| Patent | Date |
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Methods for forming doped silicon oxide thin films
Grant 11,302,527 - Takamure , et al. April 12, 2 | 2022-04-12 |
FORMATION OF SiN THIN FILMS
App 20220044923 - Suzuki; Toshiya ; et al. | 2022-02-10 |
Formation of SiN thin films
Grant 11,133,181 - Suzuki , et al. September 28, 2 | 2021-09-28 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20200388487 - Takamure; Noboru ; et al. | 2020-12-10 |
Reaction chamber passivation and selective deposition of metallic films
Grant 10,793,946 - Longrie , et al. October 6, 2 | 2020-10-06 |
Methods for forming doped silicon oxide thin films
Grant 10,784,105 - Takamure , et al. Sept | 2020-09-22 |
Reaction Chamber Passivation And Selective Deposition Of Metallic Films
App 20200291511 - Longrie; Delphine ; et al. | 2020-09-17 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20200185218 - Takamure; Noboru ; et al. | 2020-06-11 |
Methods for forming doped silicon oxide thin films
Grant 10,510,530 - Takamure , et al. Dec | 2019-12-17 |
FORMATION OF SiN THIN FILMS
App 20190378711 - Suzuki; Toshiya ; et al. | 2019-12-12 |
Reaction chamber passivation and selective deposition of metallic films
Grant 10,480,064 - Longrie , et al. Nov | 2019-11-19 |
Formation of SiN thin films
Grant 10,410,857 - Suzuki , et al. Sept | 2019-09-10 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20190172708 - Takamure; Noboru ; et al. | 2019-06-06 |
Reaction Chamber Passivation And Selective Deposition Of Metallic Films
App 20190055643 - Longrie; Delphine ; et al. | 2019-02-21 |
Methods for forming doped silicon oxide thin films
Grant 10,147,600 - Takamure , et al. De | 2018-12-04 |
Reaction chamber passivation and selective deposition of metallic films
Grant 10,041,166 - Longrie , et al. August 7, 2 | 2018-08-07 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20180211834 - Takamure; Noboru ; et al. | 2018-07-26 |
Selective deposition of metallic films
Grant 10,014,212 - Chen , et al. July 3, 2 | 2018-07-03 |
Reaction Chamber Passivation And Selective Deposition Of Metallic Films
App 20180080121 - Longrie; Delphine ; et al. | 2018-03-22 |
Method for protecting layer by forming hydrocarbon-based extremely thin film
Grant 9,899,291 - Kato , et al. February 20, 2 | 2018-02-20 |
Methods for forming doped silicon oxide thin films
Grant 9,875,893 - Takamure , et al. January 23, 2 | 2018-01-23 |
Selective Deposition Of Metallic Films
App 20170358482 - Chen; Shang ; et al. | 2017-12-14 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20170338111 - Takamure; Noboru ; et al. | 2017-11-23 |
Selective deposition of metallic films
Grant 9,805,974 - Chen , et al. October 31, 2 | 2017-10-31 |
Reaction chamber passivation and selective deposition of metallic films
Grant 9,803,277 - Longrie , et al. October 31, 2 | 2017-10-31 |
Method for forming silicon oxide cap layer for solid state diffusion process
Grant 9,607,837 - Namba March 28, 2 | 2017-03-28 |
FORMATION OF SiN THIN FILMS
App 20170062204 - SUZUKI; TOSHIYA ; et al. | 2017-03-02 |
Deposition of boron and carbon containing materials
Grant 9,576,790 - Pore , et al. February 21, 2 | 2017-02-21 |
Methods for forming doped silicon oxide thin films
Grant 9,564,314 - Takamure , et al. February 7, 2 | 2017-02-07 |
Method For Protecting Layer By Forming Hydrocarbon-based Extremely Thin Film
App 20170018477 - Kato; Richika ; et al. | 2017-01-19 |
Low-oxidation plasma-assisted process
Grant 9,464,352 - Nakano , et al. October 11, 2 | 2016-10-11 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20160196970 - Takamure; Noboru ; et al. | 2016-07-07 |
Methods for forming doped silicon oxide thin films
Grant 9,368,352 - Takamure , et al. June 14, 2 | 2016-06-14 |
Low-Oxidation Plasma-Assisted Process
App 20150315704 - Nakano; Ryu ; et al. | 2015-11-05 |
Deposition Of Boron And Carbon Containing Materials
App 20150287591 - Pore; Viljami J. ; et al. | 2015-10-08 |
Methods for forming doped silicon oxide thin films
Grant 9,153,441 - Takamure , et al. October 6, 2 | 2015-10-06 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20150147875 - Takamure; Noboru ; et al. | 2015-05-28 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20150017794 - Takamure; Noboru ; et al. | 2015-01-15 |
Methods for forming doped silicon oxide thin films
Grant 8,679,958 - Takamure , et al. March 25, 2 | 2014-03-25 |
Method of tailoring conformality of Si-containing film
Grant 8,669,185 - Onizawa , et al. March 11, 2 | 2014-03-11 |
Methods For Forming Doped Silicon Oxide Thin Films
App 20130115763 - Takamure; Noboru ; et al. | 2013-05-09 |
Method of forming conformal film having si-N bonds on high-aspect ratio pattern
Grant 8,394,466 - Hong , et al. March 12, 2 | 2013-03-12 |
Method for forming metal film by ALD using beta-diketone metal complex
Grant 8,133,555 - Shinriki , et al. March 13, 2 | 2012-03-13 |
Method of Forming Conformal Film Having Si-N Bonds on High-Aspect Ratio Pattern
App 20120058282 - Hong; Kuo-wei ; et al. | 2012-03-08 |
METHOD OF TAILORING CONFORMALITY OF Si-CONTAINING FILM
App 20120028469 - Onizawa; Shigeyuki ; et al. | 2012-02-02 |
Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition
Grant 8,084,104 - Shinriki , et al. December 27, 2 | 2011-12-27 |
Method For Forming Metal Film By Ald Using Beta-diketone Metal Complex
App 20100092696 - Shinriki; Hiroshi ; et al. | 2010-04-15 |
Atomic Composition Controlled Ruthenium Alloy Film Formed By Plasma-enhanced Atomic Layer Deposition
App 20100055433 - Shinriki; Hiroshi ; et al. | 2010-03-04 |
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