioning disk by closed loop torque monitoring Grant 8,096,852 - Deshpande , et al. January 17, 2	2012-01-17
Apparatus And Methods For Conditioning A Polishing Pad App 20110318997 - Nangoy; Roy C. ; et al.	2011-12-29
Apparatus and methods for conditioning a polishing pad Grant 7,963,826 - Nangoy , et al. June 21, 2	2011-06-21
Method And Apparatus For High Efficiency Gas Dissociation In Inductive Couple Plasma Reactor App 20110073564 - Nangoy; Roy C. ; et al.	2011-03-31
Apparatus And Methods For Conditioning A Polishing Pad App 20100093263 - Nangoy; Roy C. ; et al.	2010-04-15
In-situ Performance Prediction Of Pad Conditioning Disk By Closed Loop Torque Monitoring App 20100035525 - Deshpande; SAMEER ; et al.	2010-02-11
Method And Apparatus Of A Substrate Etching System And Process App 20090272717 - Pamarthy; Sharma V. ; et al.	2009-11-05
Apparatus And Methods For Conditioning A Polishing Pad App 20090036036 - Nangoy; Roy C. ; et al.	2009-02-05
Apparatus And Methods For Conditioning A Polishing Pad App 20090036035 - Nangoy; Roy C. ; et al.	2009-02-05
Apparatus and methods for positioning wafers Grant 7,433,759 - Nangoy October 7, 2	2008-10-07
Systems And Methods For Modular And Configurable Substrate Cleaning App 20080156359 - OLGADO; DONALD J.K. ; et al.	2008-07-03
Horizontal Megasonic Module For Cleaning Substrates App 20080156360 - Olgado; Donald J.K. ; et al.	2008-07-03
Methods And Apparatus For Supporting A Substrate In A Horizontal Orientation During Cleaning App 20080011325 - Olgado; Donald J.K. ; et al.	2008-01-17
Apparatus And Methods For Conditioning A Polishing Pad App 20070212983 - Nangoy; Roy C. ; et al.	2007-09-13
Closed loop control on liquid delivery system ECP slim cell Grant 7,155,319 - Nangoy , et al. December 26, 2	2006-12-26
Closed loop control on liquid delivery system ECP slim cell App 20060190099 - Nangoy; Roy C. ; et al.	2006-08-24
Apparatus and methods for positioning wafers App 20060020367 - Nangoy; Roy C.	2006-01-26

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