NANASAKI; Genichi
Patent Applications and Registrations
Patent applications and USPTO patent grants for NANASAKI; Genichi.The latest application filed is for "substrate processing system and particle removal method".
- NANASAKI; Genichi - Miyagi JP
| Patent | Date |
|---|---|
| Substrate Processing System And Particle Removal Method App 20220199435 - NANASAKI; Genichi ; et al. | 2022-06-23 |
| Substrate Processing Apparatus, Purge Gas Control Method, And Vacuum Transfer Chamber Cleaning Method App 20220080476 - AMIKURA; Norihiko ; et al. | 2022-03-17 |
| Conveyance robot replacement apparatus and conveyance robot replacement method Grant 10,133,266 - Dogome , et al. November 20, 2 | 2018-11-20 |
| Purging apparatus and purging method for substrate storage container Grant 10,010,913 - Kaise , et al. July 3, 2 | 2018-07-03 |
| Conveyance Robot Replacement Apparatus And Conveyance Robot Replacement Method App 20160011587 - DOGOME; Masahiro ; et al. | 2016-01-14 |
| Purging Apparatus And Purging Method For Substrate Storage Container App 20150040950 - Kaise; Seiichi ; et al. | 2015-02-12 |
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