Patent | Date |
---|
Substrate Processing Method, Substrate Processing Apparatus, And Storage Medium App 20200016623 - Nanba; Hiromitsu | 2020-01-16 |
Substrate processing apparatus, substrate processing method, and storage medium Grant 10,490,424 - Nanba Nov | 2019-11-26 |
Wet etching method, substrate liquid processing apparatus, and storage medium Grant 10,431,448 - Nanba O | 2019-10-01 |
Substrate processing method, substrate processing apparatus and recording medium Grant 10,403,518 - Nanba , et al. Sep | 2019-09-03 |
Substrate Processing Apparatus, Substrate Processing Method, And Storage Medium App 20190080934 - NANBA; Hiromitsu | 2019-03-14 |
Substrate Processing Method, Substrate Processing Apparatus And Recording Medium App 20180269076 - Nanba; Hiromitsu ;   et al. | 2018-09-20 |
Wet Etching Method, Substrate Liquid Processing Apparatus, And Storage Medium App 20180012754 - Nanba; Hiromitsu | 2018-01-11 |
Substrate Processing Apparatus, Deposit Removing Method Of Substrate Processing Apparatus And Recording Medium App 20150323250 - Mizuno; Tsuyoshi ;   et al. | 2015-11-12 |
Liquid processing apparatus and method Grant 8,479,753 - Nanba , et al. July 9, 2 | 2013-07-09 |
Liquid processing apparatus Grant 8,444,772 - Itoh , et al. May 21, 2 | 2013-05-21 |
Substrate processing apparatus, substrate processing method, and drain cup cleaning method Grant 8,152,933 - Nanba , et al. April 10, 2 | 2012-04-10 |
Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium Grant 8,113,221 - Nanba , et al. February 14, 2 | 2012-02-14 |
Liquid processing apparatus and liquid processing method Grant 8,051,862 - Ito , et al. November 8, 2 | 2011-11-08 |
Liquid processing apparatus and liquid processing method Grant 8,043,467 - Nanba , et al. October 25, 2 | 2011-10-25 |
Cleaning apparatus and method and computer readable medium Grant 8,043,440 - Nanba , et al. October 25, 2 | 2011-10-25 |
Liquid processing apparatus Grant 7,998,308 - Kaneko , et al. August 16, 2 | 2011-08-16 |
Substrate Cleaning Method, Substrate Cleaning Apparatus And Computer Readable Recording Medium App 20110155193 - NANBA; Hiromitsu ;   et al. | 2011-06-30 |
Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium Grant 7,927,429 - Nanba , et al. April 19, 2 | 2011-04-19 |
Liquid processing apparatus Grant 7,793,610 - Akimoto , et al. September 14, 2 | 2010-09-14 |
Substrate Processing Apparatus, Substrate Processing Method, and Drain Cup Cleaning Method App 20100212701 - Nanba; Hiromitsu ;   et al. | 2010-08-26 |
Substrate processing apparatus and method Grant 7,749,333 - Nanba July 6, 2 | 2010-07-06 |
Liquid Processing Apparatus and liquid Processing Method App 20100144158 - Ito; Norihiro ;   et al. | 2010-06-10 |
Substrate cleaning method Grant 7,699,939 - Nanba April 20, 2 | 2010-04-20 |
Liquid Processing Apparatus App 20090205155 - ITOH; Norihiro ;   et al. | 2009-08-20 |
Substrate processing apparatus and method App 20090056766 - Nanba; Hiromitsu | 2009-03-05 |
Cleaning apparatus and method and computer readable medium App 20080173333 - Nanba; Hiromitsu ;   et al. | 2008-07-24 |
Liquid processing apparatus and liquid processing method Grant 7,354,484 - Orii , et al. April 8, 2 | 2008-04-08 |
Liquid processing apparatus and liquid processing method App 20080006299 - ORII; Takehiko ;   et al. | 2008-01-10 |
Liquid processing apparatus and method App 20070289528 - Nanba; Hiromitsu ;   et al. | 2007-12-20 |
Liquid processing apparatus App 20070240824 - Kaneko; Satoshi ;   et al. | 2007-10-18 |
Liquid processing apparatus App 20070240638 - Akimoto; Masami ;   et al. | 2007-10-18 |
Liquid processing apparatus and liquid processing method App 20070231483 - Nanba; Hiromitsu ;   et al. | 2007-10-04 |
Liquid processing apparatus and liquid processing method Grant 7,275,553 - Orii , et al. October 2, 2 | 2007-10-02 |
Substrate cleaning method and substrate cleaning apparatus App 20070137677 - Nanba; Hiromitsu | 2007-06-21 |
Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium App 20070131256 - Nanba; Hiromitsu ;   et al. | 2007-06-14 |
Liquid processing apparatus and liquid processing method App 20030226577 - Orll, Takehiko ;   et al. | 2003-12-11 |