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Composition For Resist Underlayer Film Formation, Resist Underlayer Film And Method For Producing Patterned Substrate App 20180348633 - Wakamatsu; Goji ;   et al. | 2018-12-06 |
Radiation-sensitive Resin Composition And Resist Pattern-forming Method App 20180329298 - NISHIKORI; Katsuaki ;   et al. | 2018-11-15 |
Acid diffusion control agent, radiation-sensitive resin composition, resist pattern-forming method, compound, and production method Grant 10,088,750 - Namai , et al. October 2, 2 | 2018-10-02 |
Radiation-sensitive resin composition and resist pattern-forming method Grant 9,874,816 - Namai January 23, 2 | 2018-01-23 |
Radiation-sensitive Resin Composition And Resist Pattern-forming Method App 20170363961 - NAMAI; Hayato | 2017-12-21 |
Radiation-sensitive resin composition and resist pattern-forming method Grant 9,760,004 - Miyata , et al. September 12, 2 | 2017-09-12 |
Photoresist composition, compound, and production method thereof Grant 9,720,322 - Namai , et al. August 1, 2 | 2017-08-01 |
Radiation-sensitive resin composition, resist pattern-forming method, polymer, and method for producing compound Grant 9,703,195 - Namai , et al. July 11, 2 | 2017-07-11 |
Acid Diffusion Control Agent, Radiation-sensitive Resin Composition, Resist Pattern-forming Method, Compound, And Production Method App 20170131632 - NAMAI; Hayato ;   et al. | 2017-05-11 |
Resin Composition, Resist Pattern-forming Method And Polymer App 20170115570 - NAMAI; Hayato | 2017-04-27 |
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Acid diffusion control agent, radiation-sensitive resin composition, resist pattern-forming method, compound, and production method Grant 9,588,423 - Namai , et al. March 7, 2 | 2017-03-07 |
Photoresist composition, resist pattern-forming method, acid diffusion control agent, and compound Grant 9,557,641 - Namai January 31, 2 | 2017-01-31 |
Radiation-sensitive resin composition, resist pattern-forming method, acid diffusion control agent, compound, and method for producing compound Grant 9,529,259 - Namai December 27, 2 | 2016-12-27 |
Photoresist Composition, Compound, And Production Method Thereof App 20160370700 - NAMAI; Hayato ;   et al. | 2016-12-22 |
Radiation-sensitive Resin Composition And Resist Pattern-forming Method App 20160363859 - NAMAI; Hayato | 2016-12-15 |
Photoresist composition, compound, and production method thereof Grant 9,477,149 - Namai , et al. October 25, 2 | 2016-10-25 |
Composition for film formation, resist underlayer film, and forming method of resist underlayer film, and pattern-forming method Grant 9,412,593 - Namai , et al. August 9, 2 | 2016-08-09 |
Radiation-sensitive Resin Composition And Resist Pattern-forming Method App 20160202608 - NAMAI; Hayato | 2016-07-14 |
Resin Composition, Resist Pattern-forming Method And Polymer App 20160185999 - NAMAI; Hayato | 2016-06-30 |
Photoresist composition, resist pattern-forming method, compound, acid generating agent, and photodegradable base Grant 9,323,146 - Namai , et al. April 26, 2 | 2016-04-26 |
Method for improving self-assembled polymer features Grant 9,233,840 - Cheng , et al. January 12, 2 | 2016-01-12 |
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Photoresist Composition, Resist Pattern-forming Method, Acid Diffusion Control Agent, And Compound App 20150309406 - NAMAI; Hayato | 2015-10-29 |
Composition For Film Formation, Resist Underlayer Film, And Forming Method Of Resist Underlayer Film, And Pattern-forming Method App 20150267046 - NAMAI; Hayato ;   et al. | 2015-09-24 |
Insulation pattern-forming method and insulation pattern-forming material Grant 9,126,231 - Dei , et al. September 8, 2 | 2015-09-08 |
Radiation-sensitive Resin Composition And Resist Pattern-forming Method App 20150093703 - MIYATA; Hiromu ;   et al. | 2015-04-02 |
Acid Diffusion Control Agent, Radiation-sensitive Resin Composition, Resist Pattern-forming Method, Compound, And Production Method App 20150079520 - NAMAI; Hayato ;   et al. | 2015-03-19 |
Pattern-forming method Grant 8,968,586 - Namai March 3, 2 | 2015-03-03 |
Resist Pattern-forming Method And Photoresist Composition App 20150010866 - Osaki; Hitoshi ;   et al. | 2015-01-08 |
Photoresist Composition, Compound, And Production Method Thereof App 20150004545 - NAMAI; Hayato ;   et al. | 2015-01-01 |
Photoresist Composition, Resist Pattern-forming Method, Acid Diffusion Control Agent, And Compound App 20150004544 - NAMAI; Hayato | 2015-01-01 |
Photoresist Composition, Resist Pattern-forming Method, Compound, Acid Generating Agent, And Photodegradable Base App 20140363769 - NAMAI; Hayato ;   et al. | 2014-12-11 |
Method for forming pattern Grant 8,883,023 - Wakamatsu , et al. November 11, 2 | 2014-11-11 |
Radiation-sensitive Resin Composition, Polymer, Compound, And Method For Producing Compound App 20140186771 - NAMAI; Hayato | 2014-07-03 |
Methods of forming topographical features using segregating polymer mixtures Grant 8,734,904 - Cheng , et al. May 27, 2 | 2014-05-27 |
Pattern-forming method Grant 8,703,395 - Namai , et al. April 22, 2 | 2014-04-22 |
Pattern-forming Method App 20130206727 - NAMAI; Hayato | 2013-08-15 |
Pattern-forming Method App 20130107235 - NAMAI; Hayato ;   et al. | 2013-05-02 |
Method For Forming Pattern App 20130098870 - WAKAMATSU; Goji ;   et al. | 2013-04-25 |
Insulation Pattern-forming Method And Insulation Pattern-forming Material App 20130084394 - Dei; Satoshi ;   et al. | 2013-04-04 |
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